From ahryciw at snf.stanford.edu Mon Jul 6 19:18:37 2009 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Mon, 6 Jul 2009 19:18:37 -0700 Subject: Problem amtetcher SNF 2009-07-06 19:18:37: Still no SF6 Message-ID: I see that amtetcher was green-lighted after the comment in late June indicating that the SF6 and NF3 pneumatic valves were about to be replaced. Has this happened yet? The NF3 works fine, but I still cannot get any SF6 flow (it read 1/26 sccm and gave a "flow 3 out limit" error). Also, the maximum flow rate for SF6 used to be 78 sccm, but now the limit appears to be 26 sccm (I got a "out of limits" error when I tried 70 sccm). Has this maximum limit been changed? From gth at snf.stanford.edu Sat Jul 11 19:35:34 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 11 Jul 2009 19:35:34 -0700 Subject: Problem amtetcher SNF 2009-07-11 19:35:33: power not reaching 1600W Message-ID: I ran Pgm 4, 5 min Alignment mark etch. Power is not reaching 1600W. It stays at 1200W. Is that an issue ? From eenriquez at snf.stanford.edu Mon Jul 13 07:48:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Jul 2009 07:48:32 -0700 Subject: Problem amtetcher SNF 2009-07-11 19:35:33: power not reaching 1600W Message-ID: This is not an issue. 1600 W is the maximum RF power that the generator can theoretically put out. The recipes are normally programmed for bias control which means that the power will be driven to the value required to achieve the set bias voltage. From rshyam at snf.stanford.edu Wed Jul 15 00:57:05 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 15 Jul 2009 00:57:05 -0700 Subject: Problem amtetcher SNF 2009-07-15 00:57:04: flaking Message-ID: found lot of flakes before seasoning run. hence did not use. From mdickey at snf.stanford.edu Wed Jul 15 09:27:58 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 15 Jul 2009 09:27:58 -0700 Subject: Problem amtetcher SNF 2009-07-15 00:57:04: flaking Message-ID: cleaned up loose particles From daesung at snf.stanford.edu Thu Jul 16 20:35:39 2009 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 16 Jul 2009 20:35:39 -0700 Subject: Problem amtetcher SNF 2009-07-16 20:35:38: Arching? Message-ID: First frame might have some arching signs. Please check. From mdickey at snf.stanford.edu Fri Jul 17 07:05:59 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 17 Jul 2009 07:05:59 -0700 Subject: Problem amtetcher SNF 2009-07-16 20:35:38: Arching? Message-ID: There was very minor arcing which I cleaned up From jrjain at snf.stanford.edu Sun Jul 19 00:05:58 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 19 Jul 2009 00:05:58 -0700 Subject: Shutdown amtetcher SNF 2009-07-19 00:05:57: Hexode trays melted Message-ID: Upon doing the normal pre-etch inspection, saw melted corners on two adjacent plastic trays. One tray is particularly bad and seems stuck halfway into the lock (not moved at all with gentle prying). It appears that the previous user either failed to do the proper system inspection or caused the melting himself. Looks like removal from the system and retraining is in order. From junil at snf.stanford.edu Mon Jul 20 01:30:36 2009 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Mon, 20 Jul 2009 01:30:36 -0700 Subject: Comment amtetcher SNF 2009-07-20 01:30:35: Message-ID: I have used 2nd, 3rd, 4th, 5th trays for my silicon etch process. Before doing main etch, I have done seasoning etch process and then run 2 batches without unusual thing. The only recipe change that I made is pressure from 40 to 20. I think I might have inspected the trays with special care....... found nothing unusual.... After my silicon etch, I have run program 2. I hope above description will help find out cause and solve theprobelm. Also let me know if I did something wrong. From mdickey at snf.stanford.edu Mon Jul 20 08:50:53 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Jul 2009 08:50:53 -0700 Subject: Shutdown amtetcher SNF 2009-07-19 00:05:57: Hexode trays melted Message-ID: Cleaned up and replaced burnt ardels. Needs a test From mdickey at snf.stanford.edu Mon Jul 20 09:41:10 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Jul 2009 09:41:10 -0700 Subject: Comment amtetcher SNF 2009-07-20 09:41:09: Tested Message-ID: Ran recipe 2 without any problems. No signs of arcing. From daesung at snf.stanford.edu Wed Jul 22 00:54:27 2009 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 22 Jul 2009 00:54:27 -0700 Subject: Problem amtetcher SNF 2009-07-22 00:54:27: Arching in the tray 2 Message-ID: From daesung at snf.stanford.edu Wed Jul 22 00:55:04 2009 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 22 Jul 2009 00:55:04 -0700 Subject: Problem amtetcher SNF 2009-07-22 00:55:03: Arching in the tray 2 Message-ID: From mdickey at snf.stanford.edu Wed Jul 22 07:00:20 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 22 Jul 2009 07:00:20 -0700 Subject: Problem amtetcher SNF 2009-07-22 00:55:03: Arching in the tray 2 Message-ID: I see no signs of arcing on any trays. From mdickey at snf.stanford.edu Wed Jul 22 07:00:32 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 22 Jul 2009 07:00:32 -0700 Subject: Problem amtetcher SNF 2009-07-22 00:54:27: Arching in the tray 2 Message-ID: I see no signs of arcing. From yeh at snf.stanford.edu Wed Jul 22 14:43:08 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 22 Jul 2009 14:43:08 -0700 Subject: Comment amtetcher SNF 2009-07-22 14:43:07: found a broken clamp Message-ID: on jog position 2, top wafer slot, upper right clamp. From yeh at snf.stanford.edu Wed Jul 22 14:44:05 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 22 Jul 2009 14:44:05 -0700 Subject: Comment amtetcher SNF 2009-07-22 14:44:05: bad wafer vacuum wand Message-ID: quartz wafer holder is loose from metal stem and will rotate uncontrollably during wafer handling. From mdickey at snf.stanford.edu Thu Jul 23 07:32:42 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 23 Jul 2009 07:32:42 -0700 Subject: Comment amtetcher SNF 2009-07-22 14:44:05: bad wafer vacuum wand Message-ID: Replaced wand tip. Wand is good From mdickey at snf.stanford.edu Thu Jul 23 07:33:26 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 23 Jul 2009 07:33:26 -0700 Subject: Comment amtetcher SNF 2009-07-22 14:43:07: found a broken clamp Message-ID: Replaced wafer clip. Adjusted tray 3. Please remember to load wafers away from clips From liangjl at snf.stanford.edu Fri Jul 31 23:28:04 2009 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Fri, 31 Jul 2009 23:28:04 -0700 Subject: Comment amtetcher SNF 2009-07-31 23:28:04: broke one dummy Message-ID: I unintentionly boke one dummy. Has cleaned the wafer piece and replaced with my own dummy wafer