Problem amtetcher SNF 2008-06-17 23:26:20: etch rate unstable

king at snf.stanford.edu king at snf.stanford.edu
Tue Jun 17 23:26:21 PDT 2008


it seemed to need a long time to get a repeatable etch rate.  I did the usual 15 min seasoning, pgm 3. Just do an etch rate test to be sure.




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