Problem amtetcher SNF 2008-11-28 12:51:55: Viewport Coated with a Yellow Layer & Gas 5 Problem

kocabas at kocabas at
Fri Nov 28 12:51:56 PST 2008

I cannot see within the chamber. Viewport is covered with a yellowish polymer. When I cannot see inside, I cannot tell when the etch is over and end up over/under etching, which is quite frustrating.
Gas 5 error still persists. I hit abort and continued. That seemed to work.

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