Shutdown amtetcher SNF 2007-06-20 02:17:14: amt shut down

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 20 08:56:50 PDT 2007


Found wafer chip on the chamber o-ring.  Wiped down o-ring and base plate.  Left chamber open for 5 min.  Started process 2 ; reached base pressure in 4.1 min.




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