From alsune at snf.stanford.edu Tue Apr 7 15:03:54 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 7 Apr 2009 15:03:54 -0700 Subject: Problem amtetcher SNF 2009-04-07 15:03:54: Displays Message Gas5 Won't Close Message-ID: After finishing program #1 cycle it displays a warning message that says gas 5 won't close. From latta at snf.stanford.edu Thu Apr 9 10:40:30 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Apr 2009 10:40:30 -0700 Subject: Problem amtetcher SNF 2009-04-07 15:03:54: Displays Message Gas5 Won't Close Message-ID: gas5 pressure adjusted From latta at snf.stanford.edu Thu Apr 9 10:40:42 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Apr 2009 10:40:42 -0700 Subject: Comment amtetcher SNF 2009-03-23 08:46:14: worn dummies Message-ID: dummies replaced From eenriquez at snf.stanford.edu Thu Apr 9 13:23:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Apr 2009 13:23:49 -0700 Subject: Problem amtetcher SNF 2009-03-03 14:37:56: Needs a process qual Message-ID: Archived From jsuarez at snf.stanford.edu Tue Apr 14 11:44:11 2009 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Tue, 14 Apr 2009 11:44:11 -0700 Subject: Problem amtetcher SNF 2009-04-14 11:44:11: GAS 5 - NF3 gas in Process 3 Message-ID: NF3 gas showing 2 to 3 cc during process 3. Also noticed RF is lower than usual (only 1042/1012, usually it's around 1185/1150). From cbaxter at snf.stanford.edu Tue Apr 14 18:09:34 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Apr 2009 18:09:34 -0700 Subject: Problem amtetcher SNF 2009-04-14 11:44:11: GAS 5 - NF3 gas in Process 3 Message-ID: From tura at snf.stanford.edu Wed Apr 15 01:45:25 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 15 Apr 2009 01:45:25 -0700 Subject: Problem amtetcher SNF 2009-04-15 01:45:24: not venting Message-ID: It is not venting at the end of the etch, my wafer is still inside. I stuck a 2" wafer on a 4" carrier wafer using photoresist, so the 2" wafer may have fallen. But I don't see how that would prevent the machine from venting.. From masaharu at snf.stanford.edu Wed Apr 15 06:17:52 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 15 Apr 2009 06:17:52 -0700 Subject: Shutdown amtetcher SNF 2009-04-15 06:17:51: Message-ID: From mdickey at snf.stanford.edu Wed Apr 15 12:01:54 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 15 Apr 2009 12:01:54 -0700 Subject: Comment amtetcher SNF 2009-04-15 12:01:54: Update Message-ID: After consulating Ceaser, we think there is a programing error due to the power glitches yesterday. He will address it when he gets in this afternoon. From cbaxter at snf.stanford.edu Wed Apr 15 19:45:39 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Apr 2009 19:45:39 -0700 Subject: Shutdown amtetcher SNF 2009-04-15 06:17:51: Message-ID: The atm switch was stuck close, adjusted atm switch and removed sample wafer from chamber. From cbaxter at snf.stanford.edu Wed Apr 15 19:45:48 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Apr 2009 19:45:48 -0700 Subject: Problem amtetcher SNF 2009-04-15 01:45:24: not venting Message-ID: From rhenn at snf.stanford.edu Fri Apr 17 16:56:43 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Fri, 17 Apr 2009 16:56:43 -0700 Subject: Problem amtetcher SNF 2009-04-17 16:56:42: Gas 5 wont close Message-ID: When running program 2 after running program 4, the message gas 5 wont close is displayed on the screen. From dalyx at snf.stanford.edu Sat Apr 18 12:14:28 2009 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Sat, 18 Apr 2009 12:14:28 -0700 Subject: Comment amtetcher SNF 2009-04-18 12:14:27: yellow crumbles Message-ID: there were some yellow crumbles at the bottom of the chamber. i cleaned them with a wipe as much as i could. gas 5 won't close error persists. the chamber clean is likely disfunctional---which may be the reason for the crumbles?? From dalyx at snf.stanford.edu Sat Apr 18 13:29:57 2009 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Sat, 18 Apr 2009 13:29:57 -0700 Subject: Comment amtetcher SNF 2009-04-18 13:29:57: on nf3 Message-ID: NF3 gas (gas 5) did not close. Pressed abort to close the valve. Below is some info from NF3 MSDS data sheet. INHALATION EFFECTS: Inhalation causes breathing difficulties, chest pains, and nausea. It forms a hemoglobin complex, similar to carbon monoxide, and thus, is highly poisonous due to interference with oxygen transport in blood. Effects of oxygen deficiency resulting from simple asphyxiants may include: rapid breathing, diminished mental alertness, impaired muscular coordination, faulty judgement, depression of all sensations, emotional instability, and fatigue. As asphyxiation progresses, nausea, vomiting, prostration, and loss of consciousness may result, eventually leading to convulsions, coma, and death. Oxygen deficiency during pregnancy has produced developmental abnormalities in humans and experimental animals. From ginel at snf.stanford.edu Mon Apr 20 14:51:09 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Mon, 20 Apr 2009 14:51:09 -0700 Subject: Comment amtetcher SNF 2009-04-20 14:51:08: prog 4 deleted Message-ID: i accidentally deleted prog 4. i reprogrammed it in to match the sheet but check it before using it please. From eenriquez at snf.stanford.edu Tue Apr 21 10:31:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Apr 2009 10:31:29 -0700 Subject: Comment amtetcher SNF 2009-04-20 14:51:08: prog 4 deleted Message-ID: Program 4 checked out OK. From eenriquez at snf.stanford.edu Wed Apr 22 11:27:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Apr 2009 11:27:13 -0700 Subject: Comment amtetcher SNF 2009-04-18 13:29:57: on nf3 Message-ID: Decreased the NF3 inlet pressure. From eenriquez at snf.stanford.edu Wed Apr 22 11:27:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Apr 2009 11:27:48 -0700 Subject: Comment amtetcher SNF 2009-04-18 12:14:27: yellow crumbles Message-ID: Wiped down the baseplate From eenriquez at snf.stanford.edu Wed Apr 22 11:28:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Apr 2009 11:28:06 -0700 Subject: Problem amtetcher SNF 2009-04-17 16:56:42: Gas 5 wont close Message-ID: Decreased the NF3 inlet pressure From eenriquez at snf.stanford.edu Wed Apr 22 11:28:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Apr 2009 11:28:22 -0700 Subject: Comment amtetcher SNF 2009-04-15 12:01:54: Update Message-ID: Archived