Comment amtetcher SNF 2008-05-17 13:26:30: Intermittent leak

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sat May 17 13:26:30 PDT 2008


So, clearly, if a high leak rate is measured, and then a 
(bad but lower) leak rate is measured, the problem is NOT CLEARED.  There is an intermittent leak.  
This kind of flippant clearing of problems ruins people's wafers.  Wafers which may have months of work into them.  So then each user is stuck testing each and every piece of equipment before we use it.  (Which still offers no guarantee if the problem is truely intermittent).   




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