Problem amtetcher SNF 2009-07-11 19:35:33: power not reaching 1600W

gth at snf.stanford.edu gth at snf.stanford.edu
Sat Jul 11 19:35:34 PDT 2009


I ran Pgm 4, 5 min Alignment mark etch.
Power is not reaching 1600W. It stays at 1200W.
Is that an issue ?




More information about the amtetcher-pcs mailing list