Problem amtetcher SNF 2009-08-04 15:05:43: had to vent the chamber 3 times after the recipe.

gth at gth at
Tue Aug 4 15:05:44 PDT 2009

ran 5 min, Rcp 4.
process went fine. 
was not able to vent after once cycle. had to vent 3 times.

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