From gyama at snf.stanford.edu Thu Feb 7 08:09:35 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:09:35 -0800 Subject: Comment amtetcher SNF 2008-02-07 08:09:34: yesterday,taking a long long time for the clamp to Message-ID: come down on the load tray From masaharu at snf.stanford.edu Sun Feb 10 10:52:26 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 10 Feb 2008 10:52:26 -0800 Subject: Problem amtetcher SNF 2008-02-10 10:52:25: base pressure never reach setpoint Message-ID: I waited for 1-2 hours, however base pressure couldn't reach setpoint. From masaharu at snf.stanford.edu Mon Feb 11 03:57:33 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Mon, 11 Feb 2008 03:57:33 -0800 Subject: Problem amtetcher SNF 2008-02-11 03:57:33: Observation of pumping problem Message-ID: On 2/10 midnight, I reported pumping problem. Next day, I run the same sequence in the daytime, there was no problem. Again, I did the same things in midnight, and I failed again! According to the past logs, obviously, pumiping problems oftern happen after 0 am, very late night (or early morning). And sometimes, next user used AMT in the daytime and said there was no pumping problem. This is just my speculation but, is there, by chance, causality between time of use (night or daytime) and pumping problem? From eenriquez at snf.stanford.edu Mon Feb 11 08:22:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Feb 2008 08:22:16 -0800 Subject: Comment amtetcher SNF 2008-02-11 08:22:14: No problem found Message-ID: Ran standby recipe with no problems. Next time you experience another base pressure error please note the recipe that you ran. From king at snf.stanford.edu Tue Feb 12 23:04:54 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 12 Feb 2008 23:04:54 -0800 Subject: Problem amtetcher SNF 2008-02-12 23:04:54: Wafer release unit doesn't work Message-ID: This problem came up last week I believe but wasn't reported. From eenriquez at snf.stanford.edu Wed Feb 13 06:49:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Feb 2008 06:49:41 -0800 Subject: Problem amtetcher SNF 2008-02-12 23:04:54: Wafer release unit doesn't work Message-ID: From latta at snf.stanford.edu Wed Feb 13 09:26:32 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:26:32 -0800 Subject: Comment amtetcher SNF 2008-01-03 11:48:26: changed out dummies Message-ID: old comment... From latta at snf.stanford.edu Wed Feb 13 09:26:52 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:26:52 -0800 Subject: Comment amtetcher SNF 2008-01-14 16:39:52: worked ok for me Message-ID: Thanks for the feedback. From latta at snf.stanford.edu Wed Feb 13 09:27:16 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:27:16 -0800 Subject: Comment amtetcher SNF 2008-01-27 17:31:12: DC bias at -450V in prog.3, says -530 in log book Message-ID: Back to -530V. From latta at snf.stanford.edu Wed Feb 13 09:27:42 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:27:42 -0800 Subject: Comment amtetcher SNF 2008-02-07 08:09:34: yesterday,taking a long long time for the clamp to Message-ID: Yep, it's broken. From latta at snf.stanford.edu Wed Feb 13 09:28:30 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:28:30 -0800 Subject: Problem amtetcher SNF 2008-02-10 10:52:25: base pressure never reach setpoint Message-ID: Ran tool a couple of times yesterday (2/12) and it was fine. Will keep an eye on this..... From latta at snf.stanford.edu Wed Feb 13 09:31:32 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 09:31:32 -0800 Subject: Problem amtetcher SNF 2008-02-13 09:31:32: Loader not working. Message-ID: The pneumatic lifter is not working on the loader. The problem has yet to be indentified, so to use the loader please pull down on the tray clip release bit and push it back to the oringinal position when down- in other words manually use the loader. Any questions please contact staff. From gth at snf.stanford.edu Thu Feb 14 14:12:21 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 14 Feb 2008 14:12:21 -0800 Subject: Problem amtetcher SNF 2008-02-14 14:12:21: vaccum wand broken Message-ID: please replace/repair. thanks -gaurav From latta at snf.stanford.edu Thu Feb 14 14:58:29 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Feb 2008 14:58:29 -0800 Subject: Problem amtetcher SNF 2008-02-14 14:12:21: vaccum wand broken Message-ID: fixed- slider dropped out. From latta at snf.stanford.edu Thu Feb 14 15:00:00 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Feb 2008 15:00:00 -0800 Subject: Problem amtetcher SNF 2008-02-14 15:00:00: Possible safety hazard Message-ID: When using the loader in manual the lid snaps down very quickly. This may catch fingers. Use with caution! From eenriquez at snf.stanford.edu Fri Feb 15 10:34:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 10:34:53 -0800 Subject: Comment amtetcher SNF 2008-02-15 10:34:52: Loader update Message-ID: Defective pneumatic valve. Need to order part. From shwong at snf.stanford.edu Fri Feb 15 11:36:49 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Fri, 15 Feb 2008 11:36:49 -0800 Subject: Problem amtetcher SNF 2008-02-15 11:36:48: pressure out of limit error Message-ID: From riteshj at snf.stanford.edu Sat Feb 16 15:02:14 2008 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 16 Feb 2008 15:02:14 -0800 Subject: Shutdown amtetcher SNF 2008-02-16 15:02:14: 2 of the six panels have burnt and melted at the top Message-ID: When i came to use AMT, the machine had stopped running process 2 saying DC values were out of range. So i opened the bell jar and looked at the panels and panel 4 & 5 (of the 6 panels) had burnt and melted at the top and fused with the top with the hexode (most likely due to arcing). Have shut down the machine. From shwong at snf.stanford.edu Sat Feb 16 15:34:50 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Sat, 16 Feb 2008 15:34:50 -0800 Subject: Problem amtetcher SNF 2008-02-16 15:34:47: more observations Message-ID: I was in lab today and riteshj talked to me today about the amtetcher problem. We wanted to provide more details to help debug the problem. I hadn't observed that panels 4 and 5 may have been loose because i only loaded a test etch wafer in panel one. When i came to the machine, it was in process 2, with some pressure error. I tried to run process 3, but it wouldn't pump down. Then I tried running it again, and it this point, I went to measure a wafer, when I came back, the saw chamber was dark (don't know if there was an alarm; someone may have silenced it), and I unloaded my wafer and saw it hadn't etched. I hadn't noticed any arcing at that point, but i didn't turn the hexode to slots 4 or 5, so i can't say for sure. I was confused, so then I tried to run the machine in process 2 again, but it kept on giving a pressure out of limit error, so I left the machine (yellow lighted it and left it in process 2). Riteshj was trying to run process 3 today and noticed that the DC bias was wrong, so he shut of the machine and asked me if I was able to run the process yesterday, and I told I wasn't able to do successfully. We then turned the hexode and noticed that there had been arcing of some sort and the fusing panels. Anyways, i wanted to provide these details to help in debugging the machine; I'm sorry I wasn't more observant -- I just thought it was the pumping problem again!! From masaharu at snf.stanford.edu Sat Feb 16 22:56:02 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 16 Feb 2008 22:56:02 -0800 Subject: Problem amtetcher SNF 2008-02-16 22:56:02: Message-ID: From masaharu at snf.stanford.edu Sat Feb 16 23:04:44 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 16 Feb 2008 23:04:44 -0800 Subject: Problem amtetcher SNF 2008-02-16 23:04:43: The problem might happen in my run Message-ID: According to riteshj's comment, the problem might happen in my run. Actually, I saw the pressure out of limit problem several times. I tried seasoning by running program #1 but I couldn't finish it because of pressure limit problem and I finally gave up. I should have checked the inside then, but I didn't. If my run caused the problem, I am really sorry that it hurt the system. From mdickey at snf.stanford.edu Tue Feb 19 13:59:40 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 19 Feb 2008 13:59:40 -0800 Subject: Comment amtetcher SNF 2008-02-19 13:59:40: Burnt trays Message-ID: Cleaned and replaced burnt ardel and trays. Currently one ardel piece for the hexode cap. Will update on delivery when an answer is known. From eenriquez at snf.stanford.edu Tue Feb 19 14:27:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Feb 2008 14:27:32 -0800 Subject: Comment amtetcher SNF 2008-02-19 14:27:31: Update Message-ID: The cause of the arching was an un-latched tray (tray 4). In the future, please verify that all trays are fully latched before running the a process. From eenriquez at snf.stanford.edu Wed Feb 20 18:56:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Feb 2008 18:56:26 -0800 Subject: Comment amtetcher SNF 2008-02-20 18:56:25: Update missing part Message-ID: Ship date for the ardel part is 2/22. Part should be here by Monday. From mdickey at snf.stanford.edu Fri Feb 22 11:37:11 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 22 Feb 2008 11:37:11 -0800 Subject: Shutdown amtetcher SNF 2008-02-16 15:02:14: 2 of the six panels have burnt and melted at the top Message-ID: Replaced burnt ardels. Ran recipe 2 and plasma and RF appear stable. Use at your own discretion. From king at snf.stanford.edu Fri Feb 22 12:54:53 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 22 Feb 2008 12:54:53 -0800 Subject: Comment amtetcher SNF 2008-02-22 12:54:52: Unclear on status Message-ID: Is the AMT operational or not? It's yellow-lighted but the comments imply you're waiting on parts. How are wafers affected by missing parts, and have any tests been done? Thanks. From latta at snf.stanford.edu Fri Feb 22 14:03:23 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Feb 2008 14:03:23 -0800 Subject: Problem amtetcher SNF 2008-02-16 22:56:02: Message-ID: From latta at snf.stanford.edu Fri Feb 22 14:07:32 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Feb 2008 14:07:32 -0800 Subject: Comment amtetcher SNF 2008-02-22 14:07:31: Machine tested, process not qualified. Message-ID: The parts have been replaced, the standby program (#2) has been run and observed, but no etch tests have been run. If you need to use it please do it with caution. From latta at snf.stanford.edu Fri Feb 22 14:11:39 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Feb 2008 14:11:39 -0800 Subject: Comment amtetcher SNF 2008-02-20 18:56:25: Update missing part Message-ID: Fixed, no etch rate test performed. From latta at snf.stanford.edu Fri Feb 22 14:13:01 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Feb 2008 14:13:01 -0800 Subject: Problem amtetcher SNF 2008-02-22 14:13:01: Parts replaced, no etch rate tests done Message-ID: The parts have been replaced, the standby program (#2) has been run and observed, but no etch tests have been run. If you need to use it please do it with caution. From latta at snf.stanford.edu Fri Feb 22 14:13:50 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 22 Feb 2008 14:13:50 -0800 Subject: Comment amtetcher SNF 2008-02-22 12:54:52: Unclear on status Message-ID: Status posted in comments and problem From king at snf.stanford.edu Sat Feb 23 02:06:11 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 23 Feb 2008 02:06:11 -0800 Subject: Comment amtetcher SNF 2008-02-23 02:06:11: Ran etch rate quals - looks OK Message-ID: I etched thermal oxide and undensified LTO400 for 1 min and got etch rates of 328A/min and 359A/min respectively. Entered in lelandstanfordjunior.com/eData.html Compares to previous data given short etch time. From eenriquez at snf.stanford.edu Tue Feb 26 06:39:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Feb 2008 06:39:13 -0800 Subject: Comment amtetcher SNF 2008-02-19 14:27:31: Update Message-ID: Noted From eenriquez at snf.stanford.edu Tue Feb 26 06:39:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Feb 2008 06:39:41 -0800 Subject: Comment amtetcher SNF 2008-02-19 13:59:40: Burnt trays Message-ID: Part has been installed From cmcg at snf.stanford.edu Tue Feb 26 11:10:05 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:10:05 -0800 Subject: Comment amtetcher SNF 2008-02-26 11:10:04: vaccuum wand and wafer loading dock issues Message-ID: The vaccuum wand should be replaced, or the vaccuum strength should be increased. Until this happens be very gentle with the wand, as it can drop a wafer very easily! Something is up with the loading dock. You have to play around with the pressure valves to get it to open or close. From latta at snf.stanford.edu Tue Feb 26 11:17:49 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:17:49 -0800 Subject: Problem amtetcher SNF 2008-02-22 14:13:01: Parts replaced, no etch rate tests done Message-ID: Robin ran test on th ox and they were fine. From latta at snf.stanford.edu Tue Feb 26 11:20:37 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:20:37 -0800 Subject: Problem amtetcher SNF 2008-02-15 11:36:48: pressure out of limit error Message-ID: logged From latta at snf.stanford.edu Tue Feb 26 11:20:57 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:20:57 -0800 Subject: Problem amtetcher SNF 2008-02-16 15:34:47: more observations Message-ID: Parts replaced. From latta at snf.stanford.edu Tue Feb 26 11:21:26 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:21:26 -0800 Subject: Problem amtetcher SNF 2008-02-16 23:04:43: The problem might happen in my run Message-ID: parts replaced From latta at snf.stanford.edu Tue Feb 26 11:21:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:21:55 -0800 Subject: Comment amtetcher SNF 2008-02-22 14:07:31: Machine tested, process not qualified. Message-ID: See Robin's etch test results. From latta at snf.stanford.edu Tue Feb 26 11:22:54 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:22:54 -0800 Subject: Problem amtetcher SNF 2008-02-11 03:57:33: Observation of pumping problem Message-ID: Interesting observation. Pumping problems have decreased, but we'll keep an eye on the time of day if they return. From latta at snf.stanford.edu Tue Feb 26 11:23:07 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:23:07 -0800 Subject: Comment amtetcher SNF 2008-02-11 08:22:14: No problem found Message-ID: logged From eenriquez at snf.stanford.edu Wed Feb 27 19:21:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Feb 2008 19:21:12 -0800 Subject: Comment amtetcher SNF 2008-02-27 19:21:12: Update Loader Message-ID: Installed new pneumatic valves. Now loader lifts opens OK but still does not close. Need to order one more valve.