From mtang at snf.stanford.edu Thu Jul 5 09:08:50 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 09:08:50 -0700 Subject: Comment amtetcher SNF 2007-07-05 09:08:49: Breaker found off Message-ID: Our ever vigilant crack maintenance crew found the rough pump breaker off during daily checks. Reset -- things are OK, thanks to them. From sanjah at snf.stanford.edu Thu Jul 5 20:40:53 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Thu, 5 Jul 2007 20:40:53 -0700 Subject: Problem amtetcher SNF 2007-07-05 20:40:53: wafer tray stuck in the loader Message-ID: From sanjah at snf.stanford.edu Thu Jul 5 21:25:48 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Thu, 5 Jul 2007 21:25:48 -0700 Subject: Comment amtetcher SNF 2007-07-05 21:25:48: problem solved Message-ID: From eenriquez at snf.stanford.edu Fri Jul 6 07:59:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:59:00 -0700 Subject: Problem amtetcher SNF 2007-07-05 20:40:53: wafer tray stuck in the loader Message-ID: User was able to un-stick the loader From eenriquez at snf.stanford.edu Fri Jul 6 07:59:10 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Jul 2007 07:59:10 -0700 Subject: Comment amtetcher SNF 2007-07-05 21:25:48: problem solved Message-ID: From cearhart at snf.stanford.edu Mon Jul 9 02:36:47 2007 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Mon, 9 Jul 2007 02:36:47 -0700 Subject: Problem amtetcher SNF 2007-07-09 02:36:47: Could not pump down to base Message-ID: The turbo pump was unable to pump the chamber down to the base pressure set point after 30 minutes. I was unable to perform any etching. I inspected the chamber for any wafer chips or debris on the o-ring, but it looked ok. Chris From eenriquez at snf.stanford.edu Mon Jul 9 08:54:22 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jul 2007 08:54:22 -0700 Subject: Problem amtetcher SNF 2007-07-09 02:36:47: Could not pump down to base Message-ID: Left chamber open for 20 minutes and ran the standby recipe with no problems. Turbo pump down took about 5.3 minutes. From bchui at snf.stanford.edu Tue Jul 10 20:12:29 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 10 Jul 2007 20:12:29 -0700 Subject: Shutdown amtetcher SNF 2007-07-10 20:12:29: "Turbo went off" error / chamber at ATM Message-ID: I had loaded my wafers and was ready to start etching, when the machine displayed a 'turbo went off' error. I had to unload my wafers and moreover I can't pump down the chamber now that the machine wouldn't let me run any recipe at all. From eenriquez at snf.stanford.edu Wed Jul 11 17:29:53 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2007 17:29:53 -0700 Subject: Shutdown amtetcher SNF 2007-07-10 20:12:29: "Turbo went off" error / chamber at ATM Message-ID: Turbo crashed and broke the turbines into pieces. Replaced the turbo. Ran standby recipe with no problems. Note: System lost all the recipes. I only restored recipe #2. Need to reprogrammed all other recipes. From latta at snf.stanford.edu Thu Jul 12 16:06:25 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 12 Jul 2007 16:06:25 -0700 Subject: Comment amtetcher SNF 2007-07-05 09:08:49: Breaker found off Message-ID: cleared From latta at snf.stanford.edu Thu Jul 12 16:08:15 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 12 Jul 2007 16:08:15 -0700 Subject: Comment amtetcher SNF 2007-07-12 16:08:14: Check programs! Message-ID: Due to the down time to fix the turbo pump all programs need to be re-entered into the tool. Check the programs before using. From barlian at snf.stanford.edu Mon Jul 16 13:40:41 2007 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Mon, 16 Jul 2007 13:40:41 -0700 Subject: Problem amtetcher SNF 2007-07-16 13:40:40: turbo error Message-ID: I loaded my wafers (3-4 minutes, definitely not more than 10 minutes), brought down the bell jar, and it gave me a turbo error, thus I couldn't run anything. From cbaxter at snf.stanford.edu Mon Jul 16 14:17:35 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jul 2007 14:17:35 -0700 Subject: Problem amtetcher SNF 2007-07-16 13:40:40: turbo error Message-ID: Elmer re-started turbo From latta at snf.stanford.edu Thu Jul 19 09:23:43 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2007 09:23:43 -0700 Subject: Problem amtetcher SNF 2007-07-19 09:23:43: User reports turbo problems Message-ID: After two attemps did not pump down.... From eenriquez at snf.stanford.edu Thu Jul 19 13:01:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Jul 2007 13:01:26 -0700 Subject: Problem amtetcher SNF 2007-07-19 09:23:43: User reports turbo problems Message-ID: Restarted the turbo and ran the standby recipe. If the turbo shuts off again we will turn the purge on. And if the turbo still faults, we will replace the controller. From mislam at snf.stanford.edu Sun Jul 22 01:33:23 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 22 Jul 2007 01:33:23 -0700 Subject: Problem amtetcher SNF 2007-07-22 01:33:23: pump down problem - can't reach base Message-ID: From eenriquez at snf.stanford.edu Mon Jul 23 08:59:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2007 08:59:51 -0700 Subject: Problem amtetcher SNF 2007-07-22 01:33:23: pump down problem - can't reach base Message-ID: No problem found. Ran standby recipe with no problems. Modified the last step of the standby recipe so that the gate valve remained open at the end of the recipe. From latta at snf.stanford.edu Wed Jul 25 10:35:33 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Jul 2007 10:35:33 -0700 Subject: Comment amtetcher SNF 2007-07-12 16:08:14: Check programs! Message-ID: Should be ok now.... From kimsora at snf.stanford.edu Thu Jul 26 02:14:23 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Thu, 26 Jul 2007 02:14:23 -0700 Subject: Problem amtetcher SNF 2007-07-26 02:14:22: IG does not go down below .50 Message-ID: Maybe it goes down if I run the recipe (process #3) for several hours... From rohank at snf.stanford.edu Thu Jul 26 12:03:01 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Thu, 26 Jul 2007 12:03:01 -0700 Subject: Comment amtetcher SNF 2007-07-26 12:03:00: AMT run today Message-ID: Everything seemed fine except the TTRNS power which was about 50W less than its usual value. I saw a slight decrease in the etch rates (as measured by nanospec) From cbaxter at snf.stanford.edu Thu Jul 26 13:33:59 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Jul 2007 13:33:59 -0700 Subject: Problem amtetcher SNF 2007-07-26 02:14:22: IG does not go down below .50 Message-ID: From king at snf.stanford.edu Fri Jul 27 02:00:44 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 27 Jul 2007 02:00:44 -0700 Subject: Shutdown amtetcher SNF 2007-07-27 02:00:44: AMT won't pump down Message-ID: Turbo cannot get the chamber below 0.90T even after multiple turbo cycles. Have wiped the seal. From cbaxter at snf.stanford.edu Fri Jul 27 09:28:38 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 27 Jul 2007 09:28:38 -0700 Subject: Shutdown amtetcher SNF 2007-07-27 02:00:44: AMT won't pump down Message-ID: Degas ion gauge and was able to pump down below .5mt w/out problem.