From rohank at snf.stanford.edu Wed Jun 6 16:18:23 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Wed, 6 Jun 2007 16:18:23 -0700 Subject: Problem amtetcher SNF 2007-06-06 16:18:22: strange behavior of process 5 Message-ID: I successfully ran process 1/Prog1 and copied the SAME EXACT program into process5/prog5 (because I wanted to change some parameters). However process5/program5 would not run (even though it had same exact parameters as proc1/prog1). It kept giving me "CRYO/CHMBER LEAK"error message. I rrepeated this a couple of times with the same result (prog 1 would run but prog 5 wouldnt). From eenriquez at snf.stanford.edu Thu Jun 7 08:41:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Jun 2007 08:41:18 -0700 Subject: Problem amtetcher SNF 2007-06-06 16:18:22: strange behavior of process 5 Message-ID: No problem found. The machine normally faults for "CRYO/CHMBER LEAK" whenever the CRYO pump is selected in the recipe instead of the Turbo (CRYO pump is nor ON). From vipin at snf.stanford.edu Fri Jun 15 19:07:00 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 15 Jun 2007 19:07:00 -0700 Subject: Problem amtetcher SNF 2007-06-15 19:07:00: program 2 Message-ID: Cannot copy the required process into pgm 2. M/c not vented. From eenriquez at snf.stanford.edu Mon Jun 18 08:52:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Jun 2007 08:52:46 -0700 Subject: Problem amtetcher SNF 2007-06-15 19:07:00: program 2 Message-ID: Re-entered program 2 parameters and tested. From cearhart at snf.stanford.edu Wed Jun 20 02:17:15 2007 From: cearhart at snf.stanford.edu (cearhart at snf.stanford.edu) Date: Wed, 20 Jun 2007 02:17:15 -0700 Subject: Shutdown amtetcher SNF 2007-06-20 02:17:14: amt shut down Message-ID: Hi, I could not reach base pressure. It took about 25 min to reach base pressure for my last etch, and when I ran the Process 2 (standby), I tried the turbo pump down step for 30 min, hitting run to continue when the alarm sounded, and then aborted and tried once more for 12 minutes, but still could not reach base. I aborted the program, and the machine currently reads that Process 2 Ready. Also, I did not have the bell jar open for longer than a minute or two when handling wafers. Thanks, Chris From eenriquez at snf.stanford.edu Wed Jun 20 08:56:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jun 2007 08:56:50 -0700 Subject: Shutdown amtetcher SNF 2007-06-20 02:17:14: amt shut down Message-ID: Found wafer chip on the chamber o-ring. Wiped down o-ring and base plate. Left chamber open for 5 min. Started process 2 ; reached base pressure in 4.1 min. From filip at snf.stanford.edu Fri Jun 22 02:16:15 2007 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 22 Jun 2007 02:16:15 -0700 Subject: Problem amtetcher SNF 2007-06-22 02:16:14: turbo off Message-ID: when I arrived AMT was in a 'ready to vent' state. I vented the chamber to run process 2 and season the chamber, but it wouldn't run because 'turbo turned off'. From eenriquez at snf.stanford.edu Fri Jun 22 08:16:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Jun 2007 08:16:35 -0700 Subject: Problem amtetcher SNF 2007-06-22 02:16:14: turbo off Message-ID: Turbo was off due to facilty issues. Restarted turbo and ran standby recipe.