From jsnapp at snf.stanford.edu Tue Apr 1 04:18:23 2008 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Tue, 1 Apr 2008 04:18:23 -0700 Subject: Problem amtetcher SNF 2008-04-01 04:18:22: CAN'T PUMP DOWN Message-ID: Can't pump down after more than an hour of pumping. Raised and lowered jar and tried for another hour. No change. Program 3 and Program 2 both were tried. From eenriquez at snf.stanford.edu Tue Apr 1 15:07:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Apr 2008 15:07:28 -0700 Subject: Comment amtetcher SNF 2008-04-01 15:07:28: Update Message-ID: Unable to duplicate the problem. Problem seems to occur only late night at night or early morining. Need to troubleshoot further. From ofidaner at snf.stanford.edu Wed Apr 2 00:46:27 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Wed, 2 Apr 2008 00:46:27 -0700 Subject: Problem amtetcher SNF 2008-04-02 00:46:26: did not pump, prg. 3 and 2 Message-ID: From eenriquez at snf.stanford.edu Wed Apr 2 11:37:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Apr 2008 11:37:53 -0700 Subject: Comment amtetcher SNF 2008-04-02 11:37:53: Update Message-ID: Still unable to duplicate the problem. Chamber leak rate is very good @ 2 mT/min. From latta at snf.stanford.edu Thu Apr 3 10:28:13 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Apr 2008 10:28:13 -0700 Subject: Comment amtetcher SNF 2008-02-23 02:06:11: Ran etch rate quals - looks OK Message-ID: logged From latta at snf.stanford.edu Thu Apr 3 10:28:33 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Apr 2008 10:28:33 -0700 Subject: Comment amtetcher SNF 2008-03-26 11:46:35: OK on Process 1 Message-ID: logged From latta at snf.stanford.edu Thu Apr 3 10:28:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Apr 2008 10:28:55 -0700 Subject: Problem amtetcher SNF 2008-03-31 05:08:03: does not pump down Message-ID: logged From filip at snf.stanford.edu Sat Apr 5 02:10:30 2008 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 5 Apr 2008 02:10:30 -0700 Subject: Comment amtetcher SNF 2008-04-05 02:10:29: can't reach 0.5mTorr Message-ID: pumps only down to 21 mTorr after 30mins. Process #1 and Process#2. From eenriquez at snf.stanford.edu Tue Apr 8 15:05:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Apr 2008 15:05:55 -0700 Subject: Comment amtetcher SNF 2008-04-08 15:05:54: Completed Monthly PM Message-ID: Zeroed the manometer. Marked all gauges and flow meters. From rwoo at snf.stanford.edu Tue Apr 8 21:42:13 2008 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Tue, 8 Apr 2008 21:42:13 -0700 Subject: Shutdown amtetcher SNF 2008-04-08 21:42:13: Tray 1 Arcing Message-ID: On the hexode to the right of the clip on tray one there is a burnt area and what appears to be some deposited polymer flaking off. A corresponding burnt spot on the metal at the top of tray 1. From eenriquez at snf.stanford.edu Wed Apr 9 08:34:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Apr 2008 08:34:59 -0700 Subject: Shutdown amtetcher SNF 2008-04-08 21:42:13: Tray 1 Arcing Message-ID: Cleaned very light polymer build-up on top of tray#1 and under the clip. This tool should not have been Shutdown. From rwoo at snf.stanford.edu Wed Apr 9 21:17:17 2008 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 9 Apr 2008 21:17:17 -0700 Subject: Problem amtetcher SNF 2008-04-09 21:17:17: tray 3 arcing Message-ID: Burnt polymer buildup on top of tray 3 to the right of the clip From mdickey at snf.stanford.edu Thu Apr 10 07:43:22 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 10 Apr 2008 07:43:22 -0700 Subject: Problem amtetcher SNF 2008-04-09 21:17:17: tray 3 arcing Message-ID: Cleaned up arc marks on tray. It is adjusted correctly. From eenriquez at snf.stanford.edu Fri Apr 11 07:05:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Apr 2008 07:05:25 -0700 Subject: Comment amtetcher SNF 2008-04-08 15:05:54: Completed Monthly PM Message-ID: Noted From shott at stanford.edu Fri Apr 11 07:40:47 2008 From: shott at stanford.edu (John Shott) Date: Fri, 11 Apr 2008 07:40:47 -0700 Subject: Late night observations .... Message-ID: <47FF786F.50702@stanford.edu> Elmer et al: A came back late last night to see the "middle of the night" problem and was rewarded by seeing it fail. Mohammed Islam had just used the machine, successfully, from roughly 10:45 to 11:30. I took over and tried to run recipe 3. The chamber had been open approximately 10-15 minutes. As I began by run, the Hex and Hot LP were reading 31 and the Cold Lp was reading 21. During rough pump, the Chamber TC reached 1 Torr after about 1.1 min and was at 216 mTorr by about 1.5 min. When the Turbo came on the Hex was down to 23 and the Hot LP was at 32. Following are the ion gauge readings: 1 min: 0.93 2 min: 0.85 2.5 min: 0.82 4 min: 0.76 5 min: 0.74 6 min: 0.73 somewhere here it "jumped" down by about 0.15 ... 7 min: 0.56 8 min: 0.56 10 min: 0.57 11 min: 0.58 A second run (without venting) showed no better performance and I gave it up at about 8 minutes into that run with it reading 0.57-0.58 mTorr. So, what is going on: 1. Is it humidity or temperature in the cleanroom, due to the throttling back of the air flow? I've asked Leonard for temerature and humidity traces for that portion of the lab for the last 48 hours. 2. Is the ion gauge "worn out"? I certainly can't explain why this would be time dependent. 3. Is the heat loop capacity a bit marginal? I notice that there is a slow leak on the back of the hot loop reservoir. Is the level a bit low? We should probably top it off, at the very least, and, when we have the time, address that slow leak. 4. Is the turbo marginal? This is an old "oiled" bearing turbo isn't is? Is the oil level and oil quality what it should be? I'll send out further word once I have temperature and RH data from Leonard ... Thanks, John From cmcg at snf.stanford.edu Mon Apr 14 01:02:56 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 14 Apr 2008 01:02:56 -0700 Subject: Problem amtetcher SNF 2008-04-14 01:02:56: can't pump down Message-ID: Pump down bottoms out at 0.7mTorr, trying to get down to 0.5mTorr for process 4 after running for >1hr. Process 2 is able to run fine requiring only 0.8mTorr From cmcg at snf.stanford.edu Mon Apr 14 02:00:14 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 14 Apr 2008 02:00:14 -0700 Subject: Problem amtetcher SNF 2008-04-14 02:00:13: process 2 halted Message-ID: now it can't even pump down enough to run process 2. Bottoms out at 0.99mTorr, setpoint at 0.8mtorr. Will leave pumped down at current level overnight From rhenn at snf.stanford.edu Tue Apr 15 22:15:25 2008 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Tue, 15 Apr 2008 22:15:25 -0700 Subject: Problem amtetcher SNF 2008-04-15 22:15:25: Small amount of arcing on and around the latch for hex 5 Message-ID: During pre etch inspection, I observed a small amount of burning on and around the latch for hex 5. The latch did not seem to be fully engaged by previous user. I returned the system into standby by running program 2. No arcing was observed during the etch steps in program 2. From eenriquez at snf.stanford.edu Wed Apr 16 08:16:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 08:16:49 -0700 Subject: Problem amtetcher SNF 2008-04-15 22:15:25: Small amount of arcing on and around the latch for hex 5 Message-ID: Cleaned tray #5 From rik at snf.stanford.edu Wed Apr 16 12:56:00 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 16 Apr 2008 12:56:00 -0700 Subject: Problem amtetcher SNF 2008-04-16 12:55:59: Tiny marks on a few Message-ID: Hex 2 has some marks in the latch area Hex 5 still has some marks on the top section Hex 6 has some marks near the top on the backside of the tray Hex 2's latch seems to have a slight depression after loading. Not sure if these are minor or not. Reporting to err on the side of caution. From eenriquez at snf.stanford.edu Thu Apr 17 08:47:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 08:47:35 -0700 Subject: Problem amtetcher SNF 2008-04-16 12:55:59: Tiny marks on a few Message-ID: Checked OK From king at snf.stanford.edu Mon Apr 21 17:25:53 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 21 Apr 2008 17:25:53 -0700 Subject: Problem amtetcher SNF 2008-04-21 17:25:50: Insufficient wand vacuum Message-ID: Wand doesn't pick wafers up out of the holder. Also that new hose is heavy and awkward to use. Is it possibly to go back to the original material? Using tweezers in the meantime. From eenriquez at snf.stanford.edu Tue Apr 22 08:22:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Apr 2008 08:22:06 -0700 Subject: Problem amtetcher SNF 2008-04-21 17:25:50: Insufficient wand vacuum Message-ID: Repaired vacuum hose leak and secured the line. From rik at snf.stanford.edu Wed Apr 30 00:38:46 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 30 Apr 2008 00:38:46 -0700 Subject: Comment amtetcher SNF 2008-04-30 00:38:46: Usual pumpdown problem after 11 pm Message-ID: Can't run Process 2 because system will not pump down.