Problem amtetcher SNF 2009-12-11 14:56:13: Turbo error during etch

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Dec 15 01:22:04 PST 2009


The turbo pump is ok,  the reason why the turbo error
is due to a high reflective (1000+) power causing rf
interference affecting the turbo controller, open up the
matching network and found the drive gear on the shunt
motor was loose. tighten the set screw and ran recipe 1,2 and
3 w/out problem.




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