Comment amtetcher SNF 2008-02-23 02:06:11: Ran etch rate quals - looks OK

king at snf.stanford.edu king at snf.stanford.edu
Sat Feb 23 02:06:11 PST 2008


I etched thermal oxide and undensified LTO400 for 1 min and got etch rates of 328A/min and 359A/min respectively.   Entered in lelandstanfordjunior.com/eData.html   Compares to previous data given short etch time.




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