Comment amtetcher SNF 2008-08-08 11:41:36: receipt 3 is not usable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Aug 8 14:22:47 PDT 2008


System had a difficult time controlling gas 1 (O2) flow at low flow rates (8 sccm).  Reduced the incoming O2 pressure from 30 psi to 15 psi.  Ran recipe 3 and recipe 2 with no problems.




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