Problem amtetcher SNF 2009-04-15 01:45:24: not venting

[tura at snf.stanford.edu]

It is not venting at the end of the etch, my wafer is still inside. I stuck a 2" wafer on a 4" carrier wafer using photoresist, so the 2" wafer may have fallen. But I don't see how that would prevent the machine from venting..