Problem amtetcher SNF 2008-04-14 01:02:56: can't pump down

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Mon Apr 14 01:02:56 PDT 2008


Pump down bottoms out at 0.7mTorr, trying to get down to 0.5mTorr for process 4 after running for >1hr.  Process 2 is able to run fine requiring only 0.8mTorr




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