Comment amtetcher SNF 2008-05-21 09:15:05: Pumpdown update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 21 09:15:08 PDT 2008


Replaced the ion gauge.  Vented the chamber and had it open for  10 min.  Ran recipe #3 (0.5 mT process).  It took 3.25 min to go from pressing the RUN button to process start.




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