Problem amtetcher SNF 2009-04-14 11:44:11: GAS 5 - NF3 gas in Process 3

jsuarez at snf.stanford.edu jsuarez at snf.stanford.edu
Tue Apr 14 11:44:11 PDT 2009


NF3 gas showing 2 to 3 cc during process 3.  Also noticed RF is lower 
than usual (only 1042/1012, usually it's around 1185/1150).  




More information about the amtetcher-pcs mailing list