Problem amtetcher SNF 2007-05-08 14:11:19: The LTO oxide etch rate varies

khanh at snf.stanford.edu khanh at snf.stanford.edu
Tue May 8 14:11:19 PDT 2007


This morning I did 3 etches for 30sec. each and the etch rates were 173, 212 and 170A. Usually I got about 160-170A per 30 sec.  




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