From shenzhen776685 at 126.com Tue Jul 1 23:12:35 2008 From: shenzhen776685 at 126.com (=?GB2312?B?tPrA7b34s/a/2rGoudg=?=) Date: Wed, 2 Jul 2008 14:12:35 +0800 Subject: =?GB2312?B?tPrA7b34s/a/2rGoudg=?= Message-ID: An HTML attachment was scrubbed... URL: From ykuo at snf.stanford.edu Tue Jul 1 10:03:01 2008 From: ykuo at snf.stanford.edu (ykuo at snf.stanford.edu) Date: Tue, 1 Jul 2008 10:03:01 -0700 Subject: Comment amtetcher SNF 2008-07-01 10:03:00: Gas 5 fault and turbo pump fail Message-ID: Previous user left its coral login ON. Gas 5 error shows on the display. Turbo pump failed twice on me after 6min. The 3rd time is the charm. I'm currenly running process 3 without problem so far. From latta at snf.stanford.edu Tue Jul 1 11:12:56 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Jul 2008 11:12:56 -0700 Subject: Problem amtetcher SNF 2008-07-01 11:12:55: Turbo pumpdn long- ig? Message-ID: The previous reporter is correct- third time is a charm. It has taken 20 mins for the ion gauge to get to 0.5mt at about .01mt/2mins. The chamber pressure got to the required .5mt in about 3 mins. Something going on with the ig? From fc16803 at 126.com Wed Jul 2 16:53:46 2008 From: fc16803 at 126.com (=?GB2312?B?wfXJ+g==?=) Date: Thu, 3 Jul 2008 07:53:46 +0800 Subject: =?GB2312?B?us/X98/uxL+y3bjlyuk=?= Message-ID: <20080702235346.79F2779EDDB@WWW-85105CA5DD9.com> ?????/??? ??! ??????????.??????? ????????????????????? ??????????????(??)??????? ??????(7%)???????????????? ?????(1%-2%)????????????? ??????????????????? ??????????????????www.szgs.gov.cn; ???www.szds.gov.cn??????????????????? ?????????????! ???????????????: ????? ? ? :13537777176 ? ? ??? ? ? Q Q ?578702969 E--mail ?szv7777 at 126.com From gth at snf.stanford.edu Fri Jul 4 17:57:07 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 4 Jul 2008 17:57:07 -0700 Subject: Problem amtetcher SNF 2008-07-04 17:57:07: long pumpdown time Message-ID: consistent problem 2-3 pump downs required to start process. please fix this ! cheers From xukmmthnwdnudwi at zj165.com Sat Jul 5 17:22:27 2008 From: xukmmthnwdnudwi at zj165.com (xukmmthn) Date: Sun, 6 Jul 2008 08:22:27 +0800 Subject: =?GB2312?B?yta7+rPk1rW/qDa31seuL7fW1tPV0MnM?= Message-ID: An HTML attachment was scrubbed... URL: From tretdtdgg at tom.com Mon Jul 7 01:01:37 2008 From: tretdtdgg at tom.com (tretdtdgg at tom.com) Date: Mon, 7 Jul 2008 16:01:37 +0800 Subject: =?GB2312?B?warPtcjLo7rVxdHeuuw=?= Message-ID: ???????????????????????????????????????? ???????????????????????--??????? 1??????????????????????????---??? 2????????????,?????????????!?? ??????? ???134-8081-0376 Q Q:383751141 ??? http://haiyuan888.3653h.com/ From sklsd at 123.com Mon Jul 7 10:54:02 2008 From: sklsd at 123.com (=?GB2312?B?wfW+rcDt?=) Date: Tue, 8 Jul 2008 01:54:02 +0800 Subject: =?GB2312?B?us/X98/uxL+y3bjlyuk=?= Message-ID: An HTML attachment was scrubbed... URL: From eenriquez at snf.stanford.edu Mon Jul 7 12:45:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Jul 2008 12:45:21 -0700 Subject: Shutdown amtetcher SNF 2008-07-07 12:45:21: Rebuilding ion gauge valve Message-ID: From eenriquez at snf.stanford.edu Mon Jul 7 14:58:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Jul 2008 14:58:30 -0700 Subject: Comment amtetcher SNF 2008-07-07 14:58:30: Update Message-ID: Possible ion gauge isolation leak/ contamination. Trying to isolate the leak. From niemkidfbuud at hi2000.com Mon Jul 7 17:29:32 2008 From: niemkidfbuud at hi2000.com (niemkid) Date: Tue, 8 Jul 2008 08:29:32 +0800 Subject: =?GB2312?B?NrfWx64vt9bW07n6xNogs6y1zdfKt9HK1rv6s+TWtb+o?= Message-ID: An HTML attachment was scrubbed... URL: From uyiyioojh at 126.com Tue Jul 8 11:09:39 2008 From: uyiyioojh at 126.com (uyiyioojh at 126.com) Date: Wed, 9 Jul 2008 02:09:39 +0800 Subject: =?GB2312?B?warPtcjLo7rVxdHeuuw=?= Message-ID: ???????????????????????????????????????? ???????????????????????--??????? 1??????????????????????????---??? 2????????????,?????????????!?? ??????? ???134-8081-0376 Q Q:383751141 ??? http://haiyuan888.3653h.com/ From eenriquez at snf.stanford.edu Tue Jul 8 15:08:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 15:08:08 -0700 Subject: Shutdown amtetcher SNF 2008-07-07 12:45:21: Rebuilding ion gauge valve Message-ID: Rebuilt ion gauge isolation valve. Decontaminated the valve's bellows assembly. Ran recipe 3 and recipe 2. Gauge seems to be responding better but will perform additional test tomorrow. From eenriquez at snf.stanford.edu Tue Jul 8 15:08:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 15:08:18 -0700 Subject: Comment amtetcher SNF 2008-07-07 14:58:30: Update Message-ID: Rebuilt ion gauge isolation valve. Decontaminated the valve's bellows assembly. Ran recipe 3 and recipe 2. Gauge seems to be responding better but will perform additional test tomorrow. From eenriquez at snf.stanford.edu Tue Jul 8 15:20:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 15:20:03 -0700 Subject: Comment amtetcher SNF 2008-07-08 15:20:03: Update Message-ID: Ion gauge is responding better but will perform additional testing tomorrow to verify. From latta at snf.stanford.edu Tue Jul 8 16:03:04 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 Jul 2008 16:03:04 -0700 Subject: Shutdown amtetcher SNF 2008-07-08 16:03:02: Hex not homing... Message-ID: .which means I cannot lower the belljar. It is presently locked up on the sixth position. From shott at snf.stanford.edu Tue Jul 8 16:35:27 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 8 Jul 2008 16:35:27 -0700 Subject: Shutdown amtetcher SNF 2008-07-08 16:03:02: Hex not homing... Message-ID: It appears as if the connector to (I'm guessing here ....) the rotation readout position board .... had come loose. Reattaching it seems to have allowed the hex to figure out where it is. I've tested it with several jog and home cycles and it seems to be happy once again. John From dskahk at 126.com Tue Jul 8 17:57:00 2008 From: dskahk at 126.com (dskahk at 126.com) Date: Wed, 9 Jul 2008 08:57:00 +0800 Subject: =?GB2312?B?us/X98/uxL+y3bjlyuk=?= Message-ID: An HTML attachment was scrubbed... URL: From king at snf.stanford.edu Tue Jul 8 21:05:58 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 8 Jul 2008 21:05:58 -0700 Subject: Comment amtetcher SNF 2008-07-08 21:05:58: Pgm 3 oxide etch base is set to 0.80mT Message-ID: because previous user reported pump times in excess of 7 minutes to reach 0.55mT. Tox etch rate was 362A/min. From latta at snf.stanford.edu Wed Jul 9 09:42:41 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 9 Jul 2008 09:42:41 -0700 Subject: Comment amtetcher SNF 2008-07-09 09:42:41: Etchrates for Ox- 1 July Message-ID: I ran etchrates for program 3# on 1 July. Wafers in position #2 in all six tray for 5 mins. Average of all wafers = Ox 357A/ min, PR 138A/min, Ox:PR=2.6:1 If you'd like the full data please email me. From ofidaner at snf.stanford.edu Thu Jul 10 00:41:32 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Thu, 10 Jul 2008 00:41:32 -0700 Subject: Problem amtetcher SNF 2008-07-10 00:41:31: long pumpdown Message-ID: From mdickey at snf.stanford.edu Thu Jul 10 08:30:52 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 10 Jul 2008 08:30:52 -0700 Subject: Shutdown amtetcher SNF 2008-07-10 08:30:44: Water Message-ID: Down while process cooling water is being worked on From dsgghZsdhg at Df555wwcom Thu Jul 10 18:00:49 2008 From: dsgghZsdhg at Df555wwcom (=?GB2312?B?zOG438bz0rXTr8D7xNzBpg==?=) Date: Fri, 11 Jul 2008 09:00:49 +0800 Subject: =?GB2312?B?wvNetbFewM1ewaxey/hew8Vetepe1Mte06pew9hevvcwOTowMDo0OA==?= Message-ID: ??^??^??^??^??^??^??^??^??^??^??^??^??^??^??^??^??^?? ??^??^??^????3800??/?? ???????????????????????? ??^??^??^????2008??7??16-17?? ???????????????? ??^??^??^??: 0 7 5 5-6 1 2 8 1 1 0 6 ?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T ??^??^??^???? ????????????????????????????????????????????????????????????????????????????500???? ???????????????????????????????????????????????????? ???????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????????????????? ?????????? ??^??^??^???? ???????????????????????????????????????????????????????????????? ??^??^??^???? ???????????????????????? 1. ???????????? 2. ?????????????????????????????? ? ???????????????????? ? ???????????????? 3. ???????????????? ? ?????????????????????????? ? ?????????????????? ? ?????????????? 4. ???????????????????????????? ? ?????????????????????? ? ???????????? ? ???????????????? ? ?????????????? ? ?????????????????? ???????????????????????????? 1. ???????? ? ?????????????????? 2. ???????? ? ?????????????????? ? ???????????????????????????????? 3. ?????????? ? ???????????? ? ?????????????????? 4. ?????????????? ? ?????????????????????????????? ? ?????????? ? ?????????????? ???????????????????? 1. ???????? ? ?????????????????????????????? ? ?????????????? 2. ???????????? ? ???????????????? ? ???????????????? 3. ?????????????????? ? ???????????? ? ???????????? ? ???????????? ???????????????????????? 1. ???????????????????? ? ?????????????? ? ???????????? ? ???????????? 2. ?????????????? ? ?????????????? ? ???????????????????????? ? ????????/???????????????? ??^??^??^???? ???????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????????? ????????7???????????????????????????????????????????????? ??^??^??^?? ?????????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????? ?????????????????????????? -------------------------------------------------------------------------------- (??????????????????,???? ??????????:66cc_88cc at 163.com ????????,????!)09:00:48 From mdickey at snf.stanford.edu Fri Jul 11 09:00:17 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jul 2008 09:00:17 -0700 Subject: Comment amtetcher SNF 2008-07-11 09:00:16: Pumpdown problem Message-ID: After replacing the ION gauge system has a problem pumping down to base. Needs further troubleshooting. From mdickey at snf.stanford.edu Fri Jul 11 11:27:12 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jul 2008 11:27:12 -0700 Subject: Comment amtetcher SNF 2008-07-11 11:27:12: Pumping problem Message-ID: Check the oil level in the turbo pump....good Leak rate improved from 18 m.t. to 14.6 Still troubleshooting From dggsgeFDes at wfsw.cVom Fri Jul 11 11:50:42 2008 From: dggsgeFDes at wfsw.cVom (=?GB2312?B?s8m5ptPQ0Ke1xNTL06rPtc2zysfR09D4s8m5pg==?=) Date: Sat, 12 Jul 2008 02:50:42 +0800 Subject: =?GB2312?B?wvNetbFewM1ewaxey/hew8Vetepe1Mte06pew9hevvcwMjo1MDo0Mg==?= Message-ID: ??^??^??^??^??^??^??^??^??^??^??^??^??^??^??^??^??^?? ??^??^??^????3800??/?? ???????????????????????? ??^??^??^????2008??7??16-17?? ???????????????? ??^??^??^??: 0 7 5 5-6 1 2 8 1 1 0 6 ?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T?T ??^??^??^???? ????????????????????????????????????????????????????????????????????????????500???? ???????????????????????????????????????????????????? ???????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????????????????? ?????????? ??^??^??^???? ???????????????????????????????????????????????????????????????? ??^??^??^???? ???????????????????????? 1. ???????????? 2. ?????????????????????????????? ? ???????????????????? ? ???????????????? 3. ???????????????? ? ?????????????????????????? ? ?????????????????? ? ?????????????? 4. ???????????????????????????? ? ?????????????????????? ? ???????????? ? ???????????????? ? ?????????????? ? ?????????????????? ???????????????????????????? 1. ???????? ? ?????????????????? 2. ???????? ? ?????????????????? ? ???????????????????????????????? 3. ?????????? ? ???????????? ? ?????????????????? 4. ?????????????? ? ?????????????????????????????? ? ?????????? ? ?????????????? ???????????????????? 1. ???????? ? ?????????????????????????????? ? ?????????????? 2. ???????????? ? ???????????????? ? ???????????????? 3. ?????????????????? ? ???????????? ? ???????????? ? ???????????? ???????????????????????? 1. ???????????????????? ? ?????????????? ? ???????????? ? ???????????? 2. ?????????????? ? ?????????????? ? ???????????????????????? ? ????????/???????????????? ??^??^??^???? ???????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????????? ????????7???????????????????????????????????????????????? ??^??^??^?? ?????????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????????? ?????????????????????????? -------------------------------------------------------------------------------- (??????????????????,???? ??????????:66cc_88cc at 163.com ????????,????!)02:50:42 From ltsiuecoxgw at sohu.com Sat Jul 12 08:06:53 2008 From: ltsiuecoxgw at sohu.com (ltsiue) Date: Sat, 12 Jul 2008 23:06:53 +0800 Subject: =?GB2312?B?yta7+rPk1rW/qDa31seuL7fW1tPV0MnM?= Message-ID: An HTML attachment was scrubbed... URL: From shott at snf.stanford.edu Sat Jul 12 15:09:13 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 12 Jul 2008 15:09:13 -0700 Subject: Shutdown amtetcher SNF 2008-07-10 08:30:44: Water Message-ID: I think that this shutdown did not get cleared ... to my knowldege, this was related to the chilled water pump replacement. John From fc16803 at 126.com Mon Jul 14 07:06:31 2008 From: fc16803 at 126.com (=?GB2312?B?wfW+rcDt?=) Date: Mon, 14 Jul 2008 22:06:31 +0800 Subject: =?GB2312?B?us/X98/uxL+y3bjlyuk=?= Message-ID: An HTML attachment was scrubbed... URL: From mdickey at snf.stanford.edu Mon Jul 14 07:10:20 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 14 Jul 2008 07:10:20 -0700 Subject: Shutdown amtetcher SNF 2008-07-14 07:10:18: Shutdown Message-ID: Tool should be on shutdown for troubleshooting From mdickey at snf.stanford.edu Mon Jul 14 07:35:37 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 14 Jul 2008 07:35:37 -0700 Subject: Shutdown amtetcher SNF 2008-07-14 07:10:18: Shutdown Message-ID: Appears to be working after running recipe 2 but still has an error for gas 5 won't close From eenriquez at snf.stanford.edu Mon Jul 14 11:11:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:11:22 -0700 Subject: Comment amtetcher SNF 2008-07-11 11:27:12: Pumping problem Message-ID: Pumped down the un-used cryo pump on the system to about 0.7 mT. Ran recipe 3 with the base pressure set at 0.5mT. The system started process after a turbo pump time of 6 minutes. I ran the recipe again with the base press at 0.55 mT, the turbo pump time was 3.9 minutes. From eenriquez at snf.stanford.edu Mon Jul 14 11:13:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:13:12 -0700 Subject: Comment amtetcher SNF 2008-07-11 09:00:16: Pumpdown problem Message-ID: Pumped down the un-used cryo pump on the system to about 0.7 mT. Ran recipe 3 with the base pressure set at 0.5mT. The system started process after a turbo pump time of 6 minutes. I ran the recipe again with the base press at 0.55 mT, the turbo pump time was 3.9 minutes. Also re-zeroed MFC 5. From eenriquez at snf.stanford.edu Mon Jul 14 11:14:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:14:14 -0700 Subject: Comment amtetcher SNF 2008-06-04 15:02:35: Update Gas 5 problem Message-ID: Noted From eenriquez at snf.stanford.edu Mon Jul 14 11:14:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:14:56 -0700 Subject: Comment amtetcher SNF 2008-07-08 15:20:03: Update Message-ID: Noted From dhhFd at FfssdssD55wwcom Mon Jul 14 12:59:11 2008 From: dhhFd at FfssdssD55wwcom (=?GB2312?B?sO/W+sbz0rXM4cn9ssm5urXEy67GvSE=?=) Date: Tue, 15 Jul 2008 03:59:11 +0800 Subject: =?GB2312?B?uanTpsG0ssm5utCtzazT61ZNSTAzOjU5OjA5?= Message-ID: ?????????????????????????????????????????? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ?????????????????????????????????????????? 2.0.0.8.?0 7?1 9-2 0? ? ? 2.0.0.8.?0.7?2.6?-2.7? ? ? ?????????????????????????????????????????? ? ?: 2.5.0.0?/?????????????????? ?^?^?^???????????????????????????????????????????? ??????????????????????????????????????????????? ???????????????????????????????????????????????? ??????????????????????????? ?^?^?^?????????????????????????????????? ?^?^?^?:0 7 5 5-6 1 2 8 1 1 0 6 0 2 1-5 1 0 3 5 8 5 6 ?????????????????????????????????????????? ? ? ? ? ????????????????????????????????????????? ???????????????60%?80%???????????????????????? ?????????????????????????????????HP?????????? ????HP ?????????????????????????????????????? ??????????????????? ?????????????????????????????????????????? ? ? ? ? ? ????? ?????????????????????? ??IBM???????2000? ??HP-?????????????(ERP)??????(SCM)???????????????? ????????????????????????????????????????????? ???????? ? 1996??2000?????????????IBM????????????(ERP)?????? (SCM)????????????????????????????????????????? ????????????????????2000?????????????????????? ???????????? ERP?????????????????????????????? ??????????????????????????CPC????????????????? ???????????????????????????2001?????????????????? ? ????????????????????????????????????????? ??????????????????????????????????????????? ??????????????????????????????????????????? ????????????????????????????????????????? ?????????????????????????????????????????? ? ? ? ? ???? ????????????????? ??? ??????????? 1. ???????????? 2. ?????????????? 3. ??????????????? 4. ???????????? 5. ?????????????? 6. ??????????? 7. ??????????? ??? ??????????????????? 1. ??????????? 2. ?????????????? 3. ??????????? 4. ??????????????? 5. ???????? 6. ?????ABC???? 7. ?????????????? i. ???/?????????? ii. ???/?????????? iii. ???/?????????? iv. ???/?????????? 8. ?????????????? 9. ??????????????? ??? ???????????? 1. ??????Sourcing???????Ordering????? 2. ????????AVL??? 3. ?????????? 4. ?????????? 5. ???????? 6. ????????? 7. ???????????? 8. ?????? 9. ????????? ??? ??????????? 1. ?????????????????????? 2. ????????????? 3. ?????????????? i. ???????????????????? ii. ??????????????? 4. ????????? 5. ??????????? 6. ??????????????? 03:59:09 7. ??????????? ??? ???????? 1. ?????????? 2. ????????????? 3. ???????????????????? 4. ???BNSF?????????? 5. ?????????????? 6. ?????????PI 7. ??????????SPI 8. ????????? ??? ???????? 1. ?????????? 2. ?????????? 3. ??????????????? 4. ???????? 5. ???????????? ??? ????????? 1. ??????????? 2. ??????OB?????????? 3. ????????? 4. ????VA?????? 5. ??????????? ??? ?????? 1. ???????? 2. ??????????????????? 3. ????????? 4. ??????????? 5. ???????????? 6. ??????????? 7. ????????????? 8. ???? ??? ???????? 1. ?????????????STO/STS? 2. ??????? i. ?????? ii. ?????? iii. ?????? 3. ??????? i. ??????EOQ???? ii. ????JIT iii. ??????????? 4. ????????? i. ?????????? ii. ???????? iii. ????????? iv. ?????????????? 5. ??????MRP 6. ???????? 7. ??????????? ??? ????????VMI 8. ??????????? 9. ???????VMI 10. ?????VMI??????? 11. ??VMI???????? 12. VMI?????? 13. VMI???????? 14. ?????K-Mart?VMI???? 15. ???????????? ?????????????????????????????????????????? (????????.?,?? ????..?:66cc_88cc at 163.com ??.?.?,??!)03:59:09 From vsih at snf.stanford.edu Mon Jul 14 18:06:13 2008 From: vsih at snf.stanford.edu (vsih at snf.stanford.edu) Date: Mon, 14 Jul 2008 18:06:13 -0700 Subject: Problem amtetcher SNF 2008-07-14 18:06:13: unstable etch pressure Message-ID: pumpdown was fine, but shortly after the etch began (after pressure and flow had stabilized), the pressure exceeded the limit and the etch stopped. From linf2122112 at hann.com Mon Jul 14 21:51:54 2008 From: linf2122112 at hann.com (linf2122112 at hann.com) Date: Tue, 15 Jul 2008 12:51:54 +0800 Subject: =?GB2312?B?tPrA7dK1zvE=?= Message-ID: ??????(??/?????! ???????????????????? ???????????????????????????????????????? ???????????????????<>??????????? ????????????????????????????????????<>? ?????<>2%-0.8%?????????? ?????????????? ???????: ??????? ? ??139-2656-3565 ?????????? Q Q:493942333 ???//honghai.3653h.com/ From ssgg at fFSs55ww5.com Tue Jul 15 02:08:07 2008 From: ssgg at fFSs55ww5.com (=?GB2312?B?zOF+uN9+uaR+1/d+0Kd+wso=?=) Date: Tue, 15 Jul 2008 17:08:07 +0800 Subject: EXCEL =?GB2312?B?0+s=?= PPT =?GB2312?B?1NogfrncfsDtftbQfrXEfrjffry2ftTLftPDMTc6MDg6MDU=?= Message-ID: EXCEL ? PPT ? ~?~?~?~?~?~?~?~? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~? 2.0.0.8.?.0.7.?.2.5.-.2.6.?.?-? 2.0.0.8.?.0.8.?.0.1.-.0.2.? ?-? 2.0.0.8.?.0.8.?.1.5.-.1.6.? ?-? 2.0.0.8.?.0.8.?.2.2.-.2.3.?.?-? ?~?~?~? :0.2.0.-.8.4.2.0.4.8.7.6. ?.?.?. 0.7.5.7.-.8.6.1.8.8.2.6.0 ?.?.? 021-51035856 ??? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~?? ????????????????????20????????????????????????25?????????????????2000??????~????????~?????????????????????????????????Excel???????????Excel??????????????????????????????????????Excel??????????????????????????????????????????????????????????????????Excel???????Excel????????????????????? ??????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????~?~?~??????????????????????????????????????????????????????????---POWERPOINT? ???~?~?~?~?~?~????????~?~?~?~?~?????~?~???~?~???~?~????~?~?~?~?????~?~?~???~???~?~?~?~?~?~?~?~?~??????????~?~?~?~?~?~???~?~?~?~?? ? ~?~ ?~ ?? ????????~?~?~???????????Excel ?PPT ????~?~?~???~?~?~?~?~? ? ~?~ ?~ ?? ??EXCEL ???~?~?~???~?~?~?~?~?? ?????????????????????~?~?~?? ?~??~??~???~??~???~??~???~? ?~?~?~?~?~?~?~?~?~?~?? ?~???????~?~?~??????? ?????~???~?Excel ?PPT ????~?~?~???~????~?? ? ~?~ ?~ ?? ?????EXCEL??-???-???-??????-? ?1??? 1.?????????? 2.???? 3.??????????????????????? 4.?????????????? 5.?????? 6.???????????????????? 7.????????? 8.??????? 9.??????????? 10.???? ?2??? 1.????????? 2.????? 3.???? 4.????? 5.???? 6.???? 7.?????????? 8.??????? 9.????? 10.???? ?3??? 1.????? 2.??????????????? 3.??????? 4.?????VBA?? 5.????????? 6.?????? 7.???? 8.????????????????? 9.????????? 10.??????????? ?4??? 1.??????????????? 2.?????????????? 3.???? 4.????????????????? 5.?????? 6.???? 7.????????? 8.???? 9.?????? 10.???? ?5??? 1.??????? 2.ODBC?Query 3.?????? 4.???? 5.????????? 6.???? 7.SQL?? 8.?????? 9.?????????????? 10.?????????????? ?6??? 1.????????? 2.IF???? 3.??????????? 4.???? 5.?????? 6.???? 7.???? 8.???? 9.???????? 10.???????? ?????Powerpoint?????????????? ?1??? 1.????? 2.????? 3.????? 4.?????? 5.?????? 6.???????? 7.????? 8.??????????? 9.????? ?2??? 1.??/??/?????? 2.????? 3.????? 4.??????? 5.?????? 6.????? 7.????????? 8.????Excel????? 9.???? 10.?????? ?3??? 1.?????? 2.????? 3.???? 4.???????? 5.???? 6.????? 7.??? 8.???? 9.???? 10.???? ?4?? 1.?????????? 2.????? 3.????? 4.???? 5.???? 6.????? 7.????? 8.?????? 9.?????? 10.???? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~? ??-?-???-?-?-???-?-?-???-?-?-???-?-?-? ??????? Excel ? PPT ?-?-?-?-?-?-?-? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~? ?? ? ? ???~??~???????????????~?~?~????????????????????-?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????Excel?PPT?????????????????????????????? EXCEL ? PPT ?~?~?~?~?~?~?~?~? ???~?????????? ?????????????????????????APV?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????TCL??????????????????????????????NEC????????????????? ------------------------------------------------------------------------------------------------------------------------ (????????.?,?? ????.?:66cc_88cc at 163.com ?-?-?-?,?-?!) From yinxiang83 at 126.com Wed Jul 16 07:06:43 2008 From: yinxiang83 at 126.com (=?GB2312?B?yczO8dPKvP4=?=) Date: Wed, 16 Jul 2008 22:06:43 +0800 Subject: =?GB2312?B?ssbLsNK1zvE=?= Message-ID: ????? ??? ?????????????????????????????? ???????????????????????????????? ????????????????????? ???????????????????????????????? ????????.?*?????????????.????.?????? ??????. ?????????????????????????????? ?????? ???13728738115 From eenriquez at snf.stanford.edu Tue Jul 15 13:30:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:30:56 -0700 Subject: Comment amtetcher SNF 2008-07-15 13:30:55: Update Message-ID: Found 3 of the 6 trays had heavy arcing. They were all improperly clamped. Currently cleaning up the mess and replacing all the burnt insulators. From eenriquez at snf.stanford.edu Tue Jul 15 13:31:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:31:53 -0700 Subject: Problem amtetcher SNF 2008-05-24 23:46:58: Error message(Gas 5 wont close) while running process 2 Message-ID: Re-zeroed MFC 5 From eenriquez at snf.stanford.edu Tue Jul 15 13:32:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:32:05 -0700 Subject: Problem amtetcher SNF 2008-06-04 13:00:18: Gas 5 Problem in Proc. 2 Message-ID: Re-zeroed MFC 5 From eenriquez at snf.stanford.edu Tue Jul 15 13:32:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:32:12 -0700 Subject: Comment amtetcher SNF 2008-06-04 20:08:49: gas 5 won't close error Message-ID: Re-zeroed MFC 5 From eenriquez at snf.stanford.edu Tue Jul 15 13:32:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:32:23 -0700 Subject: Problem amtetcher SNF 2008-06-19 15:53:29: ERR MSG: GAS 5 wont close Message-ID: Re-zeroed MFC 5 From eenriquez at snf.stanford.edu Tue Jul 15 13:32:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:32:31 -0700 Subject: Comment amtetcher SNF 2008-06-24 14:57:59: Gas 5 fault update Message-ID: Re-zeroed MFC 5 From eenriquez at snf.stanford.edu Tue Jul 15 13:32:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:32:44 -0700 Subject: Comment amtetcher SNF 2008-07-01 10:03:00: Gas 5 fault and turbo pump fail Message-ID: Re-zeroed MFC 5 From latta at snf.stanford.edu Tue Jul 15 13:59:28 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:59:28 -0700 Subject: Shutdown amtetcher SNF 2008-07-15 13:59:21: Arcing repairs underway Message-ID: Should be complete tomorrow morning. Keep checking this space.... From jguotnrepx at enrgvrguouqb.com.cn Wed Jul 16 00:52:55 2008 From: jguotnrepx at enrgvrguouqb.com.cn (mnshzg) Date: Wed, 16 Jul 2008 15:52:55 +0800 Subject: =?GB2312?B?08ogvP4gyLogt6I=?= Message-ID: <20080716075256.B5150279F3B@computerA.com> An HTML attachment was scrubbed... URL: From yinxiang83 at 126.com Thu Jul 17 01:20:11 2008 From: yinxiang83 at 126.com (=?GB2312?B?yczO8dPKvP4=?=) Date: Thu, 17 Jul 2008 16:20:11 +0800 Subject: =?GB2312?B?0bDH87rP1/fJzA==?= Message-ID: ????? ??? ?????????????????????????????? ???????????????????????????????? ????????????????????? ???????????????????????????????? ????????.?*?????????????.????.?????? ??????. ?????????????????????????????? ?????? ???13728738115 From cbaxter at snf.stanford.edu Wed Jul 16 01:32:45 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 16 Jul 2008 01:32:45 -0700 Subject: Comment amtetcher SNF 2008-07-16 01:32:44: Cleaned... Message-ID: Cleaned all 6 trays and top hex plate. Changed all the ardel shield on all 6 trays and top hex plate, need to change all the dummy wafers. Chamber is under vacuum. From eenriquez at snf.stanford.edu Wed Jul 16 08:29:54 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jul 2008 08:29:54 -0700 Subject: Shutdown amtetcher SNF 2008-07-15 13:59:21: Arcing repairs underway Message-ID: Ran recipe 2 with no problems after the trays were clean and the damaged parts replaced. From eenriquez at snf.stanford.edu Wed Jul 16 08:30:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jul 2008 08:30:22 -0700 Subject: Comment amtetcher SNF 2008-07-16 01:32:44: Cleaned... Message-ID: Ran recipe 2 with no problems after the trays were clean and the damaged parts replaced. From eenriquez at snf.stanford.edu Wed Jul 16 08:30:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jul 2008 08:30:30 -0700 Subject: Comment amtetcher SNF 2008-07-15 13:30:55: Update Message-ID: Ran recipe 2 with no problems after the trays were clean and the damaged parts replaced. From eenriquez at snf.stanford.edu Wed Jul 16 08:31:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jul 2008 08:31:19 -0700 Subject: Problem amtetcher SNF 2008-07-14 18:06:13: unstable etch pressure Message-ID: Found 3 of the 6 trays had heavy arcing. They were all improperly clamped. Currently cleaning up the mess and replacing all the burnt insulators. From eenriquez at snf.stanford.edu Wed Jul 16 16:46:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jul 2008 16:46:21 -0700 Subject: Problem amtetcher SNF 2008-06-16 02:06:10: pumpdown nightmares ! Message-ID: Noted From dggegdk at ss45.com Wed Jul 16 21:26:08 2008 From: dggegdk at ss45.com (=?GB2312?B?1cbO1dPQ0Ke5tc2otcS8vMfJ?=) Date: Thu, 17 Jul 2008 12:26:08 +0800 Subject: =?GB2312?B?uN8uvLYuzsQuw9gu1rAu0rUuu68u0bUuwbcxMjoyNjowNg==?= Message-ID: ??$ ??$ ??$ ??$ ??$ ??$ ??$ ??$ ?? ( ??$??$?? ) ?? ?? 7??18-20?? 8??29-31?? ?? ?? ?????????? ?? ?? 7??25-27?? 9??05-07?? ?? ?? ???????????? ?? ?? 9??19-21?? ?? ?? ???????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$???? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ??$??$??$???? ??$??$??$??????-??????-??-??-??-??-??-??-??-??-????????-??-??-??-??-??-??-??-??-???? ??$??$??$????2800??/?? ??$??$??$????0755-61281260 021-51035961 010-51655113 ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????? ??????????????????????????-??-??-??????-?????????????????????????????????????? ??????????????????????????????????????????????????-?????????????? ??$??$??$?? ? ??????-??-??-??-??-????????????????-??????-?? ? ??????????????????????????????????????????????????????-??-??-?? ? ??-??-??-??-??-??-??-??????-??-??-??-??-???????????? ? ???????????????????????????????? ? ???????????????????????????????????????????? ? ???????????????????????????????????????? ? ?????????????????????????????????????????????????????????????????? ? ??-??-??-??????-??-??-???????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?? $?? $?? $?? ????????????????????????????????-?? ?????????????????????????????? ?????????????????????? ??????????-??-??-???????????????????? ?? ??-???????????????????? ??-?????????????????? ?? ??-?????????????????????????? ??-??????-?????????????????????? ?? ?????????????????????? ??????-??-??-??????????-??-??-?? ?? ??-???????? ?? ????????-???????????????? ?? ??????-?????????? ??-???????????????????????????????? ?? ?????????????? ???????? ???????? ???????? ???????? ??-???????????????? ?????????????????????? ?? ??????????????-???????????????????? ??-???????????????? ?? ?????????????????????? ???? ???? ???? ??-??-??-??????-??-??-??????????-?? ?? ??-?????????????????????????? ???????? ???????? ??-?????????????? ???????????? ??-?????????????????????????? ??-?????????????????????????????????????? ?? ??-??-??-??-??-??-?? ??-??-??-??-??-??-??-??-?? ??-??-??-???????????? ??-??????-??-??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ??????-??-??-????-??-??-??-??-??--?? ?? ??-??-??-??????-?? ?? ??-??-??-??????-?? ????????????-??-??-?? ?????????????????????? 80/20???? ???????????????????????????? ??-??-??-????20?????? ???????????????????????????? ?? ?????????????????? ?? ?????????????????????????????????????? ?? ?????????????????? ?? ?????????????????? ?????????????????????????? ?? ?????????????????????????? ?? ?????????????????????? ?????????????????????? ?? ???????????? ?? ?????????????? ?? ?????????? ?? ?????????????? ?????????????????????????????????????? ???????????????? ?? ???????????????? ?? ?????????????? ?? ?????????? ?? ???????????????? ?????????????????????? ?? ???????? ?? ?????????? ?? ???????????????????????? ?? ???????????????? ?? 13?????????????? ?? ?????????????????????? ??-??-??-???????????????????? ???????????????????????????????? ?? ???????????????? 1?????????????????????????? ?????????? 2????????????????(??????????)??????????????????????TPO?????? 3???????????????????? 4???????????????????????????????????? ?? ?????????????? 1?????????????????? ???? ?????????????????? ?????? ???? ?????????????????????????? ???? ?????????????? ???????? 2?????????? ?????????????????????????????????????????????????????????????? ???????????????? 3?????????????????????? ?????????????????????????????????????????? ?????????? ?? ???????????? (??) ?????????????? 1?????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????? ?????????????????????????????????????? ???????????????????????????????????????????????????????????????????? 2????????????-??????-?? 3?????? ???????????????????????????????????? 4?????? ???????????????????????????????????????????????????????????????? 5?????????? 6?????????? 7?????????? (??) ??-?????????????? 1????-?? ?????? ?????? ?????? ?????? 2?????????????????? 3???????????????? 4???????????????????????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??-??-??-??-??-??-??????-??-??-??????-??-??-??-??-??-??-??-??-???????? ??-??-??-??-??-??-??-??-??-??????????????????-??-??-??????????????????????????????????- -??-??-????????-????????AITA??????????????-??-????????SKP??????????-??-??-?????????? ????????-??-??-??-??????????????????????-??????-???????????????????????????????? ??????MOTHERS????????????????????-??-??-??-??-??-??-??-??-??-??-?????? ????????????????????-???????????????????????? ??????????????????????????????????????????????????????`??????`????`?????? ??????????????????????????????????????????????????????????????`????`???????? ???????????????????????????? ??$??$??$????????-??-??-??-??-??-??-??-????????????-??-??-??-??-??-??-??-??-??-??-??-???? ????-??-??-??-??-??-??-??-??????????-??-??-??-??-??-??-??????????-??-??-??????-??-??-??-??-???? ??~??~??~????????????????????~????????????????????????????????????~?????????? ??????????????????~??????????????????????????????????????????-??????????-?????? ????????????~??????????~??~??~???? ??~??????~?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????? ??????????TCL?????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??=??=??=??=??=??&????=??=??=??=??=??=??MBA;????PPT ??????=??=??=??=??=??=??????????????????????????????????=??????=???????????????????? ????????STI??=??=??=??=??=????????????????????????????????????ASHER?????????????? ????????????=??????????????????????????????=??=??=????????????????????????????=?? ????????=????=???????????????????????????????????????????????????????????????? ???????????????????? ??$??$??$????????-??-??-??-??-??-??-??-???? ????-??-??-???? ????-??-??-??-??-???? ????-??-??-??-??-??-???? ??$??$??$??????????????-??-??-?????????????????????????????????????????????????? ??????????????????????????????-???????????????????????????????????????????????? ?????????????? ??-??-??-??-??-??-?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ????????????????????????????????ACE?????? ==================================================================== (??????????????????,???? ????????-??:hhllkk123 at sina.com ????????,????!)12:26:06 From wyhu25200000 at shin.com Thu Jul 17 00:59:24 2008 From: wyhu25200000 at shin.com (wyhu25200000 at shin.com) Date: Thu, 17 Jul 2008 15:59:24 +0800 Subject: =?GB2312?B?zMbQwsP3?= Message-ID: ??????(??/?????! ???????????????????? ???????????????????????????????????????? ???????????????????<>??????????? ????????????????????????????????????<>? ?????<>2%-0.8%?????????? ?????????????????????: ??????? ? ??137-1356-3135 ?????????? Q Q:357163066 From latta at snf.stanford.edu Thu Jul 17 10:17:27 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:17:27 -0700 Subject: Problem amtetcher SNF 2008-06-06 17:59:24: Process 1 gas would not shut off. Message-ID: Hummm, process 1 gas is O2, unless I misunstand this meesage. All is good now From latta at snf.stanford.edu Thu Jul 17 10:17:40 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:17:40 -0700 Subject: Comment amtetcher SNF 2008-06-09 20:54:16: Program 4 missing. Message-ID: cleared From latta at snf.stanford.edu Thu Jul 17 10:18:48 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:18:48 -0700 Subject: Problem amtetcher SNF 2008-06-13 01:16:11: doesnt pump down Message-ID: yep- a known problem. Reposrted several time so I am cleaning the pcs to the most recent. From latta at snf.stanford.edu Thu Jul 17 10:18:58 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:18:58 -0700 Subject: Problem amtetcher SNF 2008-06-14 01:34:31: Chamber takes very long to pumpdown... Message-ID: yep- a known problem. Reposrted several time so I am cleaning the pcs to the most recent. From latta at snf.stanford.edu Thu Jul 17 10:19:21 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:19:21 -0700 Subject: Problem amtetcher SNF 2008-06-19 15:40:45: turbo pump Message-ID: yep- a known problem. Reposrted several time so I am cleaning the pcs to the most recent. From latta at snf.stanford.edu Thu Jul 17 10:19:42 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:19:42 -0700 Subject: Problem amtetcher SNF 2008-07-01 11:12:55: Turbo pumpdn long- ig? Message-ID: yep- a known problem. Reposrted several time so I am cleaning the pcs to the most recent. From latta at snf.stanford.edu Thu Jul 17 10:19:56 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:19:56 -0700 Subject: Problem amtetcher SNF 2008-07-04 17:57:07: long pumpdown time Message-ID: yep- a known problem. Reposrted several time so I am cleaning the pcs to the most recent. From latta at snf.stanford.edu Thu Jul 17 10:20:29 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:20:29 -0700 Subject: Comment amtetcher SNF 2008-07-08 21:05:58: Pgm 3 oxide etch base is set to 0.80mT Message-ID: See recent quals in comments. From jsuarez at snf.stanford.edu Thu Jul 17 10:37:55 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Thu, 17 Jul 2008 10:37:55 -0700 Subject: Comment amtetcher SNF 2008-07-17 10:37:54: clamp missing Message-ID: -Hex#2, 1 clamp is missing from top slot From mdickey at snf.stanford.edu Thu Jul 17 13:03:36 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 17 Jul 2008 13:03:36 -0700 Subject: Comment amtetcher SNF 2008-07-17 10:37:54: clamp missing Message-ID: missing tray clip replaced From sggdggsdhg at Df555wwcom Thu Jul 17 18:00:44 2008 From: sggdggsdhg at Df555wwcom (=?GB2312?B?1cbO1dPQ0Ke5tc2otcS8vMfJ?=) Date: Fri, 18 Jul 2008 09:00:44 +0800 Subject: =?GB2312?B?uN8uvLYuzsQuw9gu1rAu0rUuu68u0bUuwbcwOTowMDo0Mw==?= Message-ID: ??$ ??$ ??$ ??$ ??$ ??$ ??$ ??$ ?? ( ??$??$?? ) ?? ?? 7??18-20?? 8??29-31?? ?? ?? ?????????? ?? ?? 7??25-27?? 9??05-07?? ?? ?? ???????????? ?? ?? 9??19-21?? ?? ?? ???????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$???? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ??$??$??$???? ??$??$??$??????-??????-??-??-??-??-??-??-??-??-????????-??-??-??-??-??-??-??-??-???? ??$??$??$????2800??/?? ??$??$??$????0755-61281260 021-51035961 010-51655113 ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????? ??????????????????????????-??-??-??????-?????????????????????????????????????? ??????????????????????????????????????????????????-?????????????? ??$??$??$?? ? ??????-??-??-??-??-????????????????-??????-?? ? ??????????????????????????????????????????????????????-??-??-?? ? ??-??-??-??-??-??-??-??????-??-??-??-??-???????????? ? ???????????????????????????????? ? ???????????????????????????????????????????? ? ???????????????????????????????????????? ? ?????????????????????????????????????????????????????????????????? ? ??-??-??-??????-??-??-???????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?? $?? $?? $?? ????????????????????????????????-?? ?????????????????????????????? ?????????????????????? ??????????-??-??-???????????????????? ?? ??-???????????????????? ??-?????????????????? ?? ??-?????????????????????????? ??-??????-?????????????????????? ?? ?????????????????????? ??????-??-??-??????????-??-??-?? ?? ??-???????? ?? ????????-???????????????? ?? ??????-?????????? ??-???????????????????????????????? ?? ?????????????? ???????? ???????? ???????? ???????? ??-???????????????? ?????????????????????? ?? ??????????????-???????????????????? ??-???????????????? ?? ?????????????????????? ???? ???? ???? ??-??-??-??????-??-??-??????????-?? ?? ??-?????????????????????????? ???????? ???????? ??-?????????????? ???????????? ??-?????????????????????????? ??-?????????????????????????????????????? ?? ??-??-??-??-??-??-?? ??-??-??-??-??-??-??-??-?? ??-??-??-???????????? ??-??????-??-??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ??????-??-??-????-??-??-??-??-??--?? ?? ??-??-??-??????-?? ?? ??-??-??-??????-?? ????????????-??-??-?? ?????????????????????? 80/20???? ???????????????????????????? ??-??-??-????20?????? ???????????????????????????? ?? ?????????????????? ?? ?????????????????????????????????????? ?? ?????????????????? ?? ?????????????????? ?????????????????????????? ?? ?????????????????????????? ?? ?????????????????????? ?????????????????????? ?? ???????????? ?? ?????????????? ?? ?????????? ?? ?????????????? ?????????????????????????????????????? ???????????????? ?? ???????????????? ?? ?????????????? ?? ?????????? ?? ???????????????? ?????????????????????? ?? ???????? ?? ?????????? ?? ???????????????????????? ?? ???????????????? ?? 13?????????????? ?? ?????????????????????? ??-??-??-???????????????????? ???????????????????????????????? ?? ???????????????? 1?????????????????????????? ?????????? 2????????????????(??????????)??????????????????????TPO?????? 3???????????????????? 4???????????????????????????????????? ?? ?????????????? 1?????????????????? ???? ?????????????????? ?????? ???? ?????????????????????????? ???? ?????????????? ???????? 2?????????? ?????????????????????????????????????????????????????????????? ???????????????? 3?????????????????????? ?????????????????????????????????????????? ?????????? ?? ???????????? 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(??) ??-?????????????? 1????-?? ?????? ?????? ?????? ?????? 2?????????????????? 3???????????????? 4???????????????????????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??-??-??-??-??-??-??????-??-??-??????-??-??-??-??-??-??-??-??-???????? ??-??-??-??-??-??-??-??-??-??????????????????-??-??-??????????????????????????????????- -??-??-????????-????????AITA??????????????-??-????????SKP??????????-??-??-?????????? ????????-??-??-??-??????????????????????-??????-???????????????????????????????? ??????MOTHERS????????????????????-??-??-??-??-??-??-??-??-??-??-?????? ????????????????????-???????????????????????? ??????????????????????????????????????????????????????`??????`????`?????? ??????????????????????????????????????????????????????????????`????`???????? ???????????????????????????? ??$??$??$????????-??-??-??-??-??-??-??-????????????-??-??-??-??-??-??-??-??-??-??-??-???? ????-??-??-??-??-??-??-??-??????????-??-??-??-??-??-??-??????????-??-??-??????-??-??-??-??-???? ??~??~??~????????????????????~????????????????????????????????????~?????????? ??????????????????~??????????????????????????????????????????-??????????-?????? ????????????~??????????~??~??~???? ??~??????~?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????? ??????????TCL?????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??=??=??=??=??=??&????=??=??=??=??=??=??MBA;????PPT ??????=??=??=??=??=??=??????????????????????????????????=??????=???????????????????? ????????STI??=??=??=??=??=????????????????????????????????????ASHER?????????????? ????????????=??????????????????????????????=??=??=????????????????????????????=?? ????????=????=???????????????????????????????????????????????????????????????? ???????????????????? ??$??$??$????????-??-??-??-??-??-??-??-???? ????-??-??-???? ????-??-??-??-??-???? ????-??-??-??-??-??-???? ??$??$??$??????????????-??-??-?????????????????????????????????????????????????? ??????????????????????????????-???????????????????????????????????????????????? ?????????????? ??-??-??-??-??-??-?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ????????????????????????????????ACE?????? ==================================================================== (??????????????????,???? ????????-??:hhllkk123 at sina.com ????????,????!)09:00:43 From yinxiang83 at 126.com Sat Jul 19 03:24:27 2008 From: yinxiang83 at 126.com (=?GB2312?B?yczO8dPKvP4=?=) Date: Sat, 19 Jul 2008 18:24:27 +0800 Subject: =?GB2312?B?0bDH87rP1/fJzA==?= Message-ID: ????? ??? ?????????????????????????????? ???????????????????????????????? ????????????????????? ???????????????????????????????? ????????.?*?????????????.????.?????? ??????. ?????????????????????????????? ?????? ???13728738115 From wyhu25200000 at shin.com Fri Jul 18 07:16:52 2008 From: wyhu25200000 at shin.com (wyhu25200000 at shin.com) Date: Fri, 18 Jul 2008 22:16:52 +0800 Subject: =?GB2312?B?tPrA7dK1zvE=?= Message-ID: ??????(??/?????! ???????????????????? ???????????????????????????????????????? ???????????????????<>??????????? ????????????????????????????????????<>? ?????<>2%-0.8%?????????? ?????????????? ???????: ??????? ? ??139-2656-3565 ?????????? Q Q:493942333 ???//honghai.3653h.com/ From dghg2dfgdg at 9ddsssx.com Fri Jul 18 12:40:00 2008 From: dghg2dfgdg at 9ddsssx.com (=?GB2312?B?1cbO1dPQ0Ke5tc2otcS8vMfJ?=) Date: Sat, 19 Jul 2008 03:40:00 +0800 Subject: =?GB2312?B?uN8uvLYuzsQuw9gu1rAu0rUuu68u0bUuwbcwMzo0MDowMA==?= Message-ID: ??$ ??$ ??$ ??$ ??$ ??$ ??$ ??$ ?? ( ??$??$?? ) ?? ?? 7??18-20?? 8??29-31?? ?? ?? ?????????? ?? ?? 7??25-27?? 9??05-07?? ?? ?? ???????????? ?? ?? 9??19-21?? ?? ?? ???????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$???? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ??$??$??$???? ??$??$??$??????-??????-??-??-??-??-??-??-??-??-????????-??-??-??-??-??-??-??-??-???? ??$??$??$????2800??/?? ??$??$??$????0755-61281260 021-51035961 010-51655113 ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????? ??????????????????????????-??-??-??????-?????????????????????????????????????? ??????????????????????????????????????????????????-?????????????? ??$??$??$?? ? ??????-??-??-??-??-????????????????-??????-?? ? ??????????????????????????????????????????????????????-??-??-?? ? ??-??-??-??-??-??-??-??????-??-??-??-??-???????????? ? ???????????????????????????????? ? ???????????????????????????????????????????? ? ???????????????????????????????????????? ? ?????????????????????????????????????????????????????????????????? ? ??-??-??-??????-??-??-???????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?? $?? $?? $?? ????????????????????????????????-?? ?????????????????????????????? ?????????????????????? ??????????-??-??-???????????????????? ?? ??-???????????????????? ??-?????????????????? ?? ??-?????????????????????????? ??-??????-?????????????????????? ?? ?????????????????????? ??????-??-??-??????????-??-??-?? ?? ??-???????? ?? ????????-???????????????? ?? ??????-?????????? ??-???????????????????????????????? ?? ?????????????? ???????? ???????? ???????? ???????? ??-???????????????? ?????????????????????? ?? ??????????????-???????????????????? ??-???????????????? ?? ?????????????????????? ???? ???? ???? ??-??-??-??????-??-??-??????????-?? ?? ??-?????????????????????????? ???????? ???????? ??-?????????????? ???????????? ??-?????????????????????????? ??-?????????????????????????????????????? ?? ??-??-??-??-??-??-?? ??-??-??-??-??-??-??-??-?? ??-??-??-???????????? ??-??????-??-??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ??????-??-??-????-??-??-??-??-??--?? ?? ??-??-??-??????-?? ?? ??-??-??-??????-?? ????????????-??-??-?? ?????????????????????? 80/20???? ???????????????????????????? ??-??-??-????20?????? ???????????????????????????? ?? ?????????????????? ?? ?????????????????????????????????????? ?? ?????????????????? ?? ?????????????????? ?????????????????????????? ?? ?????????????????????????? ?? ?????????????????????? ?????????????????????? ?? ???????????? ?? ?????????????? ?? ?????????? ?? ?????????????? ?????????????????????????????????????? ???????????????? ?? ???????????????? ?? ?????????????? ?? ?????????? ?? ???????????????? ?????????????????????? ?? ???????? ?? ?????????? ?? ???????????????????????? ?? ???????????????? ?? 13?????????????? ?? ?????????????????????? ??-??-??-???????????????????? ???????????????????????????????? ?? ???????????????? 1?????????????????????????? ?????????? 2????????????????(??????????)??????????????????????TPO?????? 3???????????????????? 4???????????????????????????????????? ?? ?????????????? 1?????????????????? ???? ?????????????????? ?????? ???? ?????????????????????????? ???? ?????????????? ???????? 2?????????? ?????????????????????????????????????????????????????????????? ???????????????? 3?????????????????????? ?????????????????????????????????????????? ?????????? ?? ???????????? 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(??) ??-?????????????? 1????-?? ?????? ?????? ?????? ?????? 2?????????????????? 3???????????????? 4???????????????????????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??-??-??-??-??-??-??????-??-??-??????-??-??-??-??-??-??-??-??-???????? ??-??-??-??-??-??-??-??-??-??????????????????-??-??-??????????????????????????????????- -??-??-????????-????????AITA??????????????-??-????????SKP??????????-??-??-?????????? ????????-??-??-??-??????????????????????-??????-???????????????????????????????? ??????MOTHERS????????????????????-??-??-??-??-??-??-??-??-??-??-?????? ????????????????????-???????????????????????? ??????????????????????????????????????????????????????`??????`????`?????? ??????????????????????????????????????????????????????????????`????`???????? ???????????????????????????? ??$??$??$????????-??-??-??-??-??-??-??-????????????-??-??-??-??-??-??-??-??-??-??-??-???? ????-??-??-??-??-??-??-??-??????????-??-??-??-??-??-??-??????????-??-??-??????-??-??-??-??-???? ??~??~??~????????????????????~????????????????????????????????????~?????????? ??????????????????~??????????????????????????????????????????-??????????-?????? ????????????~??????????~??~??~???? ??~??????~?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????? ??????????TCL?????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??=??=??=??=??=??&????=??=??=??=??=??=??MBA;????PPT ??????=??=??=??=??=??=??????????????????????????????????=??????=???????????????????? ????????STI??=??=??=??=??=????????????????????????????????????ASHER?????????????? ????????????=??????????????????????????????=??=??=????????????????????????????=?? ????????=????=???????????????????????????????????????????????????????????????? ???????????????????? ??$??$??$????????-??-??-??-??-??-??-??-???? ????-??-??-???? ????-??-??-??-??-???? ????-??-??-??-??-??-???? ??$??$??$??????????????-??-??-?????????????????????????????????????????????????? ??????????????????????????????-???????????????????????????????????????????????? ?????????????? ??-??-??-??-??-??-?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ????????????????????????????????ACE?????? ==================================================================== (??????????????????,???? ????????-??:hhllkk123 at sina.com ????????,????!)03:40:00 From jackson at snf.stanford.edu Sat Jul 19 00:53:46 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sat, 19 Jul 2008 00:53:46 -0700 Subject: Problem amtetcher SNF 2008-07-19 00:53:46: long pumpdown, program 2 won't go to holding Message-ID: I have tried twice to run program #2...but it says "wait fl off....gas 5 won't close" From wyhu25200000 at shin.com Sat Jul 19 01:43:20 2008 From: wyhu25200000 at shin.com (wyhu25200000 at shin.com) Date: Sat, 19 Jul 2008 16:43:20 +0800 Subject: =?GB2312?B?tPrA7dK1zvE=?= Message-ID: ??????(??/?????! ???????????????????? ???????????????????????????????????????? ???????????????????<>??????????? ????????????????????????????????????<>? ?????<>2%-0.8%?????????? ?????????????? ???????: ??????? ? ??139-2656-3565 ?????????? Q Q:493942333 ???//honghai.3653h.com/ From sddffS at FvDdsd.com Sun Jul 20 21:51:49 2008 From: sddffS at FvDdsd.com (=?GB2312?B?1cbO1dPQ0Ke5tc2otcS8vMfJ?=) Date: Mon, 21 Jul 2008 12:51:49 +0800 Subject: =?GB2312?B?uN8uvLYuzsQuw9gu1rAu0rUuu68u0bUuwbcxMjo1MTo0OA==?= Message-ID: ??$ ??$ ??$ ??$ ??$ ??$ ??$ ??$ ?? ( ??$??$?? ) ?? ?? 7??18-20?? 8??29-31?? ?? ?? ?????????? ?? ?? 7??25-27?? 9??05-07?? ?? ?? ???????????? ?? ?? 9??19-21?? ?? ?? ???????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$???? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ??$??$??$???? ??$??$??$??????-??????-??-??-??-??-??-??-??-??-????????-??-??-??-??-??-??-??-??-???? ??$??$??$????2800??/?? ??$??$??$????0755-61281260 021-51035961 010-51655113 ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????? ??????????????????????????-??-??-??????-?????????????????????????????????????? ??????????????????????????????????????????????????-?????????????? ??$??$??$?? ? ??????-??-??-??-??-????????????????-??????-?? ? ??????????????????????????????????????????????????????-??-??-?? ? ??-??-??-??-??-??-??-??????-??-??-??-??-???????????? ? ???????????????????????????????? ? ???????????????????????????????????????????? ? ???????????????????????????????????????? ? ?????????????????????????????????????????????????????????????????? ? ??-??-??-??????-??-??-???????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?? $?? $?? $?? ????????????????????????????????-?? ?????????????????????????????? ?????????????????????? ??????????-??-??-???????????????????? ?? ??-???????????????????? ??-?????????????????? ?? ??-?????????????????????????? ??-??????-?????????????????????? ?? ?????????????????????? ??????-??-??-??????????-??-??-?? ?? ??-???????? ?? ????????-???????????????? ?? ??????-?????????? ??-???????????????????????????????? ?? ?????????????? ???????? ???????? ???????? ???????? ??-???????????????? ?????????????????????? ?? ??????????????-???????????????????? ??-???????????????? ?? ?????????????????????? ???? ???? ???? ??-??-??-??????-??-??-??????????-?? ?? ??-?????????????????????????? ???????? ???????? ??-?????????????? ???????????? ??-?????????????????????????? ??-?????????????????????????????????????? ?? ??-??-??-??-??-??-?? ??-??-??-??-??-??-??-??-?? ??-??-??-???????????? ??-??????-??-??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ??????-??-??-????-??-??-??-??-??--?? ?? ??-??-??-??????-?? ?? ??-??-??-??????-?? ????????????-??-??-?? ?????????????????????? 80/20???? ???????????????????????????? ??-??-??-????20?????? ???????????????????????????? ?? ?????????????????? ?? ?????????????????????????????????????? ?? ?????????????????? ?? ?????????????????? ?????????????????????????? ?? ?????????????????????????? ?? ?????????????????????? ?????????????????????? ?? ???????????? ?? ?????????????? ?? ?????????? ?? ?????????????? ?????????????????????????????????????? ???????????????? ?? ???????????????? ?? ?????????????? ?? ?????????? ?? ???????????????? ?????????????????????? ?? ???????? ?? ?????????? ?? ???????????????????????? ?? ???????????????? ?? 13?????????????? ?? ?????????????????????? ??-??-??-???????????????????? ???????????????????????????????? ?? ???????????????? 1?????????????????????????? ?????????? 2????????????????(??????????)??????????????????????TPO?????? 3???????????????????? 4???????????????????????????????????? ?? ?????????????? 1?????????????????? ???? ?????????????????? ?????? ???? ?????????????????????????? ???? ?????????????? ???????? 2?????????? ?????????????????????????????????????????????????????????????? ???????????????? 3?????????????????????? ?????????????????????????????????????????? ?????????? ?? ???????????? (??) ?????????????? 1?????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????? ?????????????????????????????????????? ???????????????????????????????????????????????????????????????????? 2????????????-??????-?? 3?????? ???????????????????????????????????? 4?????? ???????????????????????????????????????????????????????????????? 5?????????? 6?????????? 7?????????? (??) ??-?????????????? 1????-?? ?????? ?????? ?????? ?????? 2?????????????????? 3???????????????? 4???????????????????????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??-??-??-??-??-??-??????-??-??-??????-??-??-??-??-??-??-??-??-???????? ??-??-??-??-??-??-??-??-??-??????????????????-??-??-??????????????????????????????????- -??-??-????????-????????AITA??????????????-??-????????SKP??????????-??-??-?????????? ????????-??-??-??-??????????????????????-??????-???????????????????????????????? ??????MOTHERS????????????????????-??-??-??-??-??-??-??-??-??-??-?????? ????????????????????-???????????????????????? ??????????????????????????????????????????????????????`??????`????`?????? ??????????????????????????????????????????????????????????????`????`???????? ???????????????????????????? ??$??$??$????????-??-??-??-??-??-??-??-????????????-??-??-??-??-??-??-??-??-??-??-??-???? ????-??-??-??-??-??-??-??-??????????-??-??-??-??-??-??-??????????-??-??-??????-??-??-??-??-???? ??~??~??~????????????????????~????????????????????????????????????~?????????? ??????????????????~??????????????????????????????????????????-??????????-?????? ????????????~??????????~??~??~???? ??~??????~?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????? ??????????TCL?????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??=??=??=??=??=??&????=??=??=??=??=??=??MBA;????PPT ??????=??=??=??=??=??=??????????????????????????????????=??????=???????????????????? ????????STI??=??=??=??=??=????????????????????????????????????ASHER?????????????? ????????????=??????????????????????????????=??=??=????????????????????????????=?? ????????=????=???????????????????????????????????????????????????????????????? ???????????????????? ??$??$??$????????-??-??-??-??-??-??-??-???? ????-??-??-???? ????-??-??-??-??-???? ????-??-??-??-??-??-???? ??$??$??$??????????????-??-??-?????????????????????????????????????????????????? ??????????????????????????????-???????????????????????????????????????????????? ?????????????? ??-??-??-??-??-??-?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ????????????????????????????????ACE?????? ==================================================================== (??????????????????,???? ????????-??:hhllkk123 at sina.com ????????,????!)12:51:48 From allaf at snf.stanford.edu Sun Jul 20 23:56:09 2008 From: allaf at snf.stanford.edu (allaf at snf.stanford.edu) Date: Sun, 20 Jul 2008 23:56:09 -0700 Subject: Problem amtetcher SNF 2008-07-20 23:56:07: Long pumpdown Message-ID: From eenriquez at snf.stanford.edu Mon Jul 21 11:40:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jul 2008 11:40:23 -0700 Subject: Shutdown amtetcher SNF 2008-07-21 11:40:22: High leak rate Message-ID: Chamber has a 108 mT/min leak rate. From eenriquez at snf.stanford.edu Mon Jul 21 15:18:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:18:20 -0700 Subject: Shutdown amtetcher SNF 2008-07-21 11:40:22: High leak rate Message-ID: Ran a second leak rate test after 1 hour of pumping on the chamber. Leak rate was 15 mT/min. The system is acting like it has a virtual leak (trapped volume). Extended the turbo pump time to 20 minutes. When I ran recipe 3, the system pumped down to 0.49 mT in 16 minutes. My previous attemp at running recipe 3, the pressure was at 0.64 mT after 45 minutes of pumping. Need to troubleshoot further tomorrow. From eenriquez at snf.stanford.edu Mon Jul 21 15:20:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:20:32 -0700 Subject: Comment amtetcher SNF 2008-07-21 15:20:31: Update Message-ID: Extended the turbo pump time to 20 minutes. When I ran recipe 3, the system pumped down to 0.49 mT in 16 minutes. My previous attemp at running recipe 3, the pressure was at 0.64 mT after 45 minutes of pumping. Need to troubleshoot further tomorrow. From dgdd5d at DfFKKss5ww5.com Mon Jul 21 17:51:45 2008 From: dgdd5d at DfFKKss5ww5.com (=?GB2312?B?1cbO1dPQ0Ke5tc2otcS8vMfJ?=) Date: Tue, 22 Jul 2008 08:51:45 +0800 Subject: =?GB2312?B?uN8uvLYuzsQuw9gu1rAu0rUuu68u0bUuwbcwODo1MTo0NA==?= Message-ID: ??$ ??$ ??$ ??$ ??$ ??$ ??$ ??$ ?? ( ??$??$?? ) ?? ?? 7??18-20?? 8??29-31?? ?? ?? ?????????? ?? ?? 7??25-27?? 9??05-07?? ?? ?? ???????????? ?? ?? 9??19-21?? ?? ?? ???????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$???? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ??$??$??$???? ??$??$??$??????-??????-??-??-??-??-??-??-??-??-????????-??-??-??-??-??-??-??-??-???? ??$??$??$????2800??/?? ??$??$??$????0755-61281260 021-51035961 010-51655113 ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????? ??????????????????????????-??-??-??????-?????????????????????????????????????? ??????????????????????????????????????????????????-?????????????? ??$??$??$?? ? ??????-??-??-??-??-????????????????-??????-?? ? ??????????????????????????????????????????????????????-??-??-?? ? ??-??-??-??-??-??-??-??????-??-??-??-??-???????????? ? ???????????????????????????????? ? ???????????????????????????????????????????? ? ???????????????????????????????????????? ? ?????????????????????????????????????????????????????????????????? ? ??-??-??-??????-??-??-???????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?? $?? $?? $?? ????????????????????????????????-?? ?????????????????????????????? ?????????????????????? ??????????-??-??-???????????????????? ?? ??-???????????????????? ??-?????????????????? ?? ??-?????????????????????????? ??-??????-?????????????????????? ?? ?????????????????????? ??????-??-??-??????????-??-??-?? ?? ??-???????? ?? ????????-???????????????? ?? ??????-?????????? ??-???????????????????????????????? ?? ?????????????? ???????? ???????? ???????? ???????? ??-???????????????? ?????????????????????? ?? ??????????????-???????????????????? ??-???????????????? ?? ?????????????????????? ???? ???? ???? ??-??-??-??????-??-??-??????????-?? ?? ??-?????????????????????????? ???????? ???????? ??-?????????????? ???????????? ??-?????????????????????????? ??-?????????????????????????????????????? ?? ??-??-??-??-??-??-?? ??-??-??-??-??-??-??-??-?? ??-??-??-???????????? ??-??????-??-??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ?? ??-??-??-??-??-??-?? ??????-??-??-????-??-??-??-??-??--?? ?? ??-??-??-??????-?? ?? ??-??-??-??????-?? ????????????-??-??-?? ?????????????????????? 80/20???? ???????????????????????????? ??-??-??-????20?????? ???????????????????????????? ?? ?????????????????? ?? ?????????????????????????????????????? ?? ?????????????????? ?? ?????????????????? ?????????????????????????? ?? ?????????????????????????? ?? ?????????????????????? ?????????????????????? ?? ???????????? ?? ?????????????? ?? ?????????? ?? ?????????????? ?????????????????????????????????????? ???????????????? ?? ???????????????? ?? ?????????????? ?? ?????????? ?? ???????????????? ?????????????????????? ?? ???????? ?? ?????????? ?? ???????????????????????? ?? ???????????????? ?? 13?????????????? ?? ?????????????????????? ??-??-??-???????????????????? ???????????????????????????????? ?? ???????????????? 1?????????????????????????? ?????????? 2????????????????(??????????)??????????????????????TPO?????? 3???????????????????? 4???????????????????????????????????? ?? ?????????????? 1?????????????????? ???? ?????????????????? ?????? ???? ?????????????????????????? ???? ?????????????? ???????? 2?????????? ?????????????????????????????????????????????????????????????? ???????????????? 3?????????????????????? ?????????????????????????????????????????? ?????????? ?? ???????????? 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(??) ??-?????????????? 1????-?? ?????? ?????? ?????? ?????? 2?????????????????? 3???????????????? 4???????????????????????? ?????????????????????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??-??-??-??-??-??-??????-??-??-??????-??-??-??-??-??-??-??-??-???????? ??-??-??-??-??-??-??-??-??-??????????????????-??-??-??????????????????????????????????- -??-??-????????-????????AITA??????????????-??-????????SKP??????????-??-??-?????????? ????????-??-??-??-??????????????????????-??????-???????????????????????????????? ??????MOTHERS????????????????????-??-??-??-??-??-??-??-??-??-??-?????? ????????????????????-???????????????????????? ??????????????????????????????????????????????????????`??????`????`?????? ??????????????????????????????????????????????????????????????`????`???????? ???????????????????????????? ??$??$??$????????-??-??-??-??-??-??-??-????????????-??-??-??-??-??-??-??-??-??-??-??-???? ????-??-??-??-??-??-??-??-??????????-??-??-??-??-??-??-??????????-??-??-??????-??-??-??-??-???? ??~??~??~????????????????????~????????????????????????????????????~?????????? ??????????????????~??????????????????????????????????????????-??????????-?????? ????????????~??????????~??~??~???? ??~??????~?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????? ??????????TCL?????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ??$??$??$??????????????-??????????????-???? ??=??=??=??=??=??&????=??=??=??=??=??=??MBA;????PPT ??????=??=??=??=??=??=??????????????????????????????????=??????=???????????????????? ????????STI??=??=??=??=??=????????????????????????????????????ASHER?????????????? ????????????=??????????????????????????????=??=??=????????????????????????????=?? ????????=????=???????????????????????????????????????????????????????????????? ???????????????????? ??$??$??$????????-??-??-??-??-??-??-??-???? ????-??-??-???? ????-??-??-??-??-???? ????-??-??-??-??-??-???? ??$??$??$??????????????-??-??-?????????????????????????????????????????????????? ??????????????????????????????-???????????????????????????????????????????????? ?????????????? ??-??-??-??-??-??-?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ????????????????????????????????ACE?????? ==================================================================== (??????????????????,???? ????????-??:hhllkk123 at sina.com ????????,????!)08:51:44 From seFDes at wwwfs8w.com Tue Jul 22 09:42:46 2008 From: seFDes at wwwfs8w.com (=?GB2312?B?zOF+uN9+uaR+1/d+0Kd+wso=?=) Date: Wed, 23 Jul 2008 00:42:46 +0800 Subject: EXCEL =?GB2312?B?0+s=?= PPT =?GB2312?B?1NogfrncfsDtftbQfrXEfrjffry2ftTLftPDMDA6NDI6NDY=?= Message-ID: EXCEL ? PPT ? ~?~?~?~?~?~?~?~? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~? 2.0.0.8.?.0.7.?.2.5.-.2.6.?.?-? 2.0.0.8.?.0.8.?.2.2.-.2.3.?.?-? ?~?~?~? :0.2.0.-.8.4.2.0.4.8.7.6. ?.?.?. 0.7.5.7.-.8.6.1.8.8.2.6.0 ?.?.? 021-51035856 ??? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~?? ????????????????????20????????????????????????25?????????????????2000??????~????????~?????????????????????????????????Excel???????????Excel??????????????????????????????????????Excel??????????????????????????????????????????????????????????????????Excel???????Excel????????????????????? ??????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????~?~?~??????????????????????????????????????????????????????????---POWERPOINT? ???~?~?~?~?~?~????????~?~?~?~?~?????~?~???~?~???~?~????~?~?~?~?????~?~?~???~???~?~?~?~?~?~?~?~?~??????????~?~?~?~?~?~???~?~?~?~?? ? ~?~ ?~ ?? ????????~?~?~???????????Excel ?PPT ????~?~?~???~?~?~?~?~? ? ~?~ ?~ ?? ??EXCEL ???~?~?~???~?~?~?~?~?? ?????????????????????~?~?~?? ?~??~??~???~??~???~??~???~? ?~?~?~?~?~?~?~?~?~?~?? ?~???????~?~?~??????? ?????~???~?Excel ?PPT ????~?~?~???~????~?? ? ~?~ ?~ ?? ?????EXCEL??-???-???-??????-? ?1??? 1.?????????? 2.???? 3.??????????????????????? 4.?????????????? 5.?????? 6.???????????????????? 7.????????? 8.??????? 9.??????????? 10.???? ?2??? 1.????????? 2.????? 3.???? 4.????? 5.???? 6.???? 7.?????????? 8.??????? 9.????? 10.???? ?3??? 1.????? 2.??????????????? 3.??????? 4.?????VBA?? 5.????????? 6.?????? 7.???? 8.????????????????? 9.????????? 10.??????????? ?4??? 1.??????????????? 2.?????????????? 3.???? 4.????????????????? 5.?????? 6.???? 7.????????? 8.???? 9.?????? 10.???? ?5??? 1.??????? 2.ODBC?Query 3.?????? 4.???? 5.????????? 6.???? 7.SQL?? 8.?????? 9.?????????????? 10.?????????????? ?6??? 1.????????? 2.IF???? 3.??????????? 4.???? 5.?????? 6.???? 7.???? 8.???? 9.???????? 10.???????? ?????Powerpoint?????????????? ?1??? 1.????? 2.????? 3.????? 4.?????? 5.?????? 6.???????? 7.????? 8.??????????? 9.????? ?2??? 1.??/??/?????? 2.????? 3.????? 4.??????? 5.?????? 6.????? 7.????????? 8.????Excel????? 9.???? 10.?????? ?3??? 1.?????? 2.????? 3.???? 4.???????? 5.???? 6.????? 7.??? 8.???? 9.???? 10.???? ?4?? 1.?????????? 2.????? 3.????? 4.???? 5.???? 6.????? 7.????? 8.?????? 9.?????? 10.???? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~? ??-?-???-?-?-???-?-?-???-?-?-???-?-?-? ??????? Excel ? PPT ?-?-?-?-?-?-?-? ----------------------------------------------------------------------------------------------------------------------- ?~?~?~? ?? ? ? ???~??~???????????????~?~?~????????????????????-?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????Excel?PPT?????????????????????????????? EXCEL ? PPT ?~?~?~?~?~?~?~?~? ???~?????????? ?????????????????????????APV?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????TCL??????????????????????????????NEC????????????????? ------------------------------------------------------------------------------------------------------------------------ (????????.?,?? ????.?:66cc_88cc at 163.com ?-?-?-?,?-?!)00:42:46 From latta at snf.stanford.edu Tue Jul 22 13:26:42 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 22 Jul 2008 13:26:42 -0700 Subject: Problem amtetcher SNF 2008-07-22 13:26:41: pumping down has gotten way worse Message-ID: last week I was able to pumpdown in 10 mins or less. just now I let it pump for 40 mins and got to only 0.87mT. That's a ripping rate of about 0.01mt/2mins.... What's up? From cbaxter at snf.stanford.edu Tue Jul 22 21:08:04 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 22 Jul 2008 21:08:04 -0700 Subject: Problem amtetcher SNF 2008-07-22 13:26:41: pumping down has gotten way worse Message-ID: The problem with the mks baratron and controller, if I reset the mks controller(model 170m-6c) the system would pump down fine and reach setpoint with in 2mins. We need to schedule the system shutdowm and removed the baratron and controller and have it repair and cal. Right now system is working normal by resetting the mkc controller. From 88wg at 88gseev.com Wed Jul 23 03:46:35 2008 From: 88wg at 88gseev.com (=?GB2312?B?1srBv7ncwO3M4cn9IQ==?=) Date: Wed, 23 Jul 2008 18:46:35 +0800 Subject: =?GB2312?B?uN8tvKgt0KctyfotsvotudwtwO0t0+sts8ktsb4tv9gt1sYtMTg6NDY6MzQ=?= Message-ID: ?-?-?-?-?-?-?-?-?-?-?-? ?~?~?~??2 0 0 8 ? 8 ? 1 6 - 1 7 ? ?~?~?~??? ? ? ? ? ? ? ? ?~?~?~??2 5 0 0?/???????? ??????) ?~?~?~?:0 7 5 5 - 6 1 2 8 9 8 9 0 6 1 2 9 1 2 6 0 ? ? ? ?~?~?~? ???????????????????????????????????????????????? ???????????????????????????????????????????????? ????????????????????????????????????????????????? ???????????????????????????????????????????????? ?????????????????????? ?~?~?~?? ? ???????????????????????????????? ? ?????????????????????????? ? ????????????????????????? ? ??????????????????????????? ? ????????????????????? ++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ ?~?~?~?? ????????????? 1? ??????????? ?????? ?????? ????????? ????????? 2????????????? ??????? ?????? ??????????? ???????? 3???????? ?????? ?????? ?????? ?????? 4?????????? ??????????? 1??????? ????????? ????????? ???????????? ????????? ???????????? 2? ?????? ????????? ? ??????? ? ????????? ? ????????????? ????????? ? ????????? ? ??????????? 3?????????? 4????????????????????? 5????? ????????? ????????????????? 1?????????????? ???????????????? ????????????????? ????????????????? 2??????????? ?????????? ????????? ????????? ?????? ?????? ??????????? ?????? ?????? ???????????????????? 3? ???????? ???????????? ???????????? ??????? ???????????????? 4? ???????? ???????? ?????? ???? ??????? ?????? ?????????????????? ++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ ?~?~?~? ?`?`? Jasunlau ????????????????????/??????????MBA???????????????????`?? ????????????????????????????????????????????????????????? ?`?`?????????????????????????????????????????????????????? ????????????????????????????????????????????????????????? ????????? ?`?`?`?`?`?`?`??????????????????????`?`?`?????????????????????????????????????????????????????????????????????????????????????????? ????????:????????????????????????????????????????????????????DELL???????????????????????????????????54?????????????????????TDK?OKI???????????????????????????????????????????????????????SOLA????????????????????????????????????????? ? .? .?. ? ? ?! ??????? ? ? 66aa_88aa at 163.com From jjeong1 at snf.stanford.edu Wed Jul 23 08:36:57 2008 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Wed, 23 Jul 2008 08:36:57 -0700 Subject: Problem amtetcher SNF 2008-07-23 08:36:56: can't pump Message-ID: It says "can't pump to base" after long pumping. From eenriquez at snf.stanford.edu Wed Jul 23 12:49:17 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 12:49:17 -0700 Subject: Comment amtetcher SNF 2008-07-21 15:20:31: Update Message-ID: Archived From jwpchen at snf.stanford.edu Wed Jul 23 22:00:54 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 23 Jul 2008 22:00:54 -0700 Subject: Comment amtetcher SNF 2008-07-23 22:00:54: pumps fast Message-ID: turbopump step done in 3-5 minutes but where's the equipment binder? From sghucdzdsf at 126.com Thu Jul 24 18:43:01 2008 From: sghucdzdsf at 126.com (sghucdzdsf at 126.com) Date: Fri, 25 Jul 2008 09:43:01 +0800 Subject: =?GB2312?B?tPrA7dK1zvE=?= Message-ID: ??????(??/?????! ???????????????????? ???????????????????????????????????????? ???????????????????<>??????????? ????????????????????????????????????<>? ?????<>2%-0.8%?????????? ?????????????? ???????: ??????? ? ??137-1356-3135 ?????????? Q Q:357163066 From fhFDGhg at 5Z6F6sfs553e.com Tue Jul 29 06:16:35 2008 From: fhFDGhg at 5Z6F6sfs553e.com (=?GB2312?B?yOe6zraozrvE47XE1rDStdDOz/M=?=) Date: Tue, 29 Jul 2008 21:16:35 +0800 Subject: =?GB2312?B?x7DMqKGi1vrA7b3TtP3XqNK1u6/RtcG3?= 21:16:35 Message-ID: ???????????? ?`?`?`????????????????????? ?`?`?`??2 0 0 8 ? 0 8 ? 0 9 - 1 0? ? ? ? 2 0 0 8 ? 0 8 ? 1 6 - 1 7 ? ? ? ? ` ??? 2 0 0 0 ? ?`?`?`?: 0 7 5 5 - 6 1 2 8 9 8 9 0 ? ? ? 0 2 1 - 5 1 0 3 5 9 6 1 ? ? ? ?`?`?`? ? ?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? ?`?`?`?? ?1. ?????????????????????????????????? ?2. ??Office?????????????? ?3. ????????????????????????? ?4. ??????????????????? ?5. ?????????????????????????????????????? 6.????????????????????????????????????????? ?7. ????????????????????? ?`?`?`????????.???????????????? ==================================================================================== ?`?`?`?? ??????? 1?????? 2??????? 3?????????? 4?????? 5??????? 6?????????? 7????? ??????????? 1???????? a??????????????? b????????????? c???????? ?????????? ??????????? ?????????? d??????? 2????????? a???????????????? 3?????????? a??????? b????????? c????TPO??? d????????? 4??????? a??????? b????? c?????? d???????????:????? ????????????? 1?????? 2??????? 3?????? 4??????? 5??????? ???????????? 1??????? a??? b????? c??? d??? 2??????? a??????? b???????? c?????? 3??????? a??????? b????? c?????? d?????? ?????????? 1??????? a?????????? b??????????? c?????????? d?????????? e???????? 2??????? a?????5W1H b??????? c????? ????????? 1???E-MAIL 2???FAX 3?????? ???????? 1???????? 2?????? 3????? 4???3A?? 5??????????? 6???????? 7???????? 8????? ??????????? 1????????????? 2????????????? 3?????? 4?????????????????????? 5????? 6????? ?????? 1?????????? 2?????? 3?????? 4???????? 5???????????? 6??????????? ==================================================================================== ?`?`?`?? ??????????????????????????????????????????.???????10????????.????????????????????????????????????????????????????????.????????????????????????????????????????????????????????????????????????.???????????????????????????????.????????90????????.?????????????????????21CN.COM?????????????????????????????????????????????????????????????????????????????????????????????????????-?????????? (? ? ? ? ? ? !???? ???? ?,?? ????-?:hhllkk123 at sina.com ) 21:16:35 From tretdtdgg at tom.com Tue Jul 29 14:38:46 2008 From: tretdtdgg at tom.com (tretdtdgg at tom.com) Date: Wed, 30 Jul 2008 05:38:46 +0800 Subject: =?GB2312?B?warPtcjLo7rVxdHeuuw=?= Message-ID: ???????????????????????????????????????? ???????????????????????--??????? 1??????????????????????????---??? 2????????????,?????????????!?? ??????? ???134-8081-0376 Q Q:383751141 ??? http://haiyuan888.3653h.com/ From mtan at snf.stanford.edu Tue Jul 29 17:27:29 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 29 Jul 2008 17:27:29 -0700 Subject: Problem amtetcher SNF 2008-07-29 17:27:28: low DC bias Message-ID: From mtan at snf.stanford.edu Tue Jul 29 17:30:01 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 29 Jul 2008 17:30:01 -0700 Subject: Problem amtetcher SNF 2008-07-29 17:30:00: process stopped due to low DC bias Message-ID: From mtan at snf.stanford.edu Tue Jul 29 18:00:53 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 29 Jul 2008 18:00:53 -0700 Subject: Shutdown amtetcher SNF 2008-07-29 18:00:52: front plate is burned Message-ID: The top edge of the wafer holders #1 and # 6 are burned From cbaxter at snf.stanford.edu Tue Jul 29 23:35:40 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Jul 2008 23:35:40 -0700 Subject: Comment amtetcher SNF 2008-07-29 23:35:39: Arcing Message-ID: Major arcing on between tray#1 and #6, need a major clean. From mdickey at snf.stanford.edu Wed Jul 30 09:38:32 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 Jul 2008 09:38:32 -0700 Subject: Comment amtetcher SNF 2008-07-29 23:35:39: Arcing Message-ID: Cleaned up From mdickey at snf.stanford.edu Wed Jul 30 09:39:34 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 Jul 2008 09:39:34 -0700 Subject: Shutdown amtetcher SNF 2008-07-29 18:00:52: front plate is burned Message-ID: Cleaned up and replaced hexode and trays, ardels for tray 1 and 6.. ...currently in recipe 2. Adjusted and checked tray adjustments From latta at snf.stanford.edu Wed Jul 30 10:57:40 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 10:57:40 -0700 Subject: Problem amtetcher SNF 2008-07-29 17:30:00: process stopped due to low DC bias Message-ID: Probably due to the arcing reported later... From latta at snf.stanford.edu Wed Jul 30 10:57:57 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 10:57:57 -0700 Subject: Problem amtetcher SNF 2008-07-29 17:27:28: low DC bias Message-ID: Probably due to the arcing reported later... From latta at snf.stanford.edu Wed Jul 30 11:01:02 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:01:02 -0700 Subject: Problem amtetcher SNF 2008-07-23 08:36:56: can't pump Message-ID: Taking about 8 mins to pump down to new base (0.8mT) From latta at snf.stanford.edu Wed Jul 30 11:01:16 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:01:16 -0700 Subject: Problem amtetcher SNF 2008-07-20 23:56:07: Long pumpdown Message-ID: getting better... From latta at snf.stanford.edu Wed Jul 30 11:01:31 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:01:31 -0700 Subject: Problem amtetcher SNF 2008-07-19 00:53:46: long pumpdown, program 2 won't go to holding Message-ID: to the archives.. From latta at snf.stanford.edu Wed Jul 30 11:01:58 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:01:58 -0700 Subject: Problem amtetcher SNF 2008-07-10 00:41:31: long pumpdown Message-ID: noted From latta at snf.stanford.edu Wed Jul 30 11:03:16 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:03:16 -0700 Subject: Problem amtetcher SNF 2008-06-17 23:26:20: etch rate unstable Message-ID: Quals run 7/1 and 7/17- ok. Results posted in comments and log book From latta at snf.stanford.edu Wed Jul 30 11:03:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:03:55 -0700 Subject: Comment amtetcher SNF 2008-07-23 22:00:54: pumps fast Message-ID: Taking about 8 mins to pumpdown now. Log book returned..... From latta at snf.stanford.edu Wed Jul 30 11:32:30 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 11:32:30 -0700 Subject: Comment amtetcher SNF 2008-07-30 11:32:29: Process Quals- again.... Message-ID: ran etchrates for program 3# again on 17 July. Wafers in position #2 in all six tray for 5 mins. Average of all wafers = Ox 344A/ min, PR 139A/min, Ox:PR=2.46:1 If you'd like the full data please email me. From jwpchen at snf.stanford.edu Thu Jul 31 03:26:37 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 31 Jul 2008 03:26:37 -0700 Subject: Comment amtetcher SNF 2008-07-31 03:26:36: arc marks Message-ID: on tray3's aluminum in the latch area is this from the previously reported arcing event, or is this neww?