Problem amtetcher SNF 2008-12-11 14:51:12: gas valve 5 won't close

eenriquez at eenriquez at
Tue Jan 27 11:38:37 PST 2009

Reduced NF3 gas line pressure from 27 psi to 15 psi.  Before the pressure reduction the gas flow (when valve is closed) was not able to pump out to 0 sccm after 1.5 min.  With the reduced pressure, the gas flow goes to 0 in 0.5 min. 

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