Problem amtetcher SNF 2009-08-07 05:00:09: Can't pump down to base

alsune at snf.stanford.edu alsune at snf.stanford.edu
Fri Aug 7 05:00:10 PDT 2009

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After seasoning and loading the wafers, ran program 3 for 3 min. But before it could start it prints out "can't pump to base" after 6min turbo pump down mode.

Previous message: Comment amtetcher SNF 2009-08-06 20:40:38: AMT etch rate
Next message: Shutdown amtetcher SNF 2009-08-07 05:11:44: Can't pump down to base
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