From eenriquez at snf.stanford.edu Mon Jun 1 12:39:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:39:39 -0700 Subject: Shutdown amtetcher SNF 2009-06-01 12:39:37: Turbo purge Message-ID: From eenriquez at snf.stanford.edu Tue Jun 2 14:38:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:38:07 -0700 Subject: Shutdown amtetcher SNF 2009-06-01 12:39:37: Turbo purge Message-ID: Replaced the turbo purge MFC From eenriquez at snf.stanford.edu Tue Jun 2 14:38:14 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:38:14 -0700 Subject: Problem amtetcher SNF 2009-05-31 10:47:08: "Turbo Purge OFF" error Message-ID: Replaced the turbo purge MFC From eenriquez at snf.stanford.edu Tue Jun 2 14:38:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:38:18 -0700 Subject: Problem amtetcher SNF 2009-05-28 23:40:31: "Turbo Purge OFF" error Message-ID: Replaced the turbo purge MFC From eenriquez at snf.stanford.edu Tue Jun 2 14:38:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:38:24 -0700 Subject: Problem amtetcher SNF 2009-05-28 18:00:52: "Turbo purge off" alarm Message-ID: Replaced the turbo purge MFC From eenriquez at snf.stanford.edu Tue Jun 2 14:38:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:38:33 -0700 Subject: Comment amtetcher SNF 2009-05-22 13:34:25: Wiped down Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jun 2 14:39:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:39:04 -0700 Subject: Problem amtetcher SNF 2009-05-22 12:23:50: polymer flakes Message-ID: Mike cleaned the chamber From eenriquez at snf.stanford.edu Tue Jun 2 14:39:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:39:09 -0700 Subject: Comment amtetcher SNF 2009-05-22 08:43:00: Hexode Message-ID: Mike cleaned the chamber From eenriquez at snf.stanford.edu Tue Jun 2 14:39:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 14:39:20 -0700 Subject: Comment amtetcher SNF 2009-05-21 22:47:22: Polymer flakes Message-ID: Mike cleaned the chamber From lwchang at snf.stanford.edu Tue Jun 2 17:16:04 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 2 Jun 2009 17:16:04 -0700 Subject: Problem amtetcher SNF 2009-06-02 17:16:03: bell jar Message-ID: bell jar refused to be lifted up at the end of the venting. waited ~2 more minutes to lift bell jar. only happened once.(the 1st time) From mdickey at snf.stanford.edu Wed Jun 3 07:21:25 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 3 Jun 2009 07:21:25 -0700 Subject: Problem amtetcher SNF 2009-06-02 17:16:03: bell jar Message-ID: Could not duplicate problem. Make sure to have constant pressure with fingers when moving the jar up and down. SF6 MFC needs to be sent out for recalibration. From tura at snf.stanford.edu Wed Jun 3 19:19:09 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 3 Jun 2009 19:19:09 -0700 Subject: Problem amtetcher SNF 2009-06-03 19:19:08: Gas 5 won't close Message-ID: I use a recipe with Gas 5, and afterwards I get "Gas 5 won't close" alarm. 10-20 seconds after the alarm, Gas 5 flow reading slowly goes to zero. From tura at snf.stanford.edu Thu Jun 4 10:35:59 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 4 Jun 2009 10:35:59 -0700 Subject: Problem amtetcher SNF 2009-06-04 10:35:58: Vacuum wand Message-ID: Vacuum want doesn't let the wafer go when the button is pressed. From eenriquez at snf.stanford.edu Thu Jun 4 12:32:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 12:32:53 -0700 Subject: Problem amtetcher SNF 2009-06-04 10:35:58: Vacuum wand Message-ID: Cleaned the button. From eenriquez at snf.stanford.edu Thu Jun 4 12:34:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 12:34:55 -0700 Subject: Comment amtetcher SNF 2009-06-04 12:34:55: Update Gas 5 and SF6 problem Message-ID: Sent out spare MFCs for recalibration. Will replace Gas 5 (NF3) and SF6 MFCs next week. From jwpchen at snf.stanford.edu Thu Jun 4 19:36:46 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 4 Jun 2009 19:36:46 -0700 Subject: Comment amtetcher SNF 2009-06-04 19:36:45: jig does not stay down Message-ID: sometimes the pneumatic jig for tray unloading does not stay in the 'down' position. after staying down for a minute or so, with a hiss and click the top plate will rise a few millimeters and not push down on the plastic tray fingers anymore From rshyam at snf.stanford.edu Fri Jun 5 19:19:27 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 5 Jun 2009 19:19:27 -0700 Subject: Problem amtetcher SNF 2009-06-05 19:19:26: vacuum wand vacuum very weak Message-ID: unusable From duygu at snf.stanford.edu Sat Jun 6 16:31:00 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Sat, 6 Jun 2009 16:31:00 -0700 Subject: Problem amtetcher SNF 2009-06-06 16:31:00: pressure out of range Message-ID: It was able to reach 40mTorr but then onceplasma is on, pressure goes up quickly to 60-70mtorr. It gives pressure out of range error. I tried many times. I ran program 2 and tried again and again. But it didn't work:( From duygu at snf.stanford.edu Sat Jun 6 16:32:50 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Sat, 6 Jun 2009 16:32:50 -0700 Subject: Problem amtetcher SNF 2009-06-06 16:32:50: high pressure error Message-ID: Now I can not even run program 2, it aborted. From duygu at snf.stanford.edu Sat Jun 6 16:36:37 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Sat, 6 Jun 2009 16:36:37 -0700 Subject: Problem amtetcher SNF 2009-06-06 16:36:37: pump stack leak error Message-ID: It is not usable:( From mislam at snf.stanford.edu Sat Jun 6 19:21:43 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 6 Jun 2009 19:21:43 -0700 Subject: Problem amtetcher SNF 2009-06-06 19:21:42: Stuck at "PMPDNG MNFLD" Message-ID: Can not abort or vent chamber. My 14 wafers inside. Please save my wafer in the wafer box if unloaded. Thanks. From mislam at snf.stanford.edu Sun Jun 7 12:37:39 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 7 Jun 2009 12:37:39 -0700 Subject: Comment amtetcher SNF 2009-06-07 12:37:39: Unloaded my wafers Message-ID: Won't pump down, chamber is vented From dalyx at snf.stanford.edu Sun Jun 7 16:01:15 2009 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Sun, 7 Jun 2009 16:01:15 -0700 Subject: Comment amtetcher SNF 2009-06-07 16:01:15: "Turbo went off" Message-ID: "Not ready. Turbo went off" message. And, as a matter of fact, won't pump down. From eenriquez at snf.stanford.edu Mon Jun 8 08:49:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 08:49:17 -0700 Subject: Comment amtetcher SNF 2009-06-08 08:49:17: Update Message-ID: Need to replace the vacuum pump. From eenriquez at snf.stanford.edu Mon Jun 8 08:55:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 08:55:44 -0700 Subject: Shutdown amtetcher SNF 2009-06-08 08:55:43: Defective vac pump Message-ID: From eenriquez at snf.stanford.edu Mon Jun 8 11:26:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:11 -0700 Subject: Shutdown amtetcher SNF 2009-06-08 08:55:43: Defective vac pump Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From eenriquez at snf.stanford.edu Mon Jun 8 11:26:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:24 -0700 Subject: Comment amtetcher SNF 2009-06-08 08:49:17: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 8 11:26:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:30 -0700 Subject: Comment amtetcher SNF 2009-06-07 16:01:15: "Turbo went off" Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From eenriquez at snf.stanford.edu Mon Jun 8 11:26:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:40 -0700 Subject: Comment amtetcher SNF 2009-06-07 12:37:39: Unloaded my wafers Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From eenriquez at snf.stanford.edu Mon Jun 8 11:26:46 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:46 -0700 Subject: Problem amtetcher SNF 2009-06-06 19:21:42: Stuck at "PMPDNG MNFLD" Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From eenriquez at snf.stanford.edu Mon Jun 8 11:26:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:50 -0700 Subject: Problem amtetcher SNF 2009-06-06 16:36:37: pump stack leak error Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From eenriquez at snf.stanford.edu Mon Jun 8 11:26:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:55 -0700 Subject: Problem amtetcher SNF 2009-06-06 16:32:50: high pressure error Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From eenriquez at snf.stanford.edu Mon Jun 8 11:26:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:26:59 -0700 Subject: Problem amtetcher SNF 2009-06-06 16:31:00: pressure out of range Message-ID: Installed a new/ rebuilt pump. Ran the standby recipe. From latta at snf.stanford.edu Tue Jun 9 16:00:30 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 9 Jun 2009 16:00:30 -0700 Subject: Problem amtetcher SNF 2009-05-07 15:57:06: No SF6 flow Message-ID: problem comment repeated... From tura at snf.stanford.edu Wed Jun 10 17:29:25 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 10 Jun 2009 17:29:25 -0700 Subject: Problem amtetcher SNF 2009-06-10 17:29:24: Vacuum wand is dead. Message-ID: The metal part is broken off. From mdickey at snf.stanford.edu Thu Jun 11 08:23:18 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 11 Jun 2009 08:23:18 -0700 Subject: Problem amtetcher SNF 2009-06-10 17:29:24: Vacuum wand is dead. Message-ID: Wand is ok. The tip broke off inside the wand and I temporarily fixed it. More tips are on order. From mdickey at snf.stanford.edu Thu Jun 11 08:52:32 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 11 Jun 2009 08:52:32 -0700 Subject: Problem amtetcher SNF 2009-06-05 19:19:26: vacuum wand vacuum very weak Message-ID: works now From tura at snf.stanford.edu Wed Jun 17 11:37:15 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 17 Jun 2009 11:37:15 -0700 Subject: Problem amtetcher SNF 2009-06-17 11:37:14: Etch nonuniform, etch rate inconsistent Message-ID: #3 standard oxide, 3 weeks ago I measured 425A/min, 1 week ago I measured 345A/min, today I measured 385A/min. Also the etch was VERY nonuniform today (~30% less etch towards the edges of the wafer). Program#3 only has GAS1 and GAS2, but during the etch GAS3 and GAS5 read 2. In fact GAS5 reads 2 even when the chamber is open, I hope that is reading wrong and we are not breathing NF3 in the lab. If those gases are present during the etch, it could certainly cause the etch inconsistencies. From eenriquez at snf.stanford.edu Thu Jun 25 07:49:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Jun 2009 07:49:47 -0700 Subject: Comment amtetcher SNF 2009-06-04 12:34:55: Update Gas 5 and SF6 problem Message-ID: Replaced gas 5 MFC (NF3) and SF6 MFC but NF3 is still not shutting off in time and SF6 is still not flowing. We have ordered rebuild kits for the obselete pneumatic gas shut-off valves. They should be here next week. From eenriquez at snf.stanford.edu Thu Jun 25 07:51:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Jun 2009 07:51:33 -0700 Subject: Comment amtetcher SNF 2009-06-25 07:51:32: Update gas 5 and SF6 flow problem Message-ID: Replaced gas 5 MFC (NF3) and SF6 MFC but NF3 is still not shutting off in time and SF6 is still not flowing. We have ordered rebuild kits for the obselete pneumatic gas shut-off valves. They should be here next week. From latta at snf.stanford.edu Thu Jun 25 13:53:45 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 13:53:45 -0700 Subject: Comment amtetcher SNF 2009-05-11 11:21:55: Update No SF6 Message-ID: new update From latta at snf.stanford.edu Thu Jun 25 13:54:34 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 13:54:34 -0700 Subject: Comment amtetcher SNF 2009-05-20 21:33:52: large black mark found on top right of 2nd tray - cleaned by Elmer Message-ID: archived From latta at snf.stanford.edu Thu Jun 25 13:55:05 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 13:55:05 -0700 Subject: Problem amtetcher SNF 2009-05-22 16:04:51: Still no SF6 Message-ID: new update in comments- rebuild kit coming. From latta at snf.stanford.edu Thu Jun 25 13:55:25 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 13:55:25 -0700 Subject: Problem amtetcher SNF 2009-06-03 19:19:08: Gas 5 won't close Message-ID: fixed From latta at snf.stanford.edu Thu Jun 25 13:55:41 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 13:55:41 -0700 Subject: Comment amtetcher SNF 2009-06-04 19:36:45: jig does not stay down Message-ID: ok now From latta at snf.stanford.edu Thu Jun 25 14:04:32 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 14:04:32 -0700 Subject: Problem amtetcher SNF 2009-06-17 11:37:14: Etch nonuniform, etch rate inconsistent Message-ID: I ran one wafer in each tray in the #2 position and measured five pionts per wafer. The results are within the +/- 5% variation in a wafer. The resutls are posted on the wiki. I will post a summary in comments. During the run both SF6 and NF3 showed 1sccm. We believe this to be a false reading as those MFC's are defective. From latta at snf.stanford.edu Thu Jun 25 14:08:46 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Jun 2009 14:08:46 -0700 Subject: Comment amtetcher SNF 2009-06-25 14:08:45: Uniformity within a wafer Message-ID: After the comment posted I ran a uniformity check for each tray, position #2. Here is a summary of the average for each tray. The full results including each of the five measuement position on the wafers is on the wiki. Tray 1 = 412A/min (undensified LTO) Tray 2 = 417 Tray 3 = 422 Tray 4 = 415 Tray 5 = 406 Tray 6 = 408