Problem amtetcher SNF 2007-05-09 14:30:39: Pressure problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 9 19:02:36 PDT 2007


This is only a problem with the standby recipe (#2).  The RF is under setpoint control for recipe 2, all the other recipes are under bias control.  The problem with recipe 2 was that the 1st step could not make the RF setpoint and shutoff the plasma.  When the recipe went to step 2 and tried to restart the plasma, the change in pressure setpoint and the pressure burst from the plasma start, overwhelmed the pressure controller.  I changed recipe 2's RF to bias control to match all the other recipes.




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