From rostam at snf.stanford.edu Mon Mar 3 17:52:50 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 3 Mar 2008 17:52:50 -0800 Subject: Problem amtetcher SNF 2008-03-03 17:52:49: clamp not working Message-ID: the thing that clamps the trays to load/unload wafers is not working. I pressed both red bottoms and waited for a long time and nothing happened. From latta at snf.stanford.edu Tue Mar 4 16:35:59 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:35:59 -0800 Subject: Problem amtetcher SNF 2008-03-03 17:52:49: clamp not working Message-ID: Working now. A couple of users reset the limit switch. Thanks, guys. From latta at snf.stanford.edu Tue Mar 4 16:36:43 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:36:43 -0800 Subject: Comment amtetcher SNF 2008-02-26 11:10:04: vaccuum wand and wafer loading dock issues Message-ID: Loader works now. We will look into the vacuum wand issue. From latta at snf.stanford.edu Tue Mar 4 16:37:07 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:37:07 -0800 Subject: Problem amtetcher SNF 2008-02-13 09:31:32: Loader not working. Message-ID: Working now. From latta at snf.stanford.edu Tue Mar 4 16:37:42 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:37:42 -0800 Subject: Problem amtetcher SNF 2008-02-14 15:00:00: Possible safety hazard Message-ID: Fixed- hazard removed and both hands need to be engaged to operate loader. From latta at snf.stanford.edu Tue Mar 4 16:38:00 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:38:00 -0800 Subject: Comment amtetcher SNF 2008-02-15 10:34:52: Loader update Message-ID: Works! From latta at snf.stanford.edu Tue Mar 4 16:38:34 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:38:34 -0800 Subject: Comment amtetcher SNF 2008-02-27 19:21:12: Update Loader Message-ID: Works. From riteshj at snf.stanford.edu Wed Mar 12 17:11:08 2008 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Wed, 12 Mar 2008 17:11:08 -0700 Subject: Problem amtetcher SNF 2008-03-12 17:11:08: vacuum wand loses vacuum intermittently Message-ID: the vacuum wand is not able to maintin its vacuum well and loses it which might end up breaking someones wafer. From eenriquez at snf.stanford.edu Thu Mar 13 07:49:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Mar 2008 07:49:21 -0700 Subject: Problem amtetcher SNF 2008-03-12 17:11:08: vacuum wand loses vacuum intermittently Message-ID: The button was stuck. Unstuck button and cleaned. From libei at snf.stanford.edu Sun Mar 16 02:20:02 2008 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Sun, 16 Mar 2008 02:20:02 -0700 Subject: Problem amtetcher SNF 2008-03-16 02:20:01: Can't pmp to base error message Message-ID: Same problem as before. Turbo pump failed several times to reach the setpoint. From eenriquez at snf.stanford.edu Mon Mar 17 08:31:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 08:31:44 -0700 Subject: Comment amtetcher SNF 2008-03-17 08:31:44: Update Message-ID: Ran recipe #3 after venting the chamber for 15 min without any problems. Also ran recipe#2 after venting for 30 min without problems. If this problem reoccurs, please log the recipe # on coral to help us troubleshoot. From yuhykr at snf.stanford.edu Mon Mar 24 15:20:36 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Mon, 24 Mar 2008 15:20:36 -0700 Subject: Shutdown amtetcher SNF 2008-03-24 15:20:35: pressure out of limit during etching process Message-ID: From latta at snf.stanford.edu Tue Mar 25 10:55:32 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Mar 2008 10:55:32 -0700 Subject: Shutdown amtetcher SNF 2008-03-24 15:20:35: pressure out of limit during etching process Message-ID: Hummm, found the problem. Read next shutdown comment. From latta at snf.stanford.edu Tue Mar 25 10:56:27 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Mar 2008 10:56:27 -0700 Subject: Shutdown amtetcher SNF 2008-03-25 10:56:27: Tray 3 & 4 badly burned due to arcing Message-ID: Tray 4 not clipped in properly.... From latta at snf.stanford.edu Tue Mar 25 10:56:41 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Mar 2008 10:56:41 -0700 Subject: Problem amtetcher SNF 2008-03-16 02:20:01: Can't pmp to base error message Message-ID: noted. From latta at snf.stanford.edu Tue Mar 25 10:56:51 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Mar 2008 10:56:51 -0700 Subject: Comment amtetcher SNF 2008-03-17 08:31:44: Update Message-ID: noted From mdickey at snf.stanford.edu Wed Mar 26 08:31:02 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 26 Mar 2008 08:31:02 -0700 Subject: Comment amtetcher SNF 2008-03-26 08:31:02: Test needed Message-ID: Need to get some new wafers and run a test after cleaning and replacing damaged parts From latta at snf.stanford.edu Wed Mar 26 09:33:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 26 Mar 2008 09:33:55 -0700 Subject: Shutdown amtetcher SNF 2008-03-25 10:56:27: Tray 3 & 4 badly burned due to arcing Message-ID: Mike replaced and aligned burnt trays. Jim Kruger is replacing the dummies wafers and running the stand-by program to check all systems ready for use.... From jimkruger at snf.stanford.edu Wed Mar 26 11:46:35 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 26 Mar 2008 11:46:35 -0700 Subject: Comment amtetcher SNF 2008-03-26 11:46:35: OK on Process 1 Message-ID: Replaced dummy wafers, ran Stnadby prog = 2, then ran dry run Prog 1, 12 min and then wafers Prog 1 12 min. Ran Standby last, all OK From latta at snf.stanford.edu Wed Mar 26 13:33:24 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:33:24 -0700 Subject: Comment amtetcher SNF 2008-03-26 08:31:02: Test needed Message-ID: Jim Kruger ran prog 2 and prog 1 twice for 12 mins. From ofidaner at snf.stanford.edu Mon Mar 31 05:08:04 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Mon, 31 Mar 2008 05:08:04 -0700 Subject: Problem amtetcher SNF 2008-03-31 05:08:03: does not pump down Message-ID: From eenriquez at snf.stanford.edu Mon Mar 31 11:46:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Mar 2008 11:46:10 -0700 Subject: Comment amtetcher SNF 2008-03-31 11:46:10: Update Message-ID: Pump down problem seems to occur only when running the Standby recip (#2). Please let me know if you observe it on any other recipes. I pumped and vented the chamber and ran recipe #2 several times with no problems. Will continue to monitor system.