Problem amtetcher SNF 2009-08-04 17:12:01: prog 3 flow 1 out of limit

lwchang at snf.stanford.edu lwchang at snf.stanford.edu
Tue Aug 4 17:12:03 PDT 2009


The set flow for gas1 is 6sccm
and the actual flow is 6sccm but the system keeps showing flow1 out
limit and would not proceed.




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