Problem amtetcher SNF 2008-06-06 17:59:24: Process 1 gas would not shut off.

gth at snf.stanford.edu gth at snf.stanford.edu
Fri Jun 6 17:59:25 PDT 2008


Process went fine. In the end it gives this message that Process 1 gas which is NF3 would not shut off.
I check the flow, it is 0/35 sccm (hence it is not flowing).
I called John. He said maybe some problem with setting the 0 of the MFC.
Please have a look at this, seems like a fake error message.
thanks
-gaurav




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