Shutdown amtetcher SNF 2009-01-06 22:35:46: Tray #5 acring mark
Jim McVittie
mcvittie at snf.stanford.edu
Wed Jan 7 14:24:12 PST 2009
Mike,
Have we determined why we had arcing? It is often caused by a user not
putting the clamps down flush but there are machine issues that had
cause it. Replacing the burnt plasma may have only solved symptom and
not the problem.
Jim
mdickey at snf.stanford.edu wrote:
> Cleaned up all the arcing and replaced affected ardels and
> tray clips. Replaced all test wafers. Community service
> anyone?
>
>
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