Comment amtetcher SNF 2009-08-04 14:18:05: Running Rcp 4
gth at snf.stanford.edu
gth at snf.stanford.edu
Tue Aug 4 14:18:06 PDT 2009
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Problem amtetcher SNF 2009-08-04 12:42:37: Can't run standyby recipe (#2)
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Problem amtetcher SNF 2009-08-04 15:05:43: had to vent the chamber 3 times after the recipe.
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Ran a dummy, 10 min Rcp 4, Gas flows and power look OK.
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Problem amtetcher SNF 2009-08-04 12:42:37: Can't run standyby recipe (#2)
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Problem amtetcher SNF 2009-08-04 15:05:43: had to vent the chamber 3 times after the recipe.
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