Problem amtetcher SNF 2007-03-02 12:51:13: Arching

fengj at snf.stanford.edu fengj at snf.stanford.edu
Fri Mar 2 12:51:14 PST 2007


Ran Si Trench recipe. The bias fluctuated between -320 V and -360. Also heard sound of arching from the chamber.




More information about the amtetcher-pcs mailing list