Problem amtetcher SNF 2009-06-06 16:31:00: pressure out of range

duygu at snf.stanford.edu duygu at snf.stanford.edu
Sat Jun 6 16:31:00 PDT 2009


It was able to reach 40mTorr but then onceplasma is on, pressure goes up quickly to 60-70mtorr. It gives pressure out of range error. I tried many times. I ran program 2 and tried again and again. But it didn't work:( 




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