Problem amtetcher SNF 2009-06-06 16:31:00: pressure out of range

duygu at duygu at
Sat Jun 6 16:31:00 PDT 2009

It was able to reach 40mTorr but then onceplasma is on, pressure goes up quickly to 60-70mtorr. It gives pressure out of range error. I tried many times. I ran program 2 and tried again and again. But it didn't work:( 

More information about the amtetcher-pcs mailing list