Problem amtetcher SNF 2009-08-04 15:05:43: had to vent the chamber 3 times after the recipe.

gth at snf.stanford.edu gth at snf.stanford.edu
Tue Aug 4 15:05:44 PDT 2009


ran 5 min, Rcp 4.
process went fine. 
was not able to vent after once cycle. had to vent 3 times.




More information about the amtetcher-pcs mailing list