From mislam at snf.stanford.edu Tue Jan 6 22:35:47 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 6 Jan 2009 22:35:47 -0800 Subject: Shutdown amtetcher SNF 2009-01-06 22:35:46: Tray #5 acring mark Message-ID: After venting found tray#5 badly burned from previous user ran. It seems that the tray was not latched properly. Last user should have caught it. From mdickey at snf.stanford.edu Wed Jan 7 09:34:50 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 7 Jan 2009 09:34:50 -0800 Subject: Shutdown amtetcher SNF 2009-01-06 22:35:46: Tray #5 acring mark Message-ID: Cleaned up all the arcing and replaced affected ardels and tray clips. Replaced all test wafers. Community service anyone? From mcvittie at snf.stanford.edu Wed Jan 7 14:24:12 2009 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Wed, 07 Jan 2009 14:24:12 -0800 Subject: Shutdown amtetcher SNF 2009-01-06 22:35:46: Tray #5 acring mark Message-ID: <49652B8C.2060603@snf.stanford.edu> Mike, Have we determined why we had arcing? It is often caused by a user not putting the clamps down flush but there are machine issues that had cause it. Replacing the burnt plasma may have only solved symptom and not the problem. Jim mdickey at snf.stanford.edu wrote: > Cleaned up all the arcing and replaced affected ardels and > tray clips. Replaced all test wafers. Community service > anyone? > > From shott at snf.stanford.edu Wed Jan 7 19:02:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:02:16 -0800 Subject: Problem amtetcher SNF 2008-12-16 13:57:41: Not Jogging Message-ID: Although I can't report exactly what was done to fix it .... I know that the hex is jogging again. John From mislam at snf.stanford.edu Wed Jan 7 22:41:11 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 7 Jan 2009 22:41:11 -0800 Subject: Problem amtetcher SNF 2009-01-07 22:41:11: small arcing on tray#4 Message-ID: From mdickey at snf.stanford.edu Thu Jan 8 07:57:30 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 8 Jan 2009 07:57:30 -0800 Subject: Problem amtetcher SNF 2009-01-07 22:41:11: small arcing on tray#4 Message-ID: Cleaned up arcing and tightened up tray adjustment. Replacement trays will be ordered tofsy. From king at snf.stanford.edu Thu Jan 15 00:40:29 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 15 Jan 2009 00:40:29 -0800 Subject: Comment amtetcher SNF 2009-01-15 00:40:28: Fast etch rate Pgm 3 Thermal SiO2 Message-ID: Three test runs: 2 min = 425A/min; 5 min = 421 A/min; 10 min = 420 A/min. Stable press, temp, gas and power values. See me for details. From yeh at snf.stanford.edu Tue Jan 20 09:29:23 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 20 Jan 2009 09:29:23 -0800 Subject: Problem amtetcher SNF 2009-01-20 09:29:22: "Low DC Bias" error Message-ID: recipe #4. Plasma unstable during etch. Err msg comes on after ~1min into etch. Had to abort. From yeh at snf.stanford.edu Tue Jan 20 10:38:24 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 20 Jan 2009 10:38:24 -0800 Subject: Problem amtetcher SNF 2009-01-20 10:38:23: "Low DC bias" problem solved Message-ID: upon further review, found an UNUSED hex plate not fully seated. prob went away after adjustment. From jasonlin at snf.stanford.edu Tue Jan 20 17:21:50 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 20 Jan 2009 17:21:50 -0800 Subject: Comment amtetcher SNF 2009-01-20 17:21:50: Signs of arcing/burning Message-ID: Saw what seems to be burn marks underneath a tray near the top of one of the hexodes. From mislam at snf.stanford.edu Tue Jan 20 21:44:03 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 20 Jan 2009 21:44:03 -0800 Subject: Shutdown amtetcher SNF 2009-01-20 21:44:03: arc mark on tray #3 Message-ID: Open chamber to check and found arcing mark on tray#3 from previous users run. From mdickey at snf.stanford.edu Wed Jan 21 07:14:59 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Jan 2009 07:14:59 -0800 Subject: Shutdown amtetcher SNF 2009-01-20 21:44:03: arc mark on tray #3 Message-ID: cleaned up arc marks and replaced burnt ardel straps. Adjusted tray # 1. From cbaxter at snf.stanford.edu Wed Jan 21 21:53:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 21 Jan 2009 21:53:15 -0800 Subject: Comment amtetcher SNF 2009-01-20 17:21:50: Signs of arcing/burning Message-ID: Inspect each trays and hex, did not see any sign of arcing on any of the 7 trays and hex. From latta at snf.stanford.edu Thu Jan 22 11:43:39 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jan 2009 11:43:39 -0800 Subject: Problem amtetcher SNF 2009-01-20 09:29:22: "Low DC Bias" error Message-ID: arcing was the culprit From latta at snf.stanford.edu Thu Jan 22 11:43:48 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jan 2009 11:43:48 -0800 Subject: Problem amtetcher SNF 2009-01-20 10:38:23: "Low DC bias" problem solved Message-ID: archived From eenriquez at snf.stanford.edu Tue Jan 27 11:38:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Jan 2009 11:38:37 -0800 Subject: Problem amtetcher SNF 2008-12-11 14:51:12: gas valve 5 won't close Message-ID: Reduced NF3 gas line pressure from 27 psi to 15 psi. Before the pressure reduction the gas flow (when valve is closed) was not able to pump out to 0 sccm after 1.5 min. With the reduced pressure, the gas flow goes to 0 in 0.5 min.