Shutdown amtetcher SNF 2009-08-06 04:38:13: Can't pump down to base

alsune at snf.stanford.edu alsune at snf.stanford.edu
Thu Aug 6 04:38:13 PDT 2009


After running program 3, the chamber does not vent. It prints "Cant pump to base" and the chamber won't open. I have 9 wafers inside, 2 wafers positioned on 1,2,3,4th hex and 1 wafer on 5rh hex. Would it be possible to retrieve my wafers and unload on the box on the loading shelf?




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