From eenriquez at snf.stanford.edu Thu Jan 3 10:37:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:37:33 -0800 Subject: Shutdown amtetcher SNF 2008-01-03 10:37:32: Vent timeout error. Message-ID: From latta at snf.stanford.edu Thu Jan 3 11:47:56 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Jan 2008 11:47:56 -0800 Subject: Problem amtetcher SNF 2008-01-03 11:47:55: hex did not move error Message-ID: at each tray. From latta at snf.stanford.edu Thu Jan 3 11:48:27 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Jan 2008 11:48:27 -0800 Subject: Comment amtetcher SNF 2008-01-03 11:48:26: changed out dummies Message-ID: and ran prog 2 with out incident.... From eenriquez at snf.stanford.edu Thu Jan 3 14:09:01 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:09:01 -0800 Subject: Shutdown amtetcher SNF 2008-01-03 10:37:32: Vent timeout error. Message-ID: Reset system constants. From yuhykr at snf.stanford.edu Mon Jan 7 22:21:20 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Mon, 7 Jan 2008 22:21:20 -0800 Subject: Shutdown amtetcher SNF 2008-01-07 22:21:19: found some wrong initial condition. Message-ID: Flow Sensor No HTR AC sensed fix or push run message shows up From eenriquez at snf.stanford.edu Tue Jan 8 13:10:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jan 2008 13:10:32 -0800 Subject: Shutdown amtetcher SNF 2008-01-07 22:21:19: found some wrong initial condition. Message-ID: Vacuum pump was out of oil. Refilled pump and restarted the system Ran standby recipe with no problems. From yuhykr at snf.stanford.edu Tue Jan 8 23:50:15 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Tue, 8 Jan 2008 23:50:15 -0800 Subject: Shutdown amtetcher SNF 2008-01-08 23:50:14: turbo pump error doesn't disappear Message-ID: Can't pmp to base error message This error always came out. Whenever this error shows up, I pushed RUN button. However same error always showed up. From eenriquez at snf.stanford.edu Wed Jan 9 11:46:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jan 2008 11:46:58 -0800 Subject: Shutdown amtetcher SNF 2008-01-08 23:50:14: turbo pump error doesn't disappear Message-ID: The heat exchanger heater breaker turned off because it was out of water. Refilled the heat exchanger. Now the Hot Loop temp can go up to 35C. From eenriquez at snf.stanford.edu Fri Jan 11 11:12:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:12:34 -0800 Subject: Problem amtetcher SNF 2008-01-03 11:47:55: hex did not move error Message-ID: Equipment had been idle too long. If error occurs, clear the error and resume. From rostam at snf.stanford.edu Fri Jan 11 21:14:11 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 11 Jan 2008 21:14:11 -0800 Subject: Problem amtetcher SNF 2008-01-11 21:14:11: base pressure doesn't go lower than 0.69 Message-ID: From ofidaner at snf.stanford.edu Mon Jan 14 16:39:53 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Mon, 14 Jan 2008 16:39:53 -0800 Subject: Comment amtetcher SNF 2008-01-14 16:39:52: worked ok for me Message-ID: The base pressure was ok in my run From mtang at snf.stanford.edu Thu Jan 17 09:11:42 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 17 Jan 2008 09:11:42 -0800 Subject: Problem amtetcher SNF 2008-01-11 21:14:11: base pressure doesn't go lower than 0.69 Message-ID: Next user reported no problem. From jackson at snf.stanford.edu Thu Jan 24 19:55:39 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 24 Jan 2008 19:55:39 -0800 Subject: Comment amtetcher SNF 2008-01-24 19:55:38: tray six, top wafer clip is missing Message-ID: this did not seem to cause a problem but was noted when I enabled the etcher. From jackson at snf.stanford.edu Thu Jan 24 19:56:50 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 24 Jan 2008 19:56:50 -0800 Subject: Problem amtetcher SNF 2008-01-24 19:56:50: tray #6, top wafer...one clip is missing Message-ID: this did not appear to cause a problem during my etch but was noticed when I enabled. From joongsun at snf.stanford.edu Fri Jan 25 00:43:07 2008 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Fri, 25 Jan 2008 00:43:07 -0800 Subject: Problem amtetcher SNF 2008-01-25 00:43:01: cannot pump down Message-ID: Can't pumpdown to base even with many tries From joongsun at snf.stanford.edu Fri Jan 25 00:43:58 2008 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Fri, 25 Jan 2008 00:43:58 -0800 Subject: Problem amtetcher SNF 2008-01-25 00:43:57: cannot pumpdown Message-ID: Cannot pumpdown to base even with many tries From eenriquez at snf.stanford.edu Fri Jan 25 12:10:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jan 2008 12:10:02 -0800 Subject: Comment amtetcher SNF 2008-01-24 19:55:38: tray six, top wafer clip is missing Message-ID: Replaced wafer clips. From eenriquez at snf.stanford.edu Fri Jan 25 12:10:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jan 2008 12:10:24 -0800 Subject: Problem amtetcher SNF 2008-01-24 19:56:50: tray #6, top wafer...one clip is missing Message-ID: Replaced wafer clips. From eenriquez at snf.stanford.edu Fri Jan 25 12:31:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jan 2008 12:31:11 -0800 Subject: Problem amtetcher SNF 2008-01-25 00:43:57: cannot pumpdown Message-ID: Had no problem pumping down. Was able to pump down in less than 5 min even after leaving the chamber vented for 20 min. Corrected the Standby recipe. It had been modified to skip the conditioning step. From eenriquez at snf.stanford.edu Fri Jan 25 12:31:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jan 2008 12:31:35 -0800 Subject: Problem amtetcher SNF 2008-01-25 00:43:01: cannot pump down Message-ID: Had no problem pumping down. Was able to pump down in less than 5 min even after leaving the chamber vented for 20 min. Corrected the Standby recipe. It had been modified to skip the conditioning step. From cmcg at snf.stanford.edu Sun Jan 27 17:31:12 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 27 Jan 2008 17:31:12 -0800 Subject: Comment amtetcher SNF 2008-01-27 17:31:12: DC bias at -450V in prog.3, says -530 in log book Message-ID: From tura at snf.stanford.edu Thu Jan 31 01:14:39 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 31 Jan 2008 01:14:39 -0800 Subject: Problem amtetcher SNF 2008-01-31 01:14:39: Could not pump to base Message-ID: Waited for ~30min, couldn't pump to base. From eenriquez at snf.stanford.edu Thu Jan 31 10:16:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 31 Jan 2008 10:16:36 -0800 Subject: Problem amtetcher SNF 2008-01-31 01:14:39: Could not pump to base Message-ID: Changed the basepress setpoint standby recipe. 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