Shutdown amtetcher SNF 2008-05-22 10:29:39: Ion guage failure

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Thu May 22 14:11:35 PDT 2008


Checked out the ION gauge connections and ran recipe 3
with no alarms. Ran recipe 2 with no problems other than
valve 5 will not shut off (NF3) Apparently it does not run NF3 on
this process? Will leave machine yellow and use at your 
own discretion.




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