Problem amtetcher SNF 2008-04-15 22:15:25: Small amount of arcing on and around the latch for hex 5

rhenn at snf.stanford.edu rhenn at snf.stanford.edu
Tue Apr 15 22:15:25 PDT 2008


During pre etch inspection, I observed a small amount of burning on and around the latch for hex 5. The latch did not seem to be fully engaged by previous user. I returned the system into standby by running program 2. No arcing was observed during the etch steps in program 2. 




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