From mdickey at snf.stanford.edu Mon Aug 3 13:23:43 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 3 Aug 2009 13:23:43 -0700 Subject: Shutdown amtetcher SNF 2009-08-03 13:23:43: Bell Jar Message-ID: Can not get the bell jar to go down. Will let Caeser look into it From mdickey at snf.stanford.edu Tue Aug 4 08:32:56 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 4 Aug 2009 08:32:56 -0700 Subject: Comment amtetcher SNF 2009-08-04 08:32:55: Bell Jar Message-ID: Got the bell jar working. Currently ramping up the turbo and going to test recipe 2. If no errors than will release From mdickey at snf.stanford.edu Tue Aug 4 10:56:20 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 4 Aug 2009 10:56:20 -0700 Subject: Shutdown amtetcher SNF 2009-08-03 13:23:43: Bell Jar Message-ID: Had to reprogram recipe 1 thru 5. Make sure to check your parameters while running. Currently has a gas 5 glow error in the standby recipe that should not affect the other recipes. From tura at snf.stanford.edu Tue Aug 4 12:42:37 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 4 Aug 2009 12:42:37 -0700 Subject: Problem amtetcher SNF 2009-08-04 12:42:37: Can't run standyby recipe (#2) Message-ID: It can't finish running recipe #2. Gas 5 flow error. From gth at snf.stanford.edu Tue Aug 4 14:18:06 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 4 Aug 2009 14:18:06 -0700 Subject: Comment amtetcher SNF 2009-08-04 14:18:05: Running Rcp 4 Message-ID: Ran a dummy, 10 min Rcp 4, Gas flows and power look OK. From gth at snf.stanford.edu Tue Aug 4 15:05:44 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 4 Aug 2009 15:05:44 -0700 Subject: Problem amtetcher SNF 2009-08-04 15:05:43: had to vent the chamber 3 times after the recipe. Message-ID: ran 5 min, Rcp 4. process went fine. was not able to vent after once cycle. had to vent 3 times. From iwjung at snf.stanford.edu Tue Aug 4 16:07:21 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Tue, 4 Aug 2009 16:07:21 -0700 Subject: Comment amtetcher SNF 2009-08-04 16:07:21: runs okay Message-ID: Recipe 4 ran okay. ~350A/min NEWLSN etch rate, still had to push twice for the venting to work. From lwchang at snf.stanford.edu Tue Aug 4 17:12:03 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 4 Aug 2009 17:12:03 -0700 Subject: Problem amtetcher SNF 2009-08-04 17:12:01: prog 3 flow 1 out of limit Message-ID: The set flow for gas1 is 6sccm and the actual flow is 6sccm but the system keeps showing flow1 out limit and would not proceed. From shott at snf.stanford.edu Tue Aug 4 18:12:15 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 4 Aug 2009 18:12:15 -0700 Subject: Problem amtetcher SNF 2009-08-04 12:42:37: Can't run standyby recipe (#2) Message-ID: As noted in Li-Wen's message to amtetcher at snf, following the EPO event, a number of the underlying properties defaulted to their factory default rather than to their proper setting. In particular, max vent time was set too low, with explains the "failure to vent" that several of you have recently reported. Also, the settings for the mass flowmeters (including the size and calibration factor) needed to be reset to proper values. I'm clearing the "won't vent" problems and believe that having reset all of the known "hidden parameters" to their proper values should make life much better. However, as Li-Wen suggested, everyone who etched wafers during the past several runs should look at their results carefully and anyone etching in the near future should be careful to run test runs until we get confirmation of proper etch performance. John From shott at snf.stanford.edu Tue Aug 4 18:12:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 4 Aug 2009 18:12:42 -0700 Subject: Problem amtetcher SNF 2009-08-04 15:05:43: had to vent the chamber 3 times after the recipe. Message-ID: As noted in Li-Wen's message to amtetcher at snf, following the EPO event, a number of the underlying properties defaulted to their factory default rather than to their proper setting. In particular, max vent time was set too low, with explains the "failure to vent" that several of you have recently reported. Also, the settings for the mass flowmeters (including the size and calibration factor) needed to be reset to proper values. I'm clearing the "won't vent" problems and believe that having reset all of the known "hidden parameters" to their proper values should make life much better. However, as Li-Wen suggested, everyone who etched wafers during the past several runs should look at their results carefully and anyone etching in the near future should be careful to run test runs until we get confirmation of proper etch performance. John From shott at snf.stanford.edu Tue Aug 4 18:13:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 4 Aug 2009 18:13:16 -0700 Subject: Problem amtetcher SNF 2009-08-04 17:12:01: prog 3 flow 1 out of limit Message-ID: As noted in Li-Wen's message to amtetcher at snf, following the EPO event, a number of the underlying properties defaulted to their factory default rather than to their proper setting. In particular, max vent time was set too low, with explains the "failure to vent" that several of you have recently reported. Also, the settings for the mass flowmeters (including the size and calibration factor) needed to be reset to proper values. I'm clearing the "won't vent" problems and believe that having reset all of the known "hidden parameters" to their proper values should make life much better. However, as Li-Wen suggested, everyone who etched wafers during the past several runs should look at their results carefully and anyone etching in the near future should be careful to run test runs until we get confirmation of proper etch performance. John From lwchang at snf.stanford.edu Tue Aug 4 18:43:28 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 4 Aug 2009 18:43:28 -0700 Subject: Shutdown amtetcher SNF 2009-08-04 18:43:27: tool not released by staff Message-ID: Talked to Gaurav, found out the tool was not released by mdickey.... From king at snf.stanford.edu Tue Aug 4 19:07:34 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 4 Aug 2009 19:07:34 -0700 Subject: Comment amtetcher SNF 2009-08-04 19:07:33: AMT help tonight? Message-ID: Could we please try to get the AMT going again tonight? I can run oxide etch rate tests if we can get it back out of shutdown. It's not clear why it needs to be redlighted at this point but if so please let us know. Thanks. From lwchang at snf.stanford.edu Tue Aug 4 20:26:30 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 4 Aug 2009 20:26:30 -0700 Subject: Comment amtetcher SNF 2009-08-04 20:26:29: Message-ID: So Gaurav over-enabled mdickey before he officially releases the tool...When I came up to the tool prog 3 was not working (flow1 out limit). John came in to fix the service parameters and the corr. factors and I ran a test run using prog 3, found out the etch rate was halved compared to what it used to be. Not sure if there are more parameters needed to be fixed at this point so I redlighted the tool as it was not supposed to be run by users at the begining. Hope this clears things out and hope Cesar can bring it back up if everything looks fine. From cbaxter at snf.stanford.edu Tue Aug 4 22:24:07 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Aug 2009 22:24:07 -0700 Subject: Shutdown amtetcher SNF 2009-08-04 18:43:27: tool not released by staff Message-ID: Enter all recipes and preform zero mfc and flow cal for gas#5. Season the chamber using recipe#3. From alsune at snf.stanford.edu Thu Aug 6 04:38:13 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 6 Aug 2009 04:38:13 -0700 Subject: Shutdown amtetcher SNF 2009-08-06 04:38:13: Can't pump down to base Message-ID: After running program 3, the chamber does not vent. It prints "Cant pump to base" and the chamber won't open. I have 9 wafers inside, 2 wafers positioned on 1,2,3,4th hex and 1 wafer on 5rh hex. Would it be possible to retrieve my wafers and unload on the box on the loading shelf? From king at snf.stanford.edu Thu Aug 6 07:10:57 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 6 Aug 2009 07:10:57 -0700 Subject: Comment amtetcher SNF 2009-08-06 07:10:57: I'll use it if it's working again... Message-ID: From mdickey at snf.stanford.edu Thu Aug 6 14:13:02 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:13:02 -0700 Subject: Shutdown amtetcher SNF 2009-08-06 04:38:13: Can't pump down to base Message-ID: Elmer zero'd the manometer. Recovered last users wafers. Ran twice and made sure system vented properly. From king at snf.stanford.edu Thu Aug 6 20:40:38 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 6 Aug 2009 20:40:38 -0700 Subject: Comment amtetcher SNF 2009-08-06 20:40:38: AMT etch rate Message-ID: is still a little higher than normal (390A/min vs 360 for thermal SiO2) but the tool ran fine. Thanks. From alsune at snf.stanford.edu Fri Aug 7 05:00:10 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 7 Aug 2009 05:00:10 -0700 Subject: Problem amtetcher SNF 2009-08-07 05:00:09: Can't pump down to base Message-ID: After seasoning and loading the wafers, ran program 3 for 3 min. But before it could start it prints out "can't pump to base" after 6min turbo pump down mode. From alsune at snf.stanford.edu Fri Aug 7 05:11:44 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 7 Aug 2009 05:11:44 -0700 Subject: Shutdown amtetcher SNF 2009-08-07 05:11:44: Can't pump down to base Message-ID: On running programs the it gets stuck on turbo pump down stage and prints "Can't pump down to base" after 6min" From eenriquez at snf.stanford.edu Fri Aug 7 09:46:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Aug 2009 09:46:39 -0700 Subject: Comment amtetcher SNF 2009-08-07 09:46:39: Manometer reading is drifting Message-ID: New manometer should be here by Monday. From cbaxter at snf.stanford.edu Sun Aug 9 19:36:02 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 9 Aug 2009 19:36:02 -0700 Subject: Shutdown amtetcher SNF 2009-08-07 05:11:44: Can't pump down to base Message-ID: Found turbo off, ramped up turbo and run recipe#2 w/out problrm. From dongrip at snf.stanford.edu Tue Aug 11 05:10:33 2009 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 11 Aug 2009 05:10:33 -0700 Subject: Problem amtetcher SNF 2009-08-11 05:10:32: flow 2 out limit Message-ID: When i ran program 3, flow 2 out limit occurred, and i couldn't go further the process. i didn't shut down the machine, because i may miss some tips to resolve this issue. From chingmei at snf.stanford.edu Tue Aug 11 09:06:58 2009 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Tue, 11 Aug 2009 09:06:58 -0700 Subject: Problem amtetcher SNF 2009-08-11 09:06:58: flow 2 out limit Message-ID: I ran process 3 several times but the error kept happening. I have no idea to fix this. From mdickey at snf.stanford.edu Tue Aug 11 09:37:02 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 11 Aug 2009 09:37:02 -0700 Subject: Shutdown amtetcher SNF 2009-08-11 09:37:01: Gas Message-ID: We are currently waiting the arrival of Freon 23 gas cyllinder. From tura at snf.stanford.edu Tue Aug 11 13:06:07 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 11 Aug 2009 13:06:07 -0700 Subject: Comment amtetcher SNF 2009-08-11 13:06:07: ETA? Message-ID: Could you please give an update on the arrival time of CHF3? Is it today? Thank you. From shott at snf.stanford.edu Tue Aug 11 15:32:57 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 11 Aug 2009 15:32:57 -0700 Subject: Shutdown amtetcher SNF 2009-08-11 09:37:01: Gas Message-ID: Freon 23 tank has been replaced ... John From shott at snf.stanford.edu Tue Aug 11 15:33:28 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 11 Aug 2009 15:33:28 -0700 Subject: Problem amtetcher SNF 2009-08-11 05:10:32: flow 2 out limit Message-ID: Freon 23 tank has been replaced. John From shott at snf.stanford.edu Tue Aug 11 15:33:36 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 11 Aug 2009 15:33:36 -0700 Subject: Problem amtetcher SNF 2009-08-11 09:06:58: flow 2 out limit Message-ID: Freon 23 tank has been replaced. John From shott at snf.stanford.edu Tue Aug 11 15:33:43 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 11 Aug 2009 15:33:43 -0700 Subject: Comment amtetcher SNF 2009-08-11 13:06:07: ETA? Message-ID: Freon 23 tank has been replaced. John From tura at snf.stanford.edu Tue Aug 11 22:10:31 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 11 Aug 2009 22:10:31 -0700 Subject: Problem amtetcher SNF 2009-08-11 22:10:31: wafer holder Message-ID: One of the little plastic things that hold the wafer is broken in tray 1, 3rd spot from the top. Also, photoresist was burnt at the 5th tray 3rd spot from the top, while other places were OK. From mdickey at snf.stanford.edu Wed Aug 12 06:56:15 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 12 Aug 2009 06:56:15 -0700 Subject: Problem amtetcher SNF 2009-08-11 22:10:31: wafer holder Message-ID: Replaced bad clip. Did not see any signs of burning From cursive at snf.stanford.edu Thu Aug 20 18:49:56 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 20 Aug 2009 18:49:56 -0700 Subject: Problem amtetcher SNF 2009-08-20 18:49:55: Gas 3 flow Message-ID: Gas 3 flow is high at beginning, over 10 sccm. From kcbalram at snf.stanford.edu Sat Aug 22 20:06:42 2009 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sat, 22 Aug 2009 20:06:42 -0700 Subject: Comment amtetcher SNF 2009-08-22 20:06:42: Gas3 flow not zero during silicon trench etch Message-ID: From jrjain at snf.stanford.edu Sun Aug 23 17:05:42 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 23 Aug 2009 17:05:42 -0700 Subject: Problem amtetcher SNF 2009-08-23 17:05:42: Bell Mechanism Halts Message-ID: On occasion, during bell raising/lowering, mechanisms catches and quickly releases. This results in the bell jar suddenly dropping down to end of lift bar (makes loud noise upon contact). Maybe some grease needs to be applied to the bar. From eenriquez at snf.stanford.edu Fri Aug 28 12:27:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Aug 2009 12:27:52 -0700 Subject: Comment amtetcher SNF 2009-08-28 12:27:51: Need to reenter recipes Message-ID: Need to reprogram all recipes except for #3. Ran recipe 3 with no problems. From eenriquez at snf.stanford.edu Fri Aug 28 13:53:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Aug 2009 13:53:35 -0700 Subject: Comment amtetcher SNF 2009-08-28 13:53:34: Replaced NF3 cylinder Message-ID: From rshyam at snf.stanford.edu Sat Aug 29 08:36:04 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 29 Aug 2009 08:36:04 -0700 Subject: Comment amtetcher SNF 2009-08-29 08:36:04: Standby condition Message-ID: Left it in the same standby condition that I found it in (At the end of process 3 and NOT vented). Process 2 needs to be programmed, as reported by Elmer yesterday. From kcbalram at snf.stanford.edu Sat Aug 29 21:38:33 2009 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sat, 29 Aug 2009 21:38:33 -0700 Subject: Comment amtetcher SNF 2009-08-29 21:38:33: Standby Condition Message-ID: As noted by a previous user, process 2 has not been programmed. Left the system with chamber pumped. Present status message.. " End of program. Vent the chamber" Krishna From shott at snf.stanford.edu Sun Aug 30 07:57:10 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 30 Aug 2009 07:57:10 -0700 Subject: Comment amtetcher SNF 2009-08-29 08:36:04: Standby condition Message-ID: Program 2 entered .... should be double checked by someone more expert. John From shott at snf.stanford.edu Sun Aug 30 07:57:23 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 30 Aug 2009 07:57:23 -0700 Subject: Comment amtetcher SNF 2009-08-29 21:38:33: Standby Condition Message-ID: Program 2 entered .... should be double checked by someone more expert. John From shott at snf.stanford.edu Sun Aug 30 07:59:30 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 30 Aug 2009 07:59:30 -0700 Subject: Comment amtetcher SNF 2009-08-30 07:59:29: Program #2 entered .... Message-ID: I've entered program #2 so that folks can use it in normal standby mode. Someone more expert than I should double check my work. Also, other programs (#1, #4, and #5, I think ....) need to be added. Thanks, John From mdickey at snf.stanford.edu Mon Aug 31 10:57:48 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 31 Aug 2009 10:57:48 -0700 Subject: Comment amtetcher SNF 2009-08-31 10:57:48: Programed Message-ID: Programed recipes 1, 4, 5 and 7