Problem amtetcher SNF 2007-03-02 12:51:13: Arching

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Mar 2 14:05:45 PST 2007


Vented chamber and checked all trays, no sign of arcing
Run recipe3 & 2 and bias voltage @1200watts is @-530v.




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