Comment amtetcher SNF 2009-01-15 00:40:28: Fast etch rate Pgm 3 Thermal SiO2

king at snf.stanford.edu king at snf.stanford.edu
Thu Jan 15 00:40:29 PST 2009

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Three test runs:  2 min = 425A/min; 5 min = 421 A/min; 10 min = 420 A/min.  Stable press, temp, gas and power values.  See me for details.

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