Problem amtetcher SNF 2007-07-09 02:36:47: Could not pump down to base

cearhart at snf.stanford.edu cearhart at snf.stanford.edu
Mon Jul 9 02:36:47 PDT 2007


The turbo pump was unable to pump the chamber down to the base pressure set point after 30 minutes.  I was unable to perform any etching.  I inspected the chamber for any wafer chips or debris on the o-ring, but it looked ok.
Chris




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