Shutdown amtetcher SNF 2009-01-06 22:35:46: Tray #5 acring mark

Jim McVittie mcvittie at snf.stanford.edu
Wed Jan 7 14:24:12 PST 2009


Mike,

Have we determined why we had arcing?  It is often caused by a user not 
putting the clamps down flush but  there are machine issues that had 
cause it. Replacing the burnt plasma may have only solved symptom and 
not the problem.
    Jim    


mdickey at snf.stanford.edu wrote:
> Cleaned up all the arcing and replaced affected ardels and
> tray clips. Replaced all test wafers. Community service
> anyone?
>
>   



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