Problem amtetcher SNF 2009-08-20 18:49:55: Gas 3 flow
cursive at snf.stanford.edu
cursive at snf.stanford.edu
Thu Aug 20 18:49:56 PDT 2009
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Problem amtetcher SNF 2009-08-11 22:10:31: wafer holder
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Comment amtetcher SNF 2009-08-22 20:06:42: Gas3 flow not zero during silicon trench etch
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Gas 3 flow is high at beginning, over 10 sccm.
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Problem amtetcher SNF 2009-08-11 22:10:31: wafer holder
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Comment amtetcher SNF 2009-08-22 20:06:42: Gas3 flow not zero during silicon trench etch
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