Comment amtetcher SNF 2009-07-22 14:43:07: found a broken clamp
yeh at snf.stanford.edu
yeh at snf.stanford.edu
Wed Jul 22 14:43:08 PDT 2009
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Problem amtetcher SNF 2009-07-22 00:55:03: Arching in the tray 2
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Comment amtetcher SNF 2009-07-22 14:43:07: found a broken clamp
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on jog position 2, top wafer slot, upper right clamp.
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Problem amtetcher SNF 2009-07-22 00:55:03: Arching in the tray 2
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Comment amtetcher SNF 2009-07-22 14:43:07: found a broken clamp
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