Problem amtetcher SNF 2007-12-12 21:12:38: Gas Flow Error Messages

king at king at
Wed Dec 12 21:12:38 PST 2007

The AMT etches fine but gives errors with Program 3 every time: "ERR FL1 WAIT PR  FLOW 1 OUT LIMIT."  It toggles between WAIT and RDY even though the flow was good and steady (gas 1=  6 of 6 setpoint).   Needed to try several times each etch before it would fire up.  Also got venting errors. The shutdown Pgm 2 was fine.  
Maybe these problems started with the power shutdown.
Etch rate tests looked good.

More information about the amtetcher-pcs mailing list