Problem amtetcher SNF 2009-04-17 16:56:42: Gas 5 wont close
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Apr 22 11:28:06 PDT 2009
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Problem amtetcher SNF 2009-04-17 16:56:42: Gas 5 wont close
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Comment amtetcher SNF 2009-04-18 12:14:27: yellow crumbles
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Decreased the NF3 inlet pressure
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Problem amtetcher SNF 2009-04-17 16:56:42: Gas 5 wont close
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Comment amtetcher SNF 2009-04-18 12:14:27: yellow crumbles
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