Problem amtetcher SNF 2008-05-23 01:05:06: Gas 5 not closing at end of run + ion guage comment

jsnapp at snf.stanford.edu jsnapp at snf.stanford.edu
Fri May 23 01:05:07 PDT 2008


Reliably receieved after running etch, "Gas 5 not closed" alarm.  Aborted, and vent process was able to pump down and purge.
Also, chamber took many many many tries before the turbo pump could keep the pressure < .5mT with the ion guage on.  Also experienced rapid spikes up in ion gauge pressure as moisture(?) outgassed.




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