Problem amtetcher SNF 2009-07-11 19:35:33: power not reaching 1600W
gth at snf.stanford.edu
gth at snf.stanford.edu
Sat Jul 11 19:35:34 PDT 2009
I ran Pgm 4, 5 min Alignment mark etch.
Power is not reaching 1600W. It stays at 1200W.
Is that an issue ?
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