Comment amtetcher SNF 2008-02-23 02:06:11: Ran etch rate quals - looks OK

king at snf.stanford.edu king at snf.stanford.edu
Sat Feb 23 02:06:11 PST 2008

Previous message: Problem amtetcher SNF 2008-02-22 14:13:01: Parts replaced, no etch rate tests done
Next message: Comment amtetcher SNF 2008-02-26 11:10:04: vaccuum wand and wafer loading dock issues
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I etched thermal oxide and undensified LTO400 for 1 min and got etch rates of 328A/min and 359A/min respectively.   Entered in lelandstanfordjunior.com/eData.html   Compares to previous data given short etch time.

Previous message: Problem amtetcher SNF 2008-02-22 14:13:01: Parts replaced, no etch rate tests done
Next message: Comment amtetcher SNF 2008-02-26 11:10:04: vaccuum wand and wafer loading dock issues
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the amtetcher-pcs mailing list