Problem amtetcher SNF 2009-12-14 14:20:48: Turbo pump problem
rik at snf.stanford.edu
rik at snf.stanford.edu
Mon Dec 14 14:20:48 PST 2009
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Problem amtetcher SNF 2009-12-11 14:56:13: Turbo error during etch
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Problem amtetcher SNF 2009-12-14 14:20:48: Turbo pump problem
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Same as previous user. Msg was "TURBO PUMP OVERLOADED".
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Problem amtetcher SNF 2009-12-11 14:56:13: Turbo error during etch
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Problem amtetcher SNF 2009-12-14 14:20:48: Turbo pump problem
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