Problem amtetcher SNF 2007-12-12 21:12:38: Gas Flow Error Messages

king at snf.stanford.edu king at snf.stanford.edu
Wed Dec 12 21:12:38 PST 2007


The AMT etches fine but gives errors with Program 3 every time: "ERR FL1 WAIT PR  FLOW 1 OUT LIMIT."  It toggles between WAIT and RDY even though the flow was good and steady (gas 1=  6 of 6 setpoint).   Needed to try several times each etch before it would fire up.  Also got venting errors. The shutdown Pgm 2 was fine.  
Maybe these problems started with the power shutdown.
Etch rate tests looked good.




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