Problem amtetcher SNF 2009-01-20 09:29:22: "Low DC Bias" error

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Jan 20 09:29:23 PST 2009


recipe #4.  Plasma unstable during etch.  Err msg comes on after ~1min into etch.  Had to abort.




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