Shutdown amtetcher SNF 2007-07-10 20:12:29: "Turbo went off" error / chamber at ATM

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Jul 10 20:12:29 PDT 2007


I had loaded my wafers and was ready to start etching, when the machine displayed a 'turbo went off' error.  I had to unload my wafers and moreover I can't pump down the chamber now that the machine wouldn't let me run any recipe at all.




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