From eenriquez at snf.stanford.edu Wed Dec 2 11:06:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Dec 2009 11:06:07 -0800 Subject: Problem amtetcher SNF 2009-11-19 03:26:29: extremely high leakup rate Message-ID: Mike rebuilt the vent valve. Now with N2 pressure ~ 20 psi, the leak rate is < 1 mt/min. Vent time = 2.2 min. From eenriquez at snf.stanford.edu Wed Dec 2 11:06:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Dec 2009 11:06:17 -0800 Subject: Comment amtetcher SNF 2009-11-19 10:05:32: Update high leak rate Message-ID: Archived From eenriquez at snf.stanford.edu Thu Dec 3 08:07:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Dec 2009 08:07:45 -0800 Subject: Comment amtetcher SNF 2009-10-14 15:04:20: What a pretty new view port! Message-ID: Archive From usha at snf.stanford.edu Sun Dec 6 18:56:23 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Sun, 6 Dec 2009 18:56:23 -0800 Subject: Comment amtetcher SNF 2009-12-06 18:56:23: System is not ready did not go away .. need to check. Message-ID: From usha at snf.stanford.edu Sun Dec 6 19:49:54 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Sun, 6 Dec 2009 19:49:54 -0800 Subject: Comment amtetcher SNF 2009-12-06 19:49:54: System not ready - Turbo went off. Message-ID: From ybkim at snf.stanford.edu Mon Dec 7 01:18:23 2009 From: ybkim at snf.stanford.edu (ybkim at snf.stanford.edu) Date: Mon, 7 Dec 2009 01:18:23 -0800 Subject: Shutdown amtetcher SNF 2009-12-07 01:18:22: turbo went down Message-ID: From eenriquez at snf.stanford.edu Mon Dec 7 10:47:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Dec 2009 10:47:21 -0800 Subject: Comment amtetcher SNF 2009-12-07 10:47:21: Update turbo Message-ID: The turbo pump is defective. Currently installing its replacement. From eenriquez at snf.stanford.edu Mon Dec 7 15:25:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Dec 2009 15:25:30 -0800 Subject: Comment amtetcher SNF 2009-12-07 15:25:30: Update turbo Message-ID: Installed new turbo but it does not start up. Might also have a defective controller. Will troubleshoot further tomorrow. From cbaxter at snf.stanford.edu Tue Dec 8 00:23:31 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:23:31 -0800 Subject: Shutdown amtetcher SNF 2009-12-07 01:18:22: turbo went down Message-ID: Turbo pump was installed earlier today, reset controller and ramped up turbo to speed, also completed installing rf match. Ran recipe#2 and 3 w/out problem. From cbaxter at snf.stanford.edu Tue Dec 8 00:45:38 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:45:38 -0800 Subject: Comment amtetcher SNF 2009-12-06 18:56:23: System is not ready did not go away .. need to check. Message-ID: From cbaxter at snf.stanford.edu Tue Dec 8 00:45:44 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:45:44 -0800 Subject: Comment amtetcher SNF 2009-12-06 19:49:54: System not ready - Turbo went off. Message-ID: From cbaxter at snf.stanford.edu Tue Dec 8 00:45:48 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:45:48 -0800 Subject: Comment amtetcher SNF 2009-12-07 10:47:21: Update turbo Message-ID: From cbaxter at snf.stanford.edu Tue Dec 8 00:45:52 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:45:52 -0800 Subject: Comment amtetcher SNF 2009-12-07 15:25:30: Update turbo Message-ID: From eenriquez at snf.stanford.edu Tue Dec 8 08:46:58 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Dec 2009 08:46:58 -0800 Subject: Comment amtetcher SNF 2009-12-08 08:46:58: Leak rate test is good Message-ID: chamber leak rate = 1.2 mT/min From eenriquez at snf.stanford.edu Tue Dec 8 08:49:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Dec 2009 08:49:49 -0800 Subject: Problem amtetcher SNF 2009-12-08 08:49:49: Needs a process qual Message-ID: A major system component has been replaced. There is a possibility that processes might shift. From latta at snf.stanford.edu Thu Dec 10 16:13:37 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 10 Dec 2009 16:13:37 -0800 Subject: Problem amtetcher SNF 2009-12-08 08:49:49: Needs a process qual Message-ID: Qual completed and post at; https://spf.stanford.edu/SNF/equipment/dry-etching/amt-8100-plasma-etcher-amtetcher-semi-clean/new-recent-qualification-results From tura at snf.stanford.edu Fri Dec 11 14:56:14 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 11 Dec 2009 14:56:14 -0800 Subject: Problem amtetcher SNF 2009-12-11 14:56:13: Turbo error during etch Message-ID: I got turbo error during the etch twice. When the error occurs, the etch stops. From rik at snf.stanford.edu Mon Dec 14 14:20:48 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 14 Dec 2009 14:20:48 -0800 Subject: Problem amtetcher SNF 2009-12-14 14:20:48: Turbo pump problem Message-ID: Same as previous user. Msg was "TURBO PUMP OVERLOADED". From alsune at snf.stanford.edu Mon Dec 14 17:32:43 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Mon, 14 Dec 2009 17:32:43 -0800 Subject: Problem amtetcher SNF 2009-12-14 17:32:43: Turbopump problem Message-ID: Same as last user. From alsune at snf.stanford.edu Mon Dec 14 17:35:04 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Mon, 14 Dec 2009 17:35:04 -0800 Subject: Problem amtetcher SNF 2009-12-14 17:35:03: Turboump problem Message-ID: Same as last user. Left it in program #3 in vacuum because running program #2 can further worsen the condition of the equipment. From cbaxter at snf.stanford.edu Tue Dec 15 01:22:04 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Dec 2009 01:22:04 -0800 Subject: Problem amtetcher SNF 2009-12-11 14:56:13: Turbo error during etch Message-ID: The turbo pump is ok, the reason why the turbo error is due to a high reflective (1000+) power causing rf interference affecting the turbo controller, open up the matching network and found the drive gear on the shunt motor was loose. tighten the set screw and ran recipe 1,2 and 3 w/out problem. From cbaxter at snf.stanford.edu Tue Dec 15 01:22:09 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Dec 2009 01:22:09 -0800 Subject: Problem amtetcher SNF 2009-12-14 14:20:48: Turbo pump problem Message-ID: From cbaxter at snf.stanford.edu Tue Dec 15 01:22:17 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Dec 2009 01:22:17 -0800 Subject: Problem amtetcher SNF 2009-12-14 17:32:43: Turbopump problem Message-ID: From cbaxter at snf.stanford.edu Tue Dec 15 01:22:26 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Dec 2009 01:22:26 -0800 Subject: Problem amtetcher SNF 2009-12-14 17:35:03: Turboump problem Message-ID: From damodei at snf.stanford.edu Tue Dec 15 18:41:30 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 15 Dec 2009 18:41:30 -0800 Subject: Comment amtetcher SNF 2009-12-15 18:41:27: ATM error when venting Message-ID: From ywidjaja at snf.stanford.edu Wed Dec 16 03:27:30 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Wed, 16 Dec 2009 03:27:30 -0800 Subject: Problem amtetcher SNF 2009-12-16 03:27:29: Hexode not aligned Message-ID: Had some difficulty closing the bell jar because it keeps alarming and gives the following error: Hex did not move. From cbaxter at snf.stanford.edu Mon Dec 21 10:01:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 Dec 2009 10:01:15 -0800 Subject: Problem amtetcher SNF 2009-12-16 03:27:29: Hexode not aligned Message-ID: Changed encoder hex pcb.. From cbaxter at snf.stanford.edu Mon Dec 21 10:01:29 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 Dec 2009 10:01:29 -0800 Subject: Comment amtetcher SNF 2009-12-15 18:41:27: ATM error when venting Message-ID: From cbaxter at snf.stanford.edu Wed Dec 30 09:45:51 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 30 Dec 2009 09:45:51 -0800 Subject: Problem amtetcher SNF 2009-11-20 12:25:01: Loader is not working Message-ID: Installed new pnumatic valve for tray clamp From cbaxter at snf.stanford.edu Wed Dec 30 09:45:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 30 Dec 2009 09:45:59 -0800 Subject: Problem amtetcher SNF 2009-11-20 08:23:48: Wafer unloader is not working Message-ID: